2/28/2012	10:15:32 AM	Main Vac valve closed
2/28/2012	10:15:45 AM	Main Vac valve opened
2/28/2012	10:15:59 AM	Main Vac valve closed
2/28/2012	10:16:38 AM	Bypass valve opened
2/28/2012	10:16:44 AM	Bypass valve closed
2/28/2012	10:16:44 AM	Main Vac valve opened
2/28/2012	10:22:01 AM	Main Vac valve closed
2/28/2012	10:22:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/28/2012	10:22:32 AM	Recipe started at 10:22 AM
2/28/2012	10:22:32 AM	Helium valve closed
2/28/2012	10:22:32 AM	H2 valve closed
2/28/2012	10:22:32 AM	BCl3 valve closed
2/28/2012	10:22:32 AM	PH3 valve closed
2/28/2012	10:22:32 AM	SiCl4 pre valve closed
2/28/2012	10:22:32 AM	SiCl4 post valve closed
2/28/2012	10:22:32 AM	Main Vac valve closed
2/28/2012	10:22:32 AM	Bypass valve closed
2/28/2012	10:22:32 AM	Bubbler valve closed
2/28/2012	10:22:32 AM	Helium MFC set to  0.000000
2/28/2012	10:22:32 AM	H2 MFC set to  0.000000
2/28/2012	10:22:32 AM	BCl3 MFC set to  0.000000
2/28/2012	10:22:32 AM	PH3 MFC set to  0.000000
2/28/2012	10:22:32 AM	SiCl4 MFC set to  0.000000
2/28/2012	10:22:32 AM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:22:32 AM	Tube furnace set to 0
2/28/2012	10:22:35 AM	H2 valve closed
2/28/2012	10:22:35 AM	BCl3 valve closed
2/28/2012	10:22:35 AM	PH3 valve closed
2/28/2012	10:22:35 AM	SiCl4 pre valve closed
2/28/2012	10:22:35 AM	SiCl4 post valve closed
2/28/2012	10:22:35 AM	Main Vac valve closed
2/28/2012	10:22:35 AM	Bypass valve closed
2/28/2012	10:22:35 AM	Bubbler valve closed
2/28/2012	10:22:35 AM	Helium valve opened
2/28/2012	10:22:35 AM	Helium MFC set to  500.000000
2/28/2012	10:22:35 AM	H2 MFC set to  0.000000
2/28/2012	10:22:35 AM	BCl3 MFC set to  0.000000
2/28/2012	10:22:35 AM	PH3 MFC set to  0.000000
2/28/2012	10:22:35 AM	SiCl4 MFC set to  0.000000
2/28/2012	10:22:35 AM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:22:35 AM	Tube furnace set to 0
2/28/2012	10:23:14 AM	Run aborted at 10:23 AM
2/28/2012	10:23:14 AM	Helium valve closed
2/28/2012	10:23:14 AM	H2 valve closed
2/28/2012	10:23:14 AM	BCl3 valve closed
2/28/2012	10:23:14 AM	PH3 valve closed
2/28/2012	10:23:14 AM	SiCl4 pre valve closed
2/28/2012	10:23:14 AM	SiCl4 post valve closed
2/28/2012	10:23:14 AM	Bypass valve closed
2/28/2012	10:23:14 AM	Main Vac valve closed
2/28/2012	10:23:14 AM	Bubbler valve closed
2/28/2012	10:23:14 AM	Helium MFC set to  0.000000
2/28/2012	10:23:14 AM	H2 MFC set to  0.000000
2/28/2012	10:23:14 AM	BCl3 MFC set to  0.000000
2/28/2012	10:23:14 AM	PH3 MFC set to  0.000000
2/28/2012	10:23:14 AM	SiCl4 MFC set to  0.000000
2/28/2012	10:23:14 AM	Tube furnace set to 0
2/28/2012	10:23:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/28/2012	10:34:07 AM	Bypass valve opened
2/28/2012	10:34:14 AM	Bypass valve closed
2/28/2012	10:39:35 AM	Program exited cleanly
2/28/2012	1:06:12 PM	Helium valve closed
2/28/2012	1:06:12 PM	H2 valve closed
2/28/2012	1:06:12 PM	BCl3 valve closed
2/28/2012	1:06:12 PM	PH3 valve closed
2/28/2012	1:06:12 PM	SiCl4 pre valve closed
2/28/2012	1:06:12 PM	SiCl4 post valve closed
2/28/2012	1:06:12 PM	Main Vac valve closed
2/28/2012	1:06:12 PM	Bypass valve closed
2/28/2012	1:06:12 PM	Bubbler valve closed
2/28/2012	1:06:12 PM	Helium MFC set to  0.000000
2/28/2012	1:06:12 PM	H2 MFC set to  0.000000
2/28/2012	1:06:12 PM	BCl3 MFC set to  0.000000
2/28/2012	1:06:12 PM	PH3 MFC set to  0.000000
2/28/2012	1:06:12 PM	SiCl4 MFC set to  0.000000
2/28/2012	1:06:12 PM	Bypass solenoid MFC set to  760.000000
2/28/2012	1:06:12 PM	Tube furnace set to 0
2/28/2012	1:06:13 PM	Main Vac valve opened
2/28/2012	1:06:13 PM	Main Vac valve closed
2/28/2012	1:06:14 PM	Main Vac valve opened
2/28/2012	1:06:14 PM	Main Vac valve closed
2/28/2012	1:06:15 PM	Main Vac valve opened
2/28/2012	1:06:15 PM	Main Vac valve closed
2/28/2012	1:06:16 PM	Main Vac valve opened
2/28/2012	1:06:17 PM	Main Vac valve closed
2/28/2012	1:06:18 PM	Main Vac valve opened
2/28/2012	1:06:19 PM	Main Vac valve closed
2/28/2012	1:06:19 PM	Main Vac valve opened
2/28/2012	1:06:19 PM	Main Vac valve closed
2/28/2012	1:06:20 PM	Main Vac valve opened
2/28/2012	1:06:20 PM	Main Vac valve closed
2/28/2012	1:06:20 PM	Main Vac valve opened
2/28/2012	1:06:21 PM	Main Vac valve closed
2/28/2012	1:06:21 PM	Main Vac valve opened
2/28/2012	1:06:22 PM	Main Vac valve closed
2/28/2012	1:06:22 PM	Main Vac valve opened
2/28/2012	1:06:22 PM	Main Vac valve closed
2/28/2012	1:11:26 PM	Main Vac valve opened
2/28/2012	1:11:27 PM	Main Vac valve closed
2/28/2012	1:11:27 PM	Main Vac valve opened
2/28/2012	1:11:27 PM	Main Vac valve closed
2/28/2012	1:11:28 PM	Main Vac valve opened
2/28/2012	1:11:28 PM	Main Vac valve closed
2/28/2012	1:11:29 PM	Main Vac valve opened
2/28/2012	1:11:30 PM	Main Vac valve closed
2/28/2012	1:11:32 PM	Main Vac valve opened
2/28/2012	1:11:32 PM	Main Vac valve closed
2/28/2012	1:11:34 PM	Main Vac valve opened
2/28/2012	1:11:34 PM	Main Vac valve closed
2/28/2012	1:11:35 PM	Main Vac valve opened
2/28/2012	1:11:35 PM	Main Vac valve closed
2/28/2012	1:11:35 PM	Main Vac valve opened
2/28/2012	1:11:35 PM	Main Vac valve closed
2/28/2012	1:11:36 PM	Main Vac valve opened
2/28/2012	1:11:36 PM	Main Vac valve closed
2/28/2012	1:11:36 PM	Main Vac valve opened
2/28/2012	1:11:37 PM	Main Vac valve closed
2/28/2012	1:11:37 PM	Main Vac valve opened
2/28/2012	1:11:38 PM	Main Vac valve closed
2/28/2012	2:56:40 PM	Bypass valve opened
2/28/2012	2:57:48 PM	Main Vac valve opened
2/28/2012	2:58:11 PM	Bypass valve closed
2/28/2012	2:58:12 PM	Main Vac valve closed
2/28/2012	2:58:20 PM	Main Vac valve opened
2/28/2012	2:58:29 PM	Helium MFC set to  10.000000
2/28/2012	2:58:31 PM	Helium valve opened
2/28/2012	2:58:38 PM	Helium valve closed
2/28/2012	2:58:56 PM	Helium valve opened
2/28/2012	2:58:59 PM	Helium MFC set to  20.000000
2/28/2012	2:59:26 PM	Helium valve closed
2/28/2012	2:59:39 PM	Main Vac valve closed
2/28/2012	2:59:49 PM	Main Vac valve opened
2/28/2012	2:59:52 PM	Helium valve opened
2/28/2012	2:59:59 PM	Helium valve closed
2/28/2012	3:00:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/28/2012	3:00:28 PM	Recipe started at 3:00 PM
2/28/2012	3:00:28 PM	Helium valve closed
2/28/2012	3:00:28 PM	H2 valve closed
2/28/2012	3:00:28 PM	BCl3 valve closed
2/28/2012	3:00:28 PM	PH3 valve closed
2/28/2012	3:00:28 PM	SiCl4 pre valve closed
2/28/2012	3:00:28 PM	SiCl4 post valve closed
2/28/2012	3:00:28 PM	Main Vac valve closed
2/28/2012	3:00:28 PM	Bubbler valve closed
2/28/2012	3:00:28 PM	Bypass valve opened
2/28/2012	3:00:28 PM	Helium MFC set to  0.000000
2/28/2012	3:00:28 PM	H2 MFC set to  0.000000
2/28/2012	3:00:28 PM	BCl3 MFC set to  0.000000
2/28/2012	3:00:28 PM	PH3 MFC set to  0.000000
2/28/2012	3:00:28 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:00:28 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:00:28 PM	Tube furnace set to 0
2/28/2012	3:00:28 PM	Helium valve closed
2/28/2012	3:00:28 PM	H2 valve closed
2/28/2012	3:00:28 PM	BCl3 valve closed
2/28/2012	3:00:28 PM	PH3 valve closed
2/28/2012	3:00:28 PM	SiCl4 pre valve closed
2/28/2012	3:00:28 PM	SiCl4 post valve closed
2/28/2012	3:00:28 PM	Main Vac valve closed
2/28/2012	3:00:28 PM	Bubbler valve closed
2/28/2012	3:00:28 PM	Bypass valve opened
2/28/2012	3:00:28 PM	Helium MFC set to  0.000000
2/28/2012	3:00:28 PM	H2 MFC set to  0.000000
2/28/2012	3:00:28 PM	BCl3 MFC set to  0.000000
2/28/2012	3:00:28 PM	PH3 MFC set to  0.000000
2/28/2012	3:00:28 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:00:28 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:00:29 PM	Tube furnace set to 0
2/28/2012	3:00:31 PM	Helium valve closed
2/28/2012	3:00:31 PM	H2 valve closed
2/28/2012	3:00:31 PM	BCl3 valve closed
2/28/2012	3:00:31 PM	PH3 valve closed
2/28/2012	3:00:31 PM	SiCl4 pre valve closed
2/28/2012	3:00:31 PM	SiCl4 post valve closed
2/28/2012	3:00:31 PM	Bypass valve closed
2/28/2012	3:00:31 PM	Bubbler valve closed
2/28/2012	3:00:31 PM	Main Vac valve opened
2/28/2012	3:00:31 PM	Helium MFC set to  0.000000
2/28/2012	3:00:31 PM	H2 MFC set to  0.000000
2/28/2012	3:00:31 PM	BCl3 MFC set to  0.000000
2/28/2012	3:00:31 PM	PH3 MFC set to  0.000000
2/28/2012	3:00:31 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:00:31 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:00:31 PM	Tube furnace set to 0
2/28/2012	3:00:38 PM	H2 valve closed
2/28/2012	3:00:38 PM	BCl3 valve closed
2/28/2012	3:00:38 PM	PH3 valve closed
2/28/2012	3:00:38 PM	SiCl4 pre valve closed
2/28/2012	3:00:38 PM	SiCl4 post valve closed
2/28/2012	3:00:38 PM	Bypass valve closed
2/28/2012	3:00:38 PM	Bubbler valve closed
2/28/2012	3:00:38 PM	Helium valve opened
2/28/2012	3:00:38 PM	Main Vac valve opened
2/28/2012	3:00:38 PM	Helium MFC set to  20.000000
2/28/2012	3:00:38 PM	H2 MFC set to  0.000000
2/28/2012	3:00:38 PM	BCl3 MFC set to  0.000000
2/28/2012	3:00:38 PM	PH3 MFC set to  0.000000
2/28/2012	3:00:38 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:00:38 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:00:38 PM	Tube furnace set to 0
2/28/2012	3:01:08 PM	Helium valve closed
2/28/2012	3:01:08 PM	H2 valve closed
2/28/2012	3:01:08 PM	BCl3 valve closed
2/28/2012	3:01:08 PM	PH3 valve closed
2/28/2012	3:01:08 PM	SiCl4 pre valve closed
2/28/2012	3:01:08 PM	SiCl4 post valve closed
2/28/2012	3:01:08 PM	Bypass valve closed
2/28/2012	3:01:08 PM	Bubbler valve closed
2/28/2012	3:01:08 PM	Main Vac valve opened
2/28/2012	3:01:08 PM	Helium MFC set to  0.000000
2/28/2012	3:01:08 PM	H2 MFC set to  0.000000
2/28/2012	3:01:08 PM	BCl3 MFC set to  0.000000
2/28/2012	3:01:08 PM	PH3 MFC set to  0.000000
2/28/2012	3:01:08 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:01:08 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:01:08 PM	Tube furnace set to 0
2/28/2012	3:01:38 PM	H2 valve closed
2/28/2012	3:01:38 PM	BCl3 valve closed
2/28/2012	3:01:38 PM	PH3 valve closed
2/28/2012	3:01:38 PM	SiCl4 pre valve closed
2/28/2012	3:01:38 PM	SiCl4 post valve closed
2/28/2012	3:01:38 PM	Bypass valve closed
2/28/2012	3:01:38 PM	Bubbler valve closed
2/28/2012	3:01:38 PM	Helium valve opened
2/28/2012	3:01:38 PM	Main Vac valve opened
2/28/2012	3:01:38 PM	Helium MFC set to  20.000000
2/28/2012	3:01:38 PM	H2 MFC set to  0.000000
2/28/2012	3:01:38 PM	BCl3 MFC set to  0.000000
2/28/2012	3:01:38 PM	PH3 MFC set to  0.000000
2/28/2012	3:01:38 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:01:38 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:01:38 PM	Tube furnace set to 0
2/28/2012	3:02:08 PM	Helium valve closed
2/28/2012	3:02:08 PM	H2 valve closed
2/28/2012	3:02:08 PM	BCl3 valve closed
2/28/2012	3:02:08 PM	PH3 valve closed
2/28/2012	3:02:08 PM	SiCl4 pre valve closed
2/28/2012	3:02:08 PM	SiCl4 post valve closed
2/28/2012	3:02:08 PM	Bypass valve closed
2/28/2012	3:02:08 PM	Bubbler valve closed
2/28/2012	3:02:08 PM	Main Vac valve opened
2/28/2012	3:02:08 PM	Helium MFC set to  0.000000
2/28/2012	3:02:08 PM	H2 MFC set to  0.000000
2/28/2012	3:02:08 PM	BCl3 MFC set to  0.000000
2/28/2012	3:02:08 PM	PH3 MFC set to  0.000000
2/28/2012	3:02:08 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:02:08 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:02:09 PM	Tube furnace set to 0
2/28/2012	3:02:39 PM	H2 valve closed
2/28/2012	3:02:39 PM	BCl3 valve closed
2/28/2012	3:02:39 PM	PH3 valve closed
2/28/2012	3:02:39 PM	SiCl4 pre valve closed
2/28/2012	3:02:39 PM	SiCl4 post valve closed
2/28/2012	3:02:39 PM	Bypass valve closed
2/28/2012	3:02:39 PM	Bubbler valve closed
2/28/2012	3:02:39 PM	Helium valve opened
2/28/2012	3:02:39 PM	Main Vac valve opened
2/28/2012	3:02:39 PM	Helium MFC set to  20.000000
2/28/2012	3:02:39 PM	H2 MFC set to  0.000000
2/28/2012	3:02:39 PM	BCl3 MFC set to  0.000000
2/28/2012	3:02:39 PM	PH3 MFC set to  0.000000
2/28/2012	3:02:39 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:02:39 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:02:39 PM	Tube furnace set to 0
2/28/2012	3:03:09 PM	Helium valve closed
2/28/2012	3:03:09 PM	H2 valve closed
2/28/2012	3:03:09 PM	BCl3 valve closed
2/28/2012	3:03:09 PM	PH3 valve closed
2/28/2012	3:03:09 PM	SiCl4 pre valve closed
2/28/2012	3:03:09 PM	SiCl4 post valve closed
2/28/2012	3:03:09 PM	Bypass valve closed
2/28/2012	3:03:09 PM	Bubbler valve closed
2/28/2012	3:03:09 PM	Main Vac valve opened
2/28/2012	3:03:09 PM	Helium MFC set to  0.000000
2/28/2012	3:03:09 PM	H2 MFC set to  0.000000
2/28/2012	3:03:09 PM	BCl3 MFC set to  0.000000
2/28/2012	3:03:09 PM	PH3 MFC set to  0.000000
2/28/2012	3:03:09 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:03:09 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:03:09 PM	Tube furnace set to 0
2/28/2012	3:03:39 PM	H2 valve closed
2/28/2012	3:03:39 PM	BCl3 valve closed
2/28/2012	3:03:39 PM	PH3 valve closed
2/28/2012	3:03:39 PM	SiCl4 pre valve closed
2/28/2012	3:03:39 PM	SiCl4 post valve closed
2/28/2012	3:03:39 PM	Bypass valve closed
2/28/2012	3:03:39 PM	Bubbler valve closed
2/28/2012	3:03:39 PM	Helium valve opened
2/28/2012	3:03:39 PM	Main Vac valve opened
2/28/2012	3:03:39 PM	Helium MFC set to  20.000000
2/28/2012	3:03:39 PM	H2 MFC set to  0.000000
2/28/2012	3:03:39 PM	BCl3 MFC set to  0.000000
2/28/2012	3:03:39 PM	PH3 MFC set to  0.000000
2/28/2012	3:03:39 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:03:39 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:03:39 PM	Tube furnace set to 0
2/28/2012	3:04:09 PM	Helium valve closed
2/28/2012	3:04:09 PM	H2 valve closed
2/28/2012	3:04:09 PM	BCl3 valve closed
2/28/2012	3:04:09 PM	PH3 valve closed
2/28/2012	3:04:09 PM	SiCl4 pre valve closed
2/28/2012	3:04:09 PM	SiCl4 post valve closed
2/28/2012	3:04:09 PM	Bypass valve closed
2/28/2012	3:04:09 PM	Bubbler valve closed
2/28/2012	3:04:09 PM	Main Vac valve opened
2/28/2012	3:04:09 PM	Helium MFC set to  0.000000
2/28/2012	3:04:09 PM	H2 MFC set to  0.000000
2/28/2012	3:04:09 PM	BCl3 MFC set to  0.000000
2/28/2012	3:04:09 PM	PH3 MFC set to  0.000000
2/28/2012	3:04:09 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:04:09 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:04:09 PM	Tube furnace set to 0
2/28/2012	3:04:39 PM	H2 valve closed
2/28/2012	3:04:39 PM	BCl3 valve closed
2/28/2012	3:04:39 PM	PH3 valve closed
2/28/2012	3:04:39 PM	SiCl4 pre valve closed
2/28/2012	3:04:39 PM	SiCl4 post valve closed
2/28/2012	3:04:39 PM	Bypass valve closed
2/28/2012	3:04:40 PM	Bubbler valve closed
2/28/2012	3:04:40 PM	Helium valve opened
2/28/2012	3:04:40 PM	Main Vac valve opened
2/28/2012	3:04:40 PM	Helium MFC set to  20.000000
2/28/2012	3:04:40 PM	H2 MFC set to  0.000000
2/28/2012	3:04:40 PM	BCl3 MFC set to  0.000000
2/28/2012	3:04:40 PM	PH3 MFC set to  0.000000
2/28/2012	3:04:40 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:04:40 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:04:40 PM	Tube furnace set to 0
2/28/2012	3:05:10 PM	Helium valve closed
2/28/2012	3:05:10 PM	H2 valve closed
2/28/2012	3:05:10 PM	BCl3 valve closed
2/28/2012	3:05:10 PM	PH3 valve closed
2/28/2012	3:05:10 PM	SiCl4 pre valve closed
2/28/2012	3:05:10 PM	SiCl4 post valve closed
2/28/2012	3:05:10 PM	Bypass valve closed
2/28/2012	3:05:10 PM	Bubbler valve closed
2/28/2012	3:05:10 PM	Main Vac valve opened
2/28/2012	3:05:10 PM	Helium MFC set to  0.000000
2/28/2012	3:05:10 PM	H2 MFC set to  0.000000
2/28/2012	3:05:10 PM	BCl3 MFC set to  0.000000
2/28/2012	3:05:10 PM	PH3 MFC set to  0.000000
2/28/2012	3:05:10 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:05:10 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:05:10 PM	Tube furnace set to 0
2/28/2012	3:05:40 PM	H2 valve closed
2/28/2012	3:05:40 PM	BCl3 valve closed
2/28/2012	3:05:40 PM	PH3 valve closed
2/28/2012	3:05:40 PM	SiCl4 pre valve closed
2/28/2012	3:05:40 PM	SiCl4 post valve closed
2/28/2012	3:05:40 PM	Bypass valve closed
2/28/2012	3:05:40 PM	Bubbler valve closed
2/28/2012	3:05:40 PM	Helium valve opened
2/28/2012	3:05:40 PM	Main Vac valve opened
2/28/2012	3:05:40 PM	Helium MFC set to  20.000000
2/28/2012	3:05:40 PM	H2 MFC set to  0.000000
2/28/2012	3:05:40 PM	BCl3 MFC set to  0.000000
2/28/2012	3:05:40 PM	PH3 MFC set to  0.000000
2/28/2012	3:05:40 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:05:40 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:05:40 PM	Tube furnace set to 0
2/28/2012	3:06:10 PM	Helium valve closed
2/28/2012	3:06:10 PM	H2 valve closed
2/28/2012	3:06:10 PM	BCl3 valve closed
2/28/2012	3:06:10 PM	PH3 valve closed
2/28/2012	3:06:10 PM	SiCl4 pre valve closed
2/28/2012	3:06:10 PM	SiCl4 post valve closed
2/28/2012	3:06:10 PM	Bypass valve closed
2/28/2012	3:06:10 PM	Bubbler valve closed
2/28/2012	3:06:10 PM	Main Vac valve opened
2/28/2012	3:06:10 PM	Helium MFC set to  0.000000
2/28/2012	3:06:10 PM	H2 MFC set to  0.000000
2/28/2012	3:06:10 PM	BCl3 MFC set to  0.000000
2/28/2012	3:06:10 PM	PH3 MFC set to  0.000000
2/28/2012	3:06:10 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:06:10 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:06:10 PM	Tube furnace set to 0
2/28/2012	3:06:40 PM	H2 valve closed
2/28/2012	3:06:40 PM	BCl3 valve closed
2/28/2012	3:06:40 PM	PH3 valve closed
2/28/2012	3:06:40 PM	SiCl4 pre valve closed
2/28/2012	3:06:40 PM	SiCl4 post valve closed
2/28/2012	3:06:40 PM	Bypass valve closed
2/28/2012	3:06:40 PM	Bubbler valve closed
2/28/2012	3:06:40 PM	Helium valve opened
2/28/2012	3:06:40 PM	Main Vac valve opened
2/28/2012	3:06:40 PM	Helium MFC set to  20.000000
2/28/2012	3:06:40 PM	H2 MFC set to  0.000000
2/28/2012	3:06:40 PM	BCl3 MFC set to  0.000000
2/28/2012	3:06:40 PM	PH3 MFC set to  0.000000
2/28/2012	3:06:40 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:06:40 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:06:41 PM	Tube furnace set to 0
2/28/2012	3:07:11 PM	Helium valve closed
2/28/2012	3:07:11 PM	H2 valve closed
2/28/2012	3:07:11 PM	BCl3 valve closed
2/28/2012	3:07:11 PM	PH3 valve closed
2/28/2012	3:07:11 PM	SiCl4 pre valve closed
2/28/2012	3:07:11 PM	SiCl4 post valve closed
2/28/2012	3:07:11 PM	Bypass valve closed
2/28/2012	3:07:11 PM	Bubbler valve closed
2/28/2012	3:07:11 PM	Main Vac valve opened
2/28/2012	3:07:11 PM	Helium MFC set to  0.000000
2/28/2012	3:07:11 PM	H2 MFC set to  0.000000
2/28/2012	3:07:11 PM	BCl3 MFC set to  0.000000
2/28/2012	3:07:11 PM	PH3 MFC set to  0.000000
2/28/2012	3:07:11 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:07:11 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:07:11 PM	Tube furnace set to 0
2/28/2012	3:07:41 PM	H2 valve closed
2/28/2012	3:07:41 PM	BCl3 valve closed
2/28/2012	3:07:41 PM	PH3 valve closed
2/28/2012	3:07:41 PM	SiCl4 pre valve closed
2/28/2012	3:07:41 PM	SiCl4 post valve closed
2/28/2012	3:07:41 PM	Bypass valve closed
2/28/2012	3:07:41 PM	Bubbler valve closed
2/28/2012	3:07:41 PM	Helium valve opened
2/28/2012	3:07:41 PM	Main Vac valve opened
2/28/2012	3:07:41 PM	Helium MFC set to  20.000000
2/28/2012	3:07:41 PM	H2 MFC set to  0.000000
2/28/2012	3:07:41 PM	BCl3 MFC set to  0.000000
2/28/2012	3:07:41 PM	PH3 MFC set to  0.000000
2/28/2012	3:07:41 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:07:41 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:07:41 PM	Tube furnace set to 0
2/28/2012	3:08:11 PM	Helium valve closed
2/28/2012	3:08:11 PM	H2 valve closed
2/28/2012	3:08:11 PM	BCl3 valve closed
2/28/2012	3:08:11 PM	PH3 valve closed
2/28/2012	3:08:11 PM	SiCl4 pre valve closed
2/28/2012	3:08:11 PM	SiCl4 post valve closed
2/28/2012	3:08:11 PM	Bypass valve closed
2/28/2012	3:08:11 PM	Bubbler valve closed
2/28/2012	3:08:11 PM	Main Vac valve opened
2/28/2012	3:08:11 PM	Helium MFC set to  0.000000
2/28/2012	3:08:11 PM	H2 MFC set to  0.000000
2/28/2012	3:08:11 PM	BCl3 MFC set to  0.000000
2/28/2012	3:08:11 PM	PH3 MFC set to  0.000000
2/28/2012	3:08:11 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:08:11 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:08:11 PM	Tube furnace set to 0
2/28/2012	3:08:41 PM	H2 valve closed
2/28/2012	3:08:41 PM	BCl3 valve closed
2/28/2012	3:08:41 PM	PH3 valve closed
2/28/2012	3:08:41 PM	SiCl4 pre valve closed
2/28/2012	3:08:41 PM	SiCl4 post valve closed
2/28/2012	3:08:41 PM	Bypass valve closed
2/28/2012	3:08:41 PM	Bubbler valve closed
2/28/2012	3:08:41 PM	Helium valve opened
2/28/2012	3:08:41 PM	Main Vac valve opened
2/28/2012	3:08:41 PM	Helium MFC set to  20.000000
2/28/2012	3:08:41 PM	H2 MFC set to  0.000000
2/28/2012	3:08:41 PM	BCl3 MFC set to  0.000000
2/28/2012	3:08:41 PM	PH3 MFC set to  0.000000
2/28/2012	3:08:41 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:08:41 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:08:41 PM	Tube furnace set to 0
2/28/2012	3:08:53 PM	Helium valve closed
2/28/2012	3:08:53 PM	H2 valve closed
2/28/2012	3:08:53 PM	BCl3 valve closed
2/28/2012	3:08:53 PM	PH3 valve closed
2/28/2012	3:08:53 PM	SiCl4 pre valve closed
2/28/2012	3:08:53 PM	SiCl4 post valve closed
2/28/2012	3:08:53 PM	Bypass valve closed
2/28/2012	3:08:53 PM	Bubbler valve closed
2/28/2012	3:08:53 PM	Main Vac valve opened
2/28/2012	3:08:53 PM	Helium MFC set to  0.000000
2/28/2012	3:08:53 PM	H2 MFC set to  0.000000
2/28/2012	3:08:53 PM	BCl3 MFC set to  0.000000
2/28/2012	3:08:53 PM	PH3 MFC set to  0.000000
2/28/2012	3:08:53 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:08:53 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:08:53 PM	Tube furnace set to 0
2/28/2012	3:08:55 PM	Run aborted at 3:08 PM
2/28/2012	3:08:55 PM	Helium valve closed
2/28/2012	3:08:55 PM	H2 valve closed
2/28/2012	3:08:55 PM	BCl3 valve closed
2/28/2012	3:08:55 PM	PH3 valve closed
2/28/2012	3:08:55 PM	SiCl4 pre valve closed
2/28/2012	3:08:55 PM	SiCl4 post valve closed
2/28/2012	3:08:55 PM	Bypass valve closed
2/28/2012	3:08:55 PM	Main Vac valve closed
2/28/2012	3:08:55 PM	Bubbler valve closed
2/28/2012	3:08:55 PM	Helium MFC set to  0.000000
2/28/2012	3:08:55 PM	H2 MFC set to  0.000000
2/28/2012	3:08:55 PM	BCl3 MFC set to  0.000000
2/28/2012	3:08:55 PM	PH3 MFC set to  0.000000
2/28/2012	3:08:55 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:08:55 PM	Tube furnace set to 0
2/28/2012	3:08:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/28/2012	3:09:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/28/2012	3:09:20 PM	Recipe started at 3:09 PM
2/28/2012	3:09:20 PM	Helium valve closed
2/28/2012	3:09:20 PM	H2 valve closed
2/28/2012	3:09:20 PM	BCl3 valve closed
2/28/2012	3:09:20 PM	PH3 valve closed
2/28/2012	3:09:20 PM	SiCl4 pre valve closed
2/28/2012	3:09:20 PM	SiCl4 post valve closed
2/28/2012	3:09:20 PM	Main Vac valve closed
2/28/2012	3:09:20 PM	Bubbler valve closed
2/28/2012	3:09:20 PM	Bypass valve opened
2/28/2012	3:09:20 PM	Helium MFC set to  0.000000
2/28/2012	3:09:20 PM	H2 MFC set to  0.000000
2/28/2012	3:09:20 PM	BCl3 MFC set to  0.000000
2/28/2012	3:09:20 PM	PH3 MFC set to  0.000000
2/28/2012	3:09:20 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:09:20 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:09:20 PM	Tube furnace set to 0
2/28/2012	3:09:21 PM	Helium valve closed
2/28/2012	3:09:21 PM	H2 valve closed
2/28/2012	3:09:21 PM	BCl3 valve closed
2/28/2012	3:09:21 PM	PH3 valve closed
2/28/2012	3:09:21 PM	SiCl4 pre valve closed
2/28/2012	3:09:21 PM	SiCl4 post valve closed
2/28/2012	3:09:21 PM	Main Vac valve closed
2/28/2012	3:09:21 PM	Bubbler valve closed
2/28/2012	3:09:21 PM	Bypass valve opened
2/28/2012	3:09:21 PM	Helium MFC set to  0.000000
2/28/2012	3:09:21 PM	H2 MFC set to  0.000000
2/28/2012	3:09:21 PM	BCl3 MFC set to  0.000000
2/28/2012	3:09:21 PM	PH3 MFC set to  0.000000
2/28/2012	3:09:21 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:09:21 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:09:21 PM	Tube furnace set to 0
2/28/2012	3:09:24 PM	Helium valve closed
2/28/2012	3:09:24 PM	H2 valve closed
2/28/2012	3:09:24 PM	BCl3 valve closed
2/28/2012	3:09:24 PM	PH3 valve closed
2/28/2012	3:09:24 PM	SiCl4 pre valve closed
2/28/2012	3:09:24 PM	SiCl4 post valve closed
2/28/2012	3:09:24 PM	Bypass valve closed
2/28/2012	3:09:24 PM	Bubbler valve closed
2/28/2012	3:09:24 PM	Main Vac valve opened
2/28/2012	3:09:24 PM	Helium MFC set to  0.000000
2/28/2012	3:09:24 PM	H2 MFC set to  0.000000
2/28/2012	3:09:24 PM	BCl3 MFC set to  0.000000
2/28/2012	3:09:24 PM	PH3 MFC set to  0.000000
2/28/2012	3:09:24 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:09:24 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:09:25 PM	Tube furnace set to 0
2/28/2012	3:09:55 PM	H2 valve closed
2/28/2012	3:09:55 PM	BCl3 valve closed
2/28/2012	3:09:55 PM	PH3 valve closed
2/28/2012	3:09:55 PM	SiCl4 pre valve closed
2/28/2012	3:09:55 PM	SiCl4 post valve closed
2/28/2012	3:09:55 PM	Bypass valve closed
2/28/2012	3:09:55 PM	Bubbler valve closed
2/28/2012	3:09:55 PM	Helium valve opened
2/28/2012	3:09:55 PM	Main Vac valve opened
2/28/2012	3:09:55 PM	Helium MFC set to  20.000000
2/28/2012	3:09:55 PM	H2 MFC set to  0.000000
2/28/2012	3:09:55 PM	BCl3 MFC set to  0.000000
2/28/2012	3:09:55 PM	PH3 MFC set to  0.000000
2/28/2012	3:09:55 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:09:55 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:09:55 PM	Tube furnace set to 0
2/28/2012	3:10:25 PM	Helium valve closed
2/28/2012	3:10:25 PM	H2 valve closed
2/28/2012	3:10:25 PM	BCl3 valve closed
2/28/2012	3:10:25 PM	PH3 valve closed
2/28/2012	3:10:25 PM	SiCl4 pre valve closed
2/28/2012	3:10:25 PM	SiCl4 post valve closed
2/28/2012	3:10:25 PM	Bypass valve closed
2/28/2012	3:10:25 PM	Bubbler valve closed
2/28/2012	3:10:25 PM	Main Vac valve opened
2/28/2012	3:10:25 PM	Helium MFC set to  0.000000
2/28/2012	3:10:25 PM	H2 MFC set to  0.000000
2/28/2012	3:10:25 PM	BCl3 MFC set to  0.000000
2/28/2012	3:10:25 PM	PH3 MFC set to  0.000000
2/28/2012	3:10:25 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:10:25 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:10:25 PM	Tube furnace set to 0
2/28/2012	3:10:55 PM	H2 valve closed
2/28/2012	3:10:55 PM	BCl3 valve closed
2/28/2012	3:10:55 PM	PH3 valve closed
2/28/2012	3:10:55 PM	SiCl4 pre valve closed
2/28/2012	3:10:55 PM	SiCl4 post valve closed
2/28/2012	3:10:55 PM	Bypass valve closed
2/28/2012	3:10:55 PM	Bubbler valve closed
2/28/2012	3:10:55 PM	Helium valve opened
2/28/2012	3:10:55 PM	Main Vac valve opened
2/28/2012	3:10:55 PM	Helium MFC set to  20.000000
2/28/2012	3:10:55 PM	H2 MFC set to  0.000000
2/28/2012	3:10:55 PM	BCl3 MFC set to  0.000000
2/28/2012	3:10:55 PM	PH3 MFC set to  0.000000
2/28/2012	3:10:55 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:10:55 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:10:55 PM	Tube furnace set to 0
2/28/2012	3:11:25 PM	Helium valve closed
2/28/2012	3:11:25 PM	H2 valve closed
2/28/2012	3:11:25 PM	BCl3 valve closed
2/28/2012	3:11:25 PM	PH3 valve closed
2/28/2012	3:11:25 PM	SiCl4 pre valve closed
2/28/2012	3:11:25 PM	SiCl4 post valve closed
2/28/2012	3:11:25 PM	Bypass valve closed
2/28/2012	3:11:25 PM	Bubbler valve closed
2/28/2012	3:11:25 PM	Main Vac valve opened
2/28/2012	3:11:25 PM	Helium MFC set to  0.000000
2/28/2012	3:11:25 PM	H2 MFC set to  0.000000
2/28/2012	3:11:25 PM	BCl3 MFC set to  0.000000
2/28/2012	3:11:25 PM	PH3 MFC set to  0.000000
2/28/2012	3:11:25 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:11:25 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:11:25 PM	Tube furnace set to 0
2/28/2012	3:11:55 PM	H2 valve closed
2/28/2012	3:11:55 PM	BCl3 valve closed
2/28/2012	3:11:55 PM	PH3 valve closed
2/28/2012	3:11:55 PM	SiCl4 pre valve closed
2/28/2012	3:11:55 PM	SiCl4 post valve closed
2/28/2012	3:11:55 PM	Bypass valve closed
2/28/2012	3:11:55 PM	Bubbler valve closed
2/28/2012	3:11:55 PM	Helium valve opened
2/28/2012	3:11:55 PM	Main Vac valve opened
2/28/2012	3:11:55 PM	Helium MFC set to  20.000000
2/28/2012	3:11:55 PM	H2 MFC set to  0.000000
2/28/2012	3:11:55 PM	BCl3 MFC set to  0.000000
2/28/2012	3:11:55 PM	PH3 MFC set to  0.000000
2/28/2012	3:11:55 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:11:55 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:11:56 PM	Tube furnace set to 0
2/28/2012	3:12:26 PM	Helium valve closed
2/28/2012	3:12:26 PM	H2 valve closed
2/28/2012	3:12:26 PM	BCl3 valve closed
2/28/2012	3:12:26 PM	PH3 valve closed
2/28/2012	3:12:26 PM	SiCl4 pre valve closed
2/28/2012	3:12:26 PM	SiCl4 post valve closed
2/28/2012	3:12:26 PM	Bypass valve closed
2/28/2012	3:12:26 PM	Bubbler valve closed
2/28/2012	3:12:26 PM	Main Vac valve opened
2/28/2012	3:12:26 PM	Helium MFC set to  0.000000
2/28/2012	3:12:26 PM	H2 MFC set to  0.000000
2/28/2012	3:12:26 PM	BCl3 MFC set to  0.000000
2/28/2012	3:12:26 PM	PH3 MFC set to  0.000000
2/28/2012	3:12:26 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:12:26 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:12:26 PM	Tube furnace set to 0
2/28/2012	3:12:56 PM	H2 valve closed
2/28/2012	3:12:56 PM	BCl3 valve closed
2/28/2012	3:12:56 PM	PH3 valve closed
2/28/2012	3:12:56 PM	SiCl4 pre valve closed
2/28/2012	3:12:56 PM	SiCl4 post valve closed
2/28/2012	3:12:56 PM	Bypass valve closed
2/28/2012	3:12:56 PM	Bubbler valve closed
2/28/2012	3:12:56 PM	Helium valve opened
2/28/2012	3:12:56 PM	Main Vac valve opened
2/28/2012	3:12:56 PM	Helium MFC set to  20.000000
2/28/2012	3:12:56 PM	H2 MFC set to  0.000000
2/28/2012	3:12:56 PM	BCl3 MFC set to  0.000000
2/28/2012	3:12:56 PM	PH3 MFC set to  0.000000
2/28/2012	3:12:56 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:12:56 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:12:56 PM	Tube furnace set to 0
2/28/2012	3:13:26 PM	Helium valve closed
2/28/2012	3:13:26 PM	H2 valve closed
2/28/2012	3:13:26 PM	BCl3 valve closed
2/28/2012	3:13:26 PM	PH3 valve closed
2/28/2012	3:13:26 PM	SiCl4 pre valve closed
2/28/2012	3:13:26 PM	SiCl4 post valve closed
2/28/2012	3:13:26 PM	Bypass valve closed
2/28/2012	3:13:26 PM	Bubbler valve closed
2/28/2012	3:13:26 PM	Main Vac valve opened
2/28/2012	3:13:26 PM	Helium MFC set to  0.000000
2/28/2012	3:13:26 PM	H2 MFC set to  0.000000
2/28/2012	3:13:26 PM	BCl3 MFC set to  0.000000
2/28/2012	3:13:26 PM	PH3 MFC set to  0.000000
2/28/2012	3:13:26 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:13:26 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:13:26 PM	Tube furnace set to 0
2/28/2012	3:13:56 PM	H2 valve closed
2/28/2012	3:13:56 PM	BCl3 valve closed
2/28/2012	3:13:56 PM	PH3 valve closed
2/28/2012	3:13:56 PM	SiCl4 pre valve closed
2/28/2012	3:13:56 PM	SiCl4 post valve closed
2/28/2012	3:13:56 PM	Bypass valve closed
2/28/2012	3:13:56 PM	Bubbler valve closed
2/28/2012	3:13:56 PM	Helium valve opened
2/28/2012	3:13:56 PM	Main Vac valve opened
2/28/2012	3:13:56 PM	Helium MFC set to  20.000000
2/28/2012	3:13:56 PM	H2 MFC set to  0.000000
2/28/2012	3:13:56 PM	BCl3 MFC set to  0.000000
2/28/2012	3:13:56 PM	PH3 MFC set to  0.000000
2/28/2012	3:13:56 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:13:56 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:13:56 PM	Tube furnace set to 0
2/28/2012	3:14:26 PM	Helium valve closed
2/28/2012	3:14:26 PM	H2 valve closed
2/28/2012	3:14:26 PM	BCl3 valve closed
2/28/2012	3:14:26 PM	PH3 valve closed
2/28/2012	3:14:26 PM	SiCl4 pre valve closed
2/28/2012	3:14:26 PM	SiCl4 post valve closed
2/28/2012	3:14:26 PM	Bypass valve closed
2/28/2012	3:14:26 PM	Bubbler valve closed
2/28/2012	3:14:26 PM	Main Vac valve opened
2/28/2012	3:14:26 PM	Helium MFC set to  0.000000
2/28/2012	3:14:26 PM	H2 MFC set to  0.000000
2/28/2012	3:14:26 PM	BCl3 MFC set to  0.000000
2/28/2012	3:14:26 PM	PH3 MFC set to  0.000000
2/28/2012	3:14:26 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:14:26 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:14:27 PM	Tube furnace set to 0
2/28/2012	3:14:57 PM	H2 valve closed
2/28/2012	3:14:57 PM	BCl3 valve closed
2/28/2012	3:14:57 PM	PH3 valve closed
2/28/2012	3:14:57 PM	SiCl4 pre valve closed
2/28/2012	3:14:57 PM	SiCl4 post valve closed
2/28/2012	3:14:57 PM	Bypass valve closed
2/28/2012	3:14:57 PM	Bubbler valve closed
2/28/2012	3:14:57 PM	Helium valve opened
2/28/2012	3:14:57 PM	Main Vac valve opened
2/28/2012	3:14:57 PM	Helium MFC set to  20.000000
2/28/2012	3:14:57 PM	H2 MFC set to  0.000000
2/28/2012	3:14:57 PM	BCl3 MFC set to  0.000000
2/28/2012	3:14:57 PM	PH3 MFC set to  0.000000
2/28/2012	3:14:57 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:14:57 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:14:57 PM	Tube furnace set to 0
2/28/2012	3:15:27 PM	Helium valve closed
2/28/2012	3:15:27 PM	H2 valve closed
2/28/2012	3:15:27 PM	BCl3 valve closed
2/28/2012	3:15:27 PM	PH3 valve closed
2/28/2012	3:15:27 PM	SiCl4 pre valve closed
2/28/2012	3:15:27 PM	SiCl4 post valve closed
2/28/2012	3:15:27 PM	Bypass valve closed
2/28/2012	3:15:27 PM	Bubbler valve closed
2/28/2012	3:15:27 PM	Main Vac valve opened
2/28/2012	3:15:27 PM	Helium MFC set to  0.000000
2/28/2012	3:15:27 PM	H2 MFC set to  0.000000
2/28/2012	3:15:27 PM	BCl3 MFC set to  0.000000
2/28/2012	3:15:27 PM	PH3 MFC set to  0.000000
2/28/2012	3:15:27 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:15:27 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:15:27 PM	Tube furnace set to 0
2/28/2012	3:15:57 PM	H2 valve closed
2/28/2012	3:15:57 PM	BCl3 valve closed
2/28/2012	3:15:57 PM	PH3 valve closed
2/28/2012	3:15:57 PM	SiCl4 pre valve closed
2/28/2012	3:15:57 PM	SiCl4 post valve closed
2/28/2012	3:15:57 PM	Bypass valve closed
2/28/2012	3:15:57 PM	Bubbler valve closed
2/28/2012	3:15:57 PM	Helium valve opened
2/28/2012	3:15:57 PM	Main Vac valve opened
2/28/2012	3:15:57 PM	Helium MFC set to  20.000000
2/28/2012	3:15:57 PM	H2 MFC set to  0.000000
2/28/2012	3:15:57 PM	BCl3 MFC set to  0.000000
2/28/2012	3:15:57 PM	PH3 MFC set to  0.000000
2/28/2012	3:15:57 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:15:57 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:15:57 PM	Tube furnace set to 0
2/28/2012	3:16:27 PM	Helium valve closed
2/28/2012	3:16:27 PM	H2 valve closed
2/28/2012	3:16:27 PM	BCl3 valve closed
2/28/2012	3:16:27 PM	PH3 valve closed
2/28/2012	3:16:27 PM	SiCl4 pre valve closed
2/28/2012	3:16:27 PM	SiCl4 post valve closed
2/28/2012	3:16:27 PM	Bypass valve closed
2/28/2012	3:16:27 PM	Bubbler valve closed
2/28/2012	3:16:27 PM	Main Vac valve opened
2/28/2012	3:16:27 PM	Helium MFC set to  0.000000
2/28/2012	3:16:27 PM	H2 MFC set to  0.000000
2/28/2012	3:16:27 PM	BCl3 MFC set to  0.000000
2/28/2012	3:16:27 PM	PH3 MFC set to  0.000000
2/28/2012	3:16:27 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:16:27 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:16:27 PM	Tube furnace set to 0
2/28/2012	3:16:57 PM	H2 valve closed
2/28/2012	3:16:57 PM	BCl3 valve closed
2/28/2012	3:16:57 PM	PH3 valve closed
2/28/2012	3:16:57 PM	SiCl4 pre valve closed
2/28/2012	3:16:58 PM	SiCl4 post valve closed
2/28/2012	3:16:58 PM	Bypass valve closed
2/28/2012	3:16:58 PM	Bubbler valve closed
2/28/2012	3:16:58 PM	Helium valve opened
2/28/2012	3:16:58 PM	Main Vac valve opened
2/28/2012	3:16:58 PM	Helium MFC set to  20.000000
2/28/2012	3:16:58 PM	H2 MFC set to  0.000000
2/28/2012	3:16:58 PM	BCl3 MFC set to  0.000000
2/28/2012	3:16:58 PM	PH3 MFC set to  0.000000
2/28/2012	3:16:58 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:16:58 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:16:58 PM	Tube furnace set to 0
2/28/2012	3:17:28 PM	Helium valve closed
2/28/2012	3:17:28 PM	H2 valve closed
2/28/2012	3:17:28 PM	BCl3 valve closed
2/28/2012	3:17:28 PM	PH3 valve closed
2/28/2012	3:17:28 PM	SiCl4 pre valve closed
2/28/2012	3:17:28 PM	SiCl4 post valve closed
2/28/2012	3:17:28 PM	Bypass valve closed
2/28/2012	3:17:28 PM	Bubbler valve closed
2/28/2012	3:17:28 PM	Main Vac valve opened
2/28/2012	3:17:28 PM	Helium MFC set to  0.000000
2/28/2012	3:17:28 PM	H2 MFC set to  0.000000
2/28/2012	3:17:28 PM	BCl3 MFC set to  0.000000
2/28/2012	3:17:28 PM	PH3 MFC set to  0.000000
2/28/2012	3:17:28 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:17:28 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:17:28 PM	Tube furnace set to 0
2/28/2012	3:17:50 PM	Run aborted at 3:17 PM
2/28/2012	3:17:50 PM	Helium valve closed
2/28/2012	3:17:50 PM	H2 valve closed
2/28/2012	3:17:50 PM	BCl3 valve closed
2/28/2012	3:17:50 PM	PH3 valve closed
2/28/2012	3:17:50 PM	SiCl4 pre valve closed
2/28/2012	3:17:50 PM	SiCl4 post valve closed
2/28/2012	3:17:50 PM	Bypass valve closed
2/28/2012	3:17:50 PM	Main Vac valve closed
2/28/2012	3:17:50 PM	Bubbler valve closed
2/28/2012	3:17:50 PM	Helium MFC set to  0.000000
2/28/2012	3:17:50 PM	H2 MFC set to  0.000000
2/28/2012	3:17:50 PM	BCl3 MFC set to  0.000000
2/28/2012	3:17:50 PM	PH3 MFC set to  0.000000
2/28/2012	3:17:50 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:17:50 PM	Tube furnace set to 0
2/28/2012	3:17:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/28/2012	3:18:02 PM	Main Vac valve opened
2/28/2012	3:18:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/28/2012	3:18:28 PM	Recipe started at 3:18 PM
2/28/2012	3:18:28 PM	Helium valve closed
2/28/2012	3:18:28 PM	H2 valve closed
2/28/2012	3:18:28 PM	BCl3 valve closed
2/28/2012	3:18:28 PM	PH3 valve closed
2/28/2012	3:18:28 PM	SiCl4 pre valve closed
2/28/2012	3:18:28 PM	SiCl4 post valve closed
2/28/2012	3:18:28 PM	Main Vac valve closed
2/28/2012	3:18:28 PM	Bypass valve closed
2/28/2012	3:18:28 PM	Bubbler valve closed
2/28/2012	3:18:28 PM	Helium MFC set to  0.000000
2/28/2012	3:18:28 PM	H2 MFC set to  0.000000
2/28/2012	3:18:28 PM	BCl3 MFC set to  0.000000
2/28/2012	3:18:28 PM	PH3 MFC set to  0.000000
2/28/2012	3:18:28 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:18:28 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:18:28 PM	Tube furnace set to 0
2/28/2012	3:18:31 PM	H2 valve closed
2/28/2012	3:18:31 PM	BCl3 valve closed
2/28/2012	3:18:31 PM	PH3 valve closed
2/28/2012	3:18:31 PM	SiCl4 pre valve closed
2/28/2012	3:18:31 PM	SiCl4 post valve closed
2/28/2012	3:18:31 PM	Main Vac valve closed
2/28/2012	3:18:31 PM	Bypass valve closed
2/28/2012	3:18:31 PM	Bubbler valve closed
2/28/2012	3:18:31 PM	Helium valve opened
2/28/2012	3:18:31 PM	Helium MFC set to  500.000000
2/28/2012	3:18:31 PM	H2 MFC set to  0.000000
2/28/2012	3:18:31 PM	BCl3 MFC set to  0.000000
2/28/2012	3:18:31 PM	PH3 MFC set to  0.000000
2/28/2012	3:18:31 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:18:31 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:18:31 PM	Tube furnace set to 0
2/28/2012	3:19:37 PM	Helium valve closed
2/28/2012	3:19:37 PM	H2 valve closed
2/28/2012	3:19:37 PM	BCl3 valve closed
2/28/2012	3:19:37 PM	PH3 valve closed
2/28/2012	3:19:37 PM	SiCl4 pre valve closed
2/28/2012	3:19:37 PM	SiCl4 post valve closed
2/28/2012	3:19:37 PM	Main Vac valve closed
2/28/2012	3:19:37 PM	Bypass valve closed
2/28/2012	3:19:37 PM	Bubbler valve closed
2/28/2012	3:19:37 PM	Helium MFC set to  0.000000
2/28/2012	3:19:37 PM	H2 MFC set to  0.000000
2/28/2012	3:19:37 PM	BCl3 MFC set to  0.000000
2/28/2012	3:19:37 PM	PH3 MFC set to  0.000000
2/28/2012	3:19:37 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:19:37 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:19:37 PM	Tube furnace set to 0
2/28/2012	3:19:38 PM	Run finished at 3:19 PM
2/28/2012	3:19:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/28/2012	3:22:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/28/2012	3:22:26 PM	Recipe started at 3:22 PM
2/28/2012	3:22:26 PM	Helium valve closed
2/28/2012	3:22:26 PM	H2 valve closed
2/28/2012	3:22:26 PM	BCl3 valve closed
2/28/2012	3:22:26 PM	PH3 valve closed
2/28/2012	3:22:26 PM	SiCl4 pre valve closed
2/28/2012	3:22:26 PM	SiCl4 post valve closed
2/28/2012	3:22:26 PM	Main Vac valve closed
2/28/2012	3:22:26 PM	Bubbler valve closed
2/28/2012	3:22:26 PM	Bypass valve opened
2/28/2012	3:22:26 PM	Helium MFC set to  0.000000
2/28/2012	3:22:26 PM	H2 MFC set to  0.000000
2/28/2012	3:22:26 PM	BCl3 MFC set to  0.000000
2/28/2012	3:22:26 PM	PH3 MFC set to  0.000000
2/28/2012	3:22:26 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:22:26 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:22:26 PM	Tube furnace set to 0
2/28/2012	3:23:27 PM	Helium valve closed
2/28/2012	3:23:27 PM	H2 valve closed
2/28/2012	3:23:27 PM	BCl3 valve closed
2/28/2012	3:23:27 PM	PH3 valve closed
2/28/2012	3:23:27 PM	SiCl4 pre valve closed
2/28/2012	3:23:27 PM	SiCl4 post valve closed
2/28/2012	3:23:27 PM	Main Vac valve closed
2/28/2012	3:23:27 PM	Bubbler valve closed
2/28/2012	3:23:27 PM	Bypass valve opened
2/28/2012	3:23:27 PM	Helium MFC set to  0.000000
2/28/2012	3:23:27 PM	H2 MFC set to  0.000000
2/28/2012	3:23:27 PM	BCl3 MFC set to  0.000000
2/28/2012	3:23:27 PM	PH3 MFC set to  0.000000
2/28/2012	3:23:27 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:23:27 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:23:27 PM	Tube furnace set to 0
2/28/2012	3:23:41 PM	Helium valve closed
2/28/2012	3:23:41 PM	H2 valve closed
2/28/2012	3:23:41 PM	BCl3 valve closed
2/28/2012	3:23:41 PM	PH3 valve closed
2/28/2012	3:23:41 PM	SiCl4 pre valve closed
2/28/2012	3:23:41 PM	SiCl4 post valve closed
2/28/2012	3:23:41 PM	Bypass valve closed
2/28/2012	3:23:41 PM	Bubbler valve closed
2/28/2012	3:23:41 PM	Main Vac valve opened
2/28/2012	3:23:41 PM	Helium MFC set to  0.000000
2/28/2012	3:23:41 PM	H2 MFC set to  0.000000
2/28/2012	3:23:41 PM	BCl3 MFC set to  0.000000
2/28/2012	3:23:41 PM	PH3 MFC set to  0.000000
2/28/2012	3:23:41 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:23:41 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:23:41 PM	Tube furnace set to 0
2/28/2012	3:23:42 PM	Run finished at 3:23 PM
2/28/2012	3:23:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/28/2012	3:26:04 PM	Recipe started at 3:25 PM
2/28/2012	3:26:04 PM	Helium valve closed
2/28/2012	3:26:04 PM	H2 valve closed
2/28/2012	3:26:04 PM	BCl3 valve closed
2/28/2012	3:26:04 PM	PH3 valve closed
2/28/2012	3:26:04 PM	SiCl4 pre valve closed
2/28/2012	3:26:04 PM	SiCl4 post valve closed
2/28/2012	3:26:04 PM	Bypass valve closed
2/28/2012	3:26:04 PM	Bubbler valve closed
2/28/2012	3:26:04 PM	Main Vac valve opened
2/28/2012	3:26:04 PM	Helium MFC set to  0.000000
2/28/2012	3:26:04 PM	H2 MFC set to  0.000000
2/28/2012	3:26:04 PM	BCl3 MFC set to  0.000000
2/28/2012	3:26:04 PM	PH3 MFC set to  0.000000
2/28/2012	3:26:04 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:26:04 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:26:04 PM	Tube furnace set to 150
2/28/2012	3:26:34 PM	H2 valve closed
2/28/2012	3:26:34 PM	BCl3 valve closed
2/28/2012	3:26:34 PM	PH3 valve closed
2/28/2012	3:26:34 PM	SiCl4 pre valve closed
2/28/2012	3:26:34 PM	SiCl4 post valve closed
2/28/2012	3:26:34 PM	Bypass valve closed
2/28/2012	3:26:34 PM	Bubbler valve closed
2/28/2012	3:26:34 PM	Helium valve opened
2/28/2012	3:26:34 PM	Main Vac valve opened
2/28/2012	3:26:34 PM	Helium MFC set to  20.000000
2/28/2012	3:26:34 PM	H2 MFC set to  0.000000
2/28/2012	3:26:34 PM	BCl3 MFC set to  0.000000
2/28/2012	3:26:34 PM	PH3 MFC set to  0.000000
2/28/2012	3:26:34 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:26:34 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:26:35 PM	Tube furnace set to 150
2/28/2012	3:27:05 PM	Helium valve closed
2/28/2012	3:27:05 PM	H2 valve closed
2/28/2012	3:27:05 PM	BCl3 valve closed
2/28/2012	3:27:05 PM	PH3 valve closed
2/28/2012	3:27:05 PM	SiCl4 pre valve closed
2/28/2012	3:27:05 PM	SiCl4 post valve closed
2/28/2012	3:27:05 PM	Bypass valve closed
2/28/2012	3:27:05 PM	Bubbler valve closed
2/28/2012	3:27:05 PM	Main Vac valve opened
2/28/2012	3:27:05 PM	Helium MFC set to  0.000000
2/28/2012	3:27:05 PM	H2 MFC set to  0.000000
2/28/2012	3:27:05 PM	BCl3 MFC set to  0.000000
2/28/2012	3:27:05 PM	PH3 MFC set to  0.000000
2/28/2012	3:27:05 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:27:05 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:27:05 PM	Tube furnace set to 150
2/28/2012	3:27:35 PM	H2 valve closed
2/28/2012	3:27:35 PM	BCl3 valve closed
2/28/2012	3:27:35 PM	PH3 valve closed
2/28/2012	3:27:35 PM	SiCl4 pre valve closed
2/28/2012	3:27:35 PM	SiCl4 post valve closed
2/28/2012	3:27:35 PM	Bypass valve closed
2/28/2012	3:27:35 PM	Bubbler valve closed
2/28/2012	3:27:35 PM	Helium valve opened
2/28/2012	3:27:35 PM	Main Vac valve opened
2/28/2012	3:27:35 PM	Helium MFC set to  20.000000
2/28/2012	3:27:35 PM	H2 MFC set to  0.000000
2/28/2012	3:27:35 PM	BCl3 MFC set to  0.000000
2/28/2012	3:27:35 PM	PH3 MFC set to  0.000000
2/28/2012	3:27:35 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:27:35 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:27:35 PM	Tube furnace set to 150
2/28/2012	3:28:05 PM	Helium valve closed
2/28/2012	3:28:05 PM	H2 valve closed
2/28/2012	3:28:05 PM	BCl3 valve closed
2/28/2012	3:28:05 PM	PH3 valve closed
2/28/2012	3:28:05 PM	SiCl4 pre valve closed
2/28/2012	3:28:05 PM	SiCl4 post valve closed
2/28/2012	3:28:05 PM	Bypass valve closed
2/28/2012	3:28:05 PM	Bubbler valve closed
2/28/2012	3:28:05 PM	Main Vac valve opened
2/28/2012	3:28:05 PM	Helium MFC set to  0.000000
2/28/2012	3:28:05 PM	H2 MFC set to  0.000000
2/28/2012	3:28:05 PM	BCl3 MFC set to  0.000000
2/28/2012	3:28:05 PM	PH3 MFC set to  0.000000
2/28/2012	3:28:05 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:28:05 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:28:05 PM	Tube furnace set to 150
2/28/2012	3:28:35 PM	H2 valve closed
2/28/2012	3:28:35 PM	BCl3 valve closed
2/28/2012	3:28:35 PM	PH3 valve closed
2/28/2012	3:28:35 PM	SiCl4 pre valve closed
2/28/2012	3:28:35 PM	SiCl4 post valve closed
2/28/2012	3:28:35 PM	Bypass valve closed
2/28/2012	3:28:35 PM	Bubbler valve closed
2/28/2012	3:28:35 PM	Helium valve opened
2/28/2012	3:28:35 PM	Main Vac valve opened
2/28/2012	3:28:35 PM	Helium MFC set to  20.000000
2/28/2012	3:28:35 PM	H2 MFC set to  0.000000
2/28/2012	3:28:35 PM	BCl3 MFC set to  0.000000
2/28/2012	3:28:35 PM	PH3 MFC set to  0.000000
2/28/2012	3:28:35 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:28:35 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:28:35 PM	Tube furnace set to 150
2/28/2012	3:29:05 PM	Helium valve closed
2/28/2012	3:29:05 PM	H2 valve closed
2/28/2012	3:29:05 PM	BCl3 valve closed
2/28/2012	3:29:05 PM	PH3 valve closed
2/28/2012	3:29:05 PM	SiCl4 pre valve closed
2/28/2012	3:29:05 PM	SiCl4 post valve closed
2/28/2012	3:29:05 PM	Bypass valve closed
2/28/2012	3:29:05 PM	Bubbler valve closed
2/28/2012	3:29:05 PM	Main Vac valve opened
2/28/2012	3:29:05 PM	Helium MFC set to  0.000000
2/28/2012	3:29:05 PM	H2 MFC set to  0.000000
2/28/2012	3:29:05 PM	BCl3 MFC set to  0.000000
2/28/2012	3:29:05 PM	PH3 MFC set to  0.000000
2/28/2012	3:29:05 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:29:05 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:29:06 PM	Tube furnace set to 150
2/28/2012	3:29:36 PM	H2 valve closed
2/28/2012	3:29:36 PM	BCl3 valve closed
2/28/2012	3:29:36 PM	PH3 valve closed
2/28/2012	3:29:36 PM	SiCl4 pre valve closed
2/28/2012	3:29:36 PM	SiCl4 post valve closed
2/28/2012	3:29:36 PM	Bypass valve closed
2/28/2012	3:29:36 PM	Bubbler valve closed
2/28/2012	3:29:36 PM	Helium valve opened
2/28/2012	3:29:36 PM	Main Vac valve opened
2/28/2012	3:29:36 PM	Helium MFC set to  20.000000
2/28/2012	3:29:36 PM	H2 MFC set to  0.000000
2/28/2012	3:29:36 PM	BCl3 MFC set to  0.000000
2/28/2012	3:29:36 PM	PH3 MFC set to  0.000000
2/28/2012	3:29:36 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:29:36 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:29:36 PM	Tube furnace set to 150
2/28/2012	3:30:06 PM	Helium valve closed
2/28/2012	3:30:06 PM	H2 valve closed
2/28/2012	3:30:06 PM	BCl3 valve closed
2/28/2012	3:30:06 PM	PH3 valve closed
2/28/2012	3:30:06 PM	SiCl4 pre valve closed
2/28/2012	3:30:06 PM	SiCl4 post valve closed
2/28/2012	3:30:06 PM	Bypass valve closed
2/28/2012	3:30:06 PM	Bubbler valve closed
2/28/2012	3:30:06 PM	Main Vac valve opened
2/28/2012	3:30:06 PM	Helium MFC set to  0.000000
2/28/2012	3:30:06 PM	H2 MFC set to  0.000000
2/28/2012	3:30:06 PM	BCl3 MFC set to  0.000000
2/28/2012	3:30:06 PM	PH3 MFC set to  0.000000
2/28/2012	3:30:06 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:30:06 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:30:06 PM	Tube furnace set to 150
2/28/2012	3:30:36 PM	H2 valve closed
2/28/2012	3:30:36 PM	BCl3 valve closed
2/28/2012	3:30:36 PM	PH3 valve closed
2/28/2012	3:30:36 PM	SiCl4 pre valve closed
2/28/2012	3:30:36 PM	SiCl4 post valve closed
2/28/2012	3:30:36 PM	Bypass valve closed
2/28/2012	3:30:36 PM	Bubbler valve closed
2/28/2012	3:30:36 PM	Helium valve opened
2/28/2012	3:30:36 PM	Main Vac valve opened
2/28/2012	3:30:36 PM	Helium MFC set to  20.000000
2/28/2012	3:30:36 PM	H2 MFC set to  0.000000
2/28/2012	3:30:36 PM	BCl3 MFC set to  0.000000
2/28/2012	3:30:36 PM	PH3 MFC set to  0.000000
2/28/2012	3:30:36 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:30:36 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:30:36 PM	Tube furnace set to 150
2/28/2012	3:31:06 PM	Helium valve closed
2/28/2012	3:31:06 PM	H2 valve closed
2/28/2012	3:31:06 PM	BCl3 valve closed
2/28/2012	3:31:06 PM	PH3 valve closed
2/28/2012	3:31:06 PM	SiCl4 pre valve closed
2/28/2012	3:31:06 PM	SiCl4 post valve closed
2/28/2012	3:31:06 PM	Bypass valve closed
2/28/2012	3:31:06 PM	Bubbler valve closed
2/28/2012	3:31:06 PM	Main Vac valve opened
2/28/2012	3:31:06 PM	Helium MFC set to  0.000000
2/28/2012	3:31:06 PM	H2 MFC set to  0.000000
2/28/2012	3:31:06 PM	BCl3 MFC set to  0.000000
2/28/2012	3:31:06 PM	PH3 MFC set to  0.000000
2/28/2012	3:31:06 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:31:06 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:31:06 PM	Tube furnace set to 150
2/28/2012	3:31:36 PM	H2 valve closed
2/28/2012	3:31:36 PM	BCl3 valve closed
2/28/2012	3:31:36 PM	PH3 valve closed
2/28/2012	3:31:36 PM	SiCl4 pre valve closed
2/28/2012	3:31:36 PM	SiCl4 post valve closed
2/28/2012	3:31:36 PM	Bypass valve closed
2/28/2012	3:31:36 PM	Bubbler valve closed
2/28/2012	3:31:36 PM	Helium valve opened
2/28/2012	3:31:36 PM	Main Vac valve opened
2/28/2012	3:31:36 PM	Helium MFC set to  20.000000
2/28/2012	3:31:36 PM	H2 MFC set to  0.000000
2/28/2012	3:31:36 PM	BCl3 MFC set to  0.000000
2/28/2012	3:31:36 PM	PH3 MFC set to  0.000000
2/28/2012	3:31:36 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:31:36 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:31:37 PM	Tube furnace set to 150
2/28/2012	3:32:07 PM	Helium valve closed
2/28/2012	3:32:07 PM	H2 valve closed
2/28/2012	3:32:07 PM	BCl3 valve closed
2/28/2012	3:32:07 PM	PH3 valve closed
2/28/2012	3:32:07 PM	SiCl4 pre valve closed
2/28/2012	3:32:07 PM	SiCl4 post valve closed
2/28/2012	3:32:07 PM	Bypass valve closed
2/28/2012	3:32:07 PM	Bubbler valve closed
2/28/2012	3:32:07 PM	Main Vac valve opened
2/28/2012	3:32:07 PM	Helium MFC set to  0.000000
2/28/2012	3:32:07 PM	H2 MFC set to  0.000000
2/28/2012	3:32:07 PM	BCl3 MFC set to  0.000000
2/28/2012	3:32:07 PM	PH3 MFC set to  0.000000
2/28/2012	3:32:07 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:32:07 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:32:07 PM	Tube furnace set to 150
2/28/2012	3:32:37 PM	H2 valve closed
2/28/2012	3:32:37 PM	BCl3 valve closed
2/28/2012	3:32:37 PM	PH3 valve closed
2/28/2012	3:32:37 PM	SiCl4 pre valve closed
2/28/2012	3:32:37 PM	SiCl4 post valve closed
2/28/2012	3:32:37 PM	Bypass valve closed
2/28/2012	3:32:37 PM	Bubbler valve closed
2/28/2012	3:32:37 PM	Helium valve opened
2/28/2012	3:32:37 PM	Main Vac valve opened
2/28/2012	3:32:37 PM	Helium MFC set to  20.000000
2/28/2012	3:32:37 PM	H2 MFC set to  0.000000
2/28/2012	3:32:37 PM	BCl3 MFC set to  0.000000
2/28/2012	3:32:37 PM	PH3 MFC set to  0.000000
2/28/2012	3:32:37 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:32:37 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:32:37 PM	Tube furnace set to 150
2/28/2012	3:33:07 PM	Helium valve closed
2/28/2012	3:33:07 PM	H2 valve closed
2/28/2012	3:33:07 PM	BCl3 valve closed
2/28/2012	3:33:07 PM	PH3 valve closed
2/28/2012	3:33:07 PM	SiCl4 pre valve closed
2/28/2012	3:33:07 PM	SiCl4 post valve closed
2/28/2012	3:33:07 PM	Bypass valve closed
2/28/2012	3:33:07 PM	Bubbler valve closed
2/28/2012	3:33:07 PM	Main Vac valve opened
2/28/2012	3:33:07 PM	Helium MFC set to  0.000000
2/28/2012	3:33:07 PM	H2 MFC set to  0.000000
2/28/2012	3:33:07 PM	BCl3 MFC set to  0.000000
2/28/2012	3:33:07 PM	PH3 MFC set to  0.000000
2/28/2012	3:33:07 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:33:07 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:33:07 PM	Tube furnace set to 150
2/28/2012	3:33:37 PM	H2 valve closed
2/28/2012	3:33:37 PM	BCl3 valve closed
2/28/2012	3:33:37 PM	PH3 valve closed
2/28/2012	3:33:37 PM	SiCl4 pre valve closed
2/28/2012	3:33:37 PM	SiCl4 post valve closed
2/28/2012	3:33:37 PM	Bypass valve closed
2/28/2012	3:33:37 PM	Bubbler valve closed
2/28/2012	3:33:37 PM	Helium valve opened
2/28/2012	3:33:37 PM	Main Vac valve opened
2/28/2012	3:33:37 PM	Helium MFC set to  20.000000
2/28/2012	3:33:37 PM	H2 MFC set to  0.000000
2/28/2012	3:33:37 PM	BCl3 MFC set to  0.000000
2/28/2012	3:33:37 PM	PH3 MFC set to  0.000000
2/28/2012	3:33:37 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:33:37 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:33:37 PM	Tube furnace set to 150
2/28/2012	3:34:07 PM	Helium valve closed
2/28/2012	3:34:07 PM	H2 valve closed
2/28/2012	3:34:07 PM	BCl3 valve closed
2/28/2012	3:34:07 PM	PH3 valve closed
2/28/2012	3:34:07 PM	SiCl4 pre valve closed
2/28/2012	3:34:07 PM	SiCl4 post valve closed
2/28/2012	3:34:07 PM	Bypass valve closed
2/28/2012	3:34:07 PM	Bubbler valve closed
2/28/2012	3:34:07 PM	Main Vac valve opened
2/28/2012	3:34:07 PM	Helium MFC set to  0.000000
2/28/2012	3:34:07 PM	H2 MFC set to  0.000000
2/28/2012	3:34:07 PM	BCl3 MFC set to  0.000000
2/28/2012	3:34:07 PM	PH3 MFC set to  0.000000
2/28/2012	3:34:07 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:34:07 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:34:08 PM	Tube furnace set to 150
2/28/2012	3:34:38 PM	H2 valve closed
2/28/2012	3:34:38 PM	BCl3 valve closed
2/28/2012	3:34:38 PM	PH3 valve closed
2/28/2012	3:34:38 PM	SiCl4 pre valve closed
2/28/2012	3:34:38 PM	SiCl4 post valve closed
2/28/2012	3:34:38 PM	Bypass valve closed
2/28/2012	3:34:38 PM	Bubbler valve closed
2/28/2012	3:34:38 PM	Helium valve opened
2/28/2012	3:34:38 PM	Main Vac valve opened
2/28/2012	3:34:38 PM	Helium MFC set to  20.000000
2/28/2012	3:34:38 PM	H2 MFC set to  0.000000
2/28/2012	3:34:38 PM	BCl3 MFC set to  0.000000
2/28/2012	3:34:38 PM	PH3 MFC set to  0.000000
2/28/2012	3:34:38 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:34:38 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:34:38 PM	Tube furnace set to 150
2/28/2012	3:35:08 PM	Helium valve closed
2/28/2012	3:35:08 PM	H2 valve closed
2/28/2012	3:35:08 PM	BCl3 valve closed
2/28/2012	3:35:08 PM	PH3 valve closed
2/28/2012	3:35:08 PM	SiCl4 pre valve closed
2/28/2012	3:35:08 PM	SiCl4 post valve closed
2/28/2012	3:35:08 PM	Bypass valve closed
2/28/2012	3:35:08 PM	Bubbler valve closed
2/28/2012	3:35:08 PM	Main Vac valve opened
2/28/2012	3:35:08 PM	Helium MFC set to  0.000000
2/28/2012	3:35:08 PM	H2 MFC set to  0.000000
2/28/2012	3:35:08 PM	BCl3 MFC set to  0.000000
2/28/2012	3:35:08 PM	PH3 MFC set to  0.000000
2/28/2012	3:35:08 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:35:08 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:35:08 PM	Tube furnace set to 150
2/28/2012	3:35:38 PM	H2 valve closed
2/28/2012	3:35:38 PM	BCl3 valve closed
2/28/2012	3:35:38 PM	PH3 valve closed
2/28/2012	3:35:38 PM	SiCl4 pre valve closed
2/28/2012	3:35:38 PM	SiCl4 post valve closed
2/28/2012	3:35:38 PM	Bypass valve closed
2/28/2012	3:35:38 PM	Bubbler valve closed
2/28/2012	3:35:38 PM	Helium valve opened
2/28/2012	3:35:38 PM	Main Vac valve opened
2/28/2012	3:35:38 PM	Helium MFC set to  20.000000
2/28/2012	3:35:38 PM	H2 MFC set to  0.000000
2/28/2012	3:35:38 PM	BCl3 MFC set to  0.000000
2/28/2012	3:35:38 PM	PH3 MFC set to  0.000000
2/28/2012	3:35:38 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:35:38 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:35:38 PM	Tube furnace set to 150
2/28/2012	3:36:08 PM	Helium valve closed
2/28/2012	3:36:08 PM	H2 valve closed
2/28/2012	3:36:08 PM	BCl3 valve closed
2/28/2012	3:36:08 PM	PH3 valve closed
2/28/2012	3:36:08 PM	SiCl4 pre valve closed
2/28/2012	3:36:08 PM	SiCl4 post valve closed
2/28/2012	3:36:08 PM	Bypass valve closed
2/28/2012	3:36:08 PM	Bubbler valve closed
2/28/2012	3:36:08 PM	Main Vac valve opened
2/28/2012	3:36:08 PM	Helium MFC set to  0.000000
2/28/2012	3:36:08 PM	H2 MFC set to  0.000000
2/28/2012	3:36:08 PM	BCl3 MFC set to  0.000000
2/28/2012	3:36:08 PM	PH3 MFC set to  0.000000
2/28/2012	3:36:08 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:36:08 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:36:08 PM	Tube furnace set to 150
2/28/2012	3:36:09 PM	Run finished at 3:36 PM
2/28/2012	3:37:31 PM	Main Vac valve closed
2/28/2012	3:37:38 PM	Main Vac valve opened
2/28/2012	3:38:03 PM	Recipe started at 3:37 PM
2/28/2012	3:38:03 PM	Helium valve closed
2/28/2012	3:38:03 PM	H2 valve closed
2/28/2012	3:38:03 PM	BCl3 valve closed
2/28/2012	3:38:03 PM	PH3 valve closed
2/28/2012	3:38:03 PM	SiCl4 pre valve closed
2/28/2012	3:38:03 PM	SiCl4 post valve closed
2/28/2012	3:38:03 PM	Bypass valve closed
2/28/2012	3:38:03 PM	Bubbler valve closed
2/28/2012	3:38:03 PM	Main Vac valve opened
2/28/2012	3:38:03 PM	Helium MFC set to  0.000000
2/28/2012	3:38:03 PM	H2 MFC set to  0.000000
2/28/2012	3:38:03 PM	BCl3 MFC set to  0.000000
2/28/2012	3:38:03 PM	PH3 MFC set to  0.000000
2/28/2012	3:38:03 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:38:03 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:38:03 PM	Tube furnace set to 150
2/28/2012	3:38:33 PM	H2 valve closed
2/28/2012	3:38:33 PM	BCl3 valve closed
2/28/2012	3:38:33 PM	PH3 valve closed
2/28/2012	3:38:33 PM	SiCl4 pre valve closed
2/28/2012	3:38:33 PM	SiCl4 post valve closed
2/28/2012	3:38:33 PM	Bypass valve closed
2/28/2012	3:38:33 PM	Bubbler valve closed
2/28/2012	3:38:33 PM	Helium valve opened
2/28/2012	3:38:33 PM	Main Vac valve opened
2/28/2012	3:38:33 PM	Helium MFC set to  20.000000
2/28/2012	3:38:33 PM	H2 MFC set to  0.000000
2/28/2012	3:38:33 PM	BCl3 MFC set to  0.000000
2/28/2012	3:38:33 PM	PH3 MFC set to  0.000000
2/28/2012	3:38:33 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:38:33 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:38:33 PM	Tube furnace set to 150
2/28/2012	3:39:03 PM	Helium valve closed
2/28/2012	3:39:03 PM	H2 valve closed
2/28/2012	3:39:03 PM	BCl3 valve closed
2/28/2012	3:39:03 PM	PH3 valve closed
2/28/2012	3:39:03 PM	SiCl4 pre valve closed
2/28/2012	3:39:03 PM	SiCl4 post valve closed
2/28/2012	3:39:03 PM	Bypass valve closed
2/28/2012	3:39:03 PM	Bubbler valve closed
2/28/2012	3:39:03 PM	Main Vac valve opened
2/28/2012	3:39:03 PM	Helium MFC set to  0.000000
2/28/2012	3:39:03 PM	H2 MFC set to  0.000000
2/28/2012	3:39:03 PM	BCl3 MFC set to  0.000000
2/28/2012	3:39:03 PM	PH3 MFC set to  0.000000
2/28/2012	3:39:03 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:39:03 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:39:03 PM	Tube furnace set to 150
2/28/2012	3:39:33 PM	H2 valve closed
2/28/2012	3:39:34 PM	BCl3 valve closed
2/28/2012	3:39:34 PM	PH3 valve closed
2/28/2012	3:39:34 PM	SiCl4 pre valve closed
2/28/2012	3:39:34 PM	SiCl4 post valve closed
2/28/2012	3:39:34 PM	Bypass valve closed
2/28/2012	3:39:34 PM	Bubbler valve closed
2/28/2012	3:39:34 PM	Helium valve opened
2/28/2012	3:39:34 PM	Main Vac valve opened
2/28/2012	3:39:34 PM	Helium MFC set to  20.000000
2/28/2012	3:39:34 PM	H2 MFC set to  0.000000
2/28/2012	3:39:34 PM	BCl3 MFC set to  0.000000
2/28/2012	3:39:34 PM	PH3 MFC set to  0.000000
2/28/2012	3:39:34 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:39:34 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:39:34 PM	Tube furnace set to 150
2/28/2012	3:40:04 PM	Helium valve closed
2/28/2012	3:40:04 PM	H2 valve closed
2/28/2012	3:40:04 PM	BCl3 valve closed
2/28/2012	3:40:04 PM	PH3 valve closed
2/28/2012	3:40:04 PM	SiCl4 pre valve closed
2/28/2012	3:40:04 PM	SiCl4 post valve closed
2/28/2012	3:40:04 PM	Bypass valve closed
2/28/2012	3:40:04 PM	Bubbler valve closed
2/28/2012	3:40:04 PM	Main Vac valve opened
2/28/2012	3:40:04 PM	Helium MFC set to  0.000000
2/28/2012	3:40:04 PM	H2 MFC set to  0.000000
2/28/2012	3:40:04 PM	BCl3 MFC set to  0.000000
2/28/2012	3:40:04 PM	PH3 MFC set to  0.000000
2/28/2012	3:40:04 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:40:04 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:40:04 PM	Tube furnace set to 150
2/28/2012	3:40:34 PM	H2 valve closed
2/28/2012	3:40:34 PM	BCl3 valve closed
2/28/2012	3:40:34 PM	PH3 valve closed
2/28/2012	3:40:34 PM	SiCl4 pre valve closed
2/28/2012	3:40:34 PM	SiCl4 post valve closed
2/28/2012	3:40:34 PM	Bypass valve closed
2/28/2012	3:40:34 PM	Bubbler valve closed
2/28/2012	3:40:34 PM	Helium valve opened
2/28/2012	3:40:34 PM	Main Vac valve opened
2/28/2012	3:40:34 PM	Helium MFC set to  20.000000
2/28/2012	3:40:34 PM	H2 MFC set to  0.000000
2/28/2012	3:40:34 PM	BCl3 MFC set to  0.000000
2/28/2012	3:40:34 PM	PH3 MFC set to  0.000000
2/28/2012	3:40:34 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:40:34 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:40:34 PM	Tube furnace set to 150
2/28/2012	3:41:04 PM	Helium valve closed
2/28/2012	3:41:04 PM	H2 valve closed
2/28/2012	3:41:04 PM	BCl3 valve closed
2/28/2012	3:41:04 PM	PH3 valve closed
2/28/2012	3:41:04 PM	SiCl4 pre valve closed
2/28/2012	3:41:04 PM	SiCl4 post valve closed
2/28/2012	3:41:04 PM	Bypass valve closed
2/28/2012	3:41:04 PM	Bubbler valve closed
2/28/2012	3:41:04 PM	Main Vac valve opened
2/28/2012	3:41:04 PM	Helium MFC set to  0.000000
2/28/2012	3:41:04 PM	H2 MFC set to  0.000000
2/28/2012	3:41:04 PM	BCl3 MFC set to  0.000000
2/28/2012	3:41:04 PM	PH3 MFC set to  0.000000
2/28/2012	3:41:04 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:41:04 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:41:04 PM	Tube furnace set to 150
2/28/2012	3:41:34 PM	H2 valve closed
2/28/2012	3:41:34 PM	BCl3 valve closed
2/28/2012	3:41:34 PM	PH3 valve closed
2/28/2012	3:41:34 PM	SiCl4 pre valve closed
2/28/2012	3:41:34 PM	SiCl4 post valve closed
2/28/2012	3:41:34 PM	Bypass valve closed
2/28/2012	3:41:34 PM	Bubbler valve closed
2/28/2012	3:41:34 PM	Helium valve opened
2/28/2012	3:41:34 PM	Main Vac valve opened
2/28/2012	3:41:34 PM	Helium MFC set to  20.000000
2/28/2012	3:41:34 PM	H2 MFC set to  0.000000
2/28/2012	3:41:34 PM	BCl3 MFC set to  0.000000
2/28/2012	3:41:34 PM	PH3 MFC set to  0.000000
2/28/2012	3:41:34 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:41:34 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:41:34 PM	Tube furnace set to 150
2/28/2012	3:42:05 PM	Helium valve closed
2/28/2012	3:42:05 PM	H2 valve closed
2/28/2012	3:42:05 PM	BCl3 valve closed
2/28/2012	3:42:05 PM	PH3 valve closed
2/28/2012	3:42:05 PM	SiCl4 pre valve closed
2/28/2012	3:42:05 PM	SiCl4 post valve closed
2/28/2012	3:42:05 PM	Bypass valve closed
2/28/2012	3:42:05 PM	Bubbler valve closed
2/28/2012	3:42:05 PM	Main Vac valve opened
2/28/2012	3:42:05 PM	Helium MFC set to  0.000000
2/28/2012	3:42:05 PM	H2 MFC set to  0.000000
2/28/2012	3:42:05 PM	BCl3 MFC set to  0.000000
2/28/2012	3:42:05 PM	PH3 MFC set to  0.000000
2/28/2012	3:42:05 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:42:05 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:42:05 PM	Tube furnace set to 150
2/28/2012	3:42:35 PM	H2 valve closed
2/28/2012	3:42:35 PM	BCl3 valve closed
2/28/2012	3:42:35 PM	PH3 valve closed
2/28/2012	3:42:35 PM	SiCl4 pre valve closed
2/28/2012	3:42:35 PM	SiCl4 post valve closed
2/28/2012	3:42:35 PM	Bypass valve closed
2/28/2012	3:42:35 PM	Bubbler valve closed
2/28/2012	3:42:35 PM	Helium valve opened
2/28/2012	3:42:35 PM	Main Vac valve opened
2/28/2012	3:42:35 PM	Helium MFC set to  20.000000
2/28/2012	3:42:35 PM	H2 MFC set to  0.000000
2/28/2012	3:42:35 PM	BCl3 MFC set to  0.000000
2/28/2012	3:42:35 PM	PH3 MFC set to  0.000000
2/28/2012	3:42:35 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:42:35 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:42:35 PM	Tube furnace set to 150
2/28/2012	3:43:05 PM	Helium valve closed
2/28/2012	3:43:05 PM	H2 valve closed
2/28/2012	3:43:05 PM	BCl3 valve closed
2/28/2012	3:43:05 PM	PH3 valve closed
2/28/2012	3:43:05 PM	SiCl4 pre valve closed
2/28/2012	3:43:05 PM	SiCl4 post valve closed
2/28/2012	3:43:05 PM	Bypass valve closed
2/28/2012	3:43:05 PM	Bubbler valve closed
2/28/2012	3:43:05 PM	Main Vac valve opened
2/28/2012	3:43:05 PM	Helium MFC set to  0.000000
2/28/2012	3:43:05 PM	H2 MFC set to  0.000000
2/28/2012	3:43:05 PM	BCl3 MFC set to  0.000000
2/28/2012	3:43:05 PM	PH3 MFC set to  0.000000
2/28/2012	3:43:05 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:43:05 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:43:05 PM	Tube furnace set to 150
2/28/2012	3:43:35 PM	H2 valve closed
2/28/2012	3:43:35 PM	BCl3 valve closed
2/28/2012	3:43:35 PM	PH3 valve closed
2/28/2012	3:43:35 PM	SiCl4 pre valve closed
2/28/2012	3:43:35 PM	SiCl4 post valve closed
2/28/2012	3:43:35 PM	Bypass valve closed
2/28/2012	3:43:35 PM	Bubbler valve closed
2/28/2012	3:43:35 PM	Helium valve opened
2/28/2012	3:43:35 PM	Main Vac valve opened
2/28/2012	3:43:35 PM	Helium MFC set to  20.000000
2/28/2012	3:43:35 PM	H2 MFC set to  0.000000
2/28/2012	3:43:35 PM	BCl3 MFC set to  0.000000
2/28/2012	3:43:35 PM	PH3 MFC set to  0.000000
2/28/2012	3:43:35 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:43:35 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:43:35 PM	Tube furnace set to 150
2/28/2012	3:44:05 PM	Helium valve closed
2/28/2012	3:44:05 PM	H2 valve closed
2/28/2012	3:44:05 PM	BCl3 valve closed
2/28/2012	3:44:05 PM	PH3 valve closed
2/28/2012	3:44:05 PM	SiCl4 pre valve closed
2/28/2012	3:44:05 PM	SiCl4 post valve closed
2/28/2012	3:44:05 PM	Bypass valve closed
2/28/2012	3:44:05 PM	Bubbler valve closed
2/28/2012	3:44:05 PM	Main Vac valve opened
2/28/2012	3:44:05 PM	Helium MFC set to  0.000000
2/28/2012	3:44:05 PM	H2 MFC set to  0.000000
2/28/2012	3:44:05 PM	BCl3 MFC set to  0.000000
2/28/2012	3:44:05 PM	PH3 MFC set to  0.000000
2/28/2012	3:44:05 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:44:05 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:44:06 PM	Tube furnace set to 150
2/28/2012	3:44:36 PM	H2 valve closed
2/28/2012	3:44:36 PM	BCl3 valve closed
2/28/2012	3:44:36 PM	PH3 valve closed
2/28/2012	3:44:36 PM	SiCl4 pre valve closed
2/28/2012	3:44:36 PM	SiCl4 post valve closed
2/28/2012	3:44:36 PM	Bypass valve closed
2/28/2012	3:44:36 PM	Bubbler valve closed
2/28/2012	3:44:36 PM	Helium valve opened
2/28/2012	3:44:36 PM	Main Vac valve opened
2/28/2012	3:44:36 PM	Helium MFC set to  20.000000
2/28/2012	3:44:36 PM	H2 MFC set to  0.000000
2/28/2012	3:44:36 PM	BCl3 MFC set to  0.000000
2/28/2012	3:44:36 PM	PH3 MFC set to  0.000000
2/28/2012	3:44:36 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:44:36 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:44:36 PM	Tube furnace set to 150
2/28/2012	3:45:06 PM	Helium valve closed
2/28/2012	3:45:06 PM	H2 valve closed
2/28/2012	3:45:06 PM	BCl3 valve closed
2/28/2012	3:45:06 PM	PH3 valve closed
2/28/2012	3:45:06 PM	SiCl4 pre valve closed
2/28/2012	3:45:06 PM	SiCl4 post valve closed
2/28/2012	3:45:06 PM	Bypass valve closed
2/28/2012	3:45:06 PM	Bubbler valve closed
2/28/2012	3:45:06 PM	Main Vac valve opened
2/28/2012	3:45:06 PM	Helium MFC set to  0.000000
2/28/2012	3:45:06 PM	H2 MFC set to  0.000000
2/28/2012	3:45:06 PM	BCl3 MFC set to  0.000000
2/28/2012	3:45:06 PM	PH3 MFC set to  0.000000
2/28/2012	3:45:06 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:45:06 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:45:06 PM	Tube furnace set to 150
2/28/2012	3:45:36 PM	H2 valve closed
2/28/2012	3:45:36 PM	BCl3 valve closed
2/28/2012	3:45:36 PM	PH3 valve closed
2/28/2012	3:45:36 PM	SiCl4 pre valve closed
2/28/2012	3:45:36 PM	SiCl4 post valve closed
2/28/2012	3:45:36 PM	Bypass valve closed
2/28/2012	3:45:36 PM	Bubbler valve closed
2/28/2012	3:45:36 PM	Helium valve opened
2/28/2012	3:45:36 PM	Main Vac valve opened
2/28/2012	3:45:36 PM	Helium MFC set to  20.000000
2/28/2012	3:45:36 PM	H2 MFC set to  0.000000
2/28/2012	3:45:36 PM	BCl3 MFC set to  0.000000
2/28/2012	3:45:36 PM	PH3 MFC set to  0.000000
2/28/2012	3:45:36 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:45:36 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:45:36 PM	Tube furnace set to 150
2/28/2012	3:46:06 PM	Helium valve closed
2/28/2012	3:46:06 PM	H2 valve closed
2/28/2012	3:46:06 PM	BCl3 valve closed
2/28/2012	3:46:06 PM	PH3 valve closed
2/28/2012	3:46:06 PM	SiCl4 pre valve closed
2/28/2012	3:46:06 PM	SiCl4 post valve closed
2/28/2012	3:46:06 PM	Bypass valve closed
2/28/2012	3:46:06 PM	Bubbler valve closed
2/28/2012	3:46:06 PM	Main Vac valve opened
2/28/2012	3:46:06 PM	Helium MFC set to  0.000000
2/28/2012	3:46:06 PM	H2 MFC set to  0.000000
2/28/2012	3:46:06 PM	BCl3 MFC set to  0.000000
2/28/2012	3:46:06 PM	PH3 MFC set to  0.000000
2/28/2012	3:46:06 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:46:06 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:46:06 PM	Tube furnace set to 150
2/28/2012	3:46:36 PM	H2 valve closed
2/28/2012	3:46:36 PM	BCl3 valve closed
2/28/2012	3:46:36 PM	PH3 valve closed
2/28/2012	3:46:36 PM	SiCl4 pre valve closed
2/28/2012	3:46:36 PM	SiCl4 post valve closed
2/28/2012	3:46:36 PM	Bypass valve closed
2/28/2012	3:46:36 PM	Bubbler valve closed
2/28/2012	3:46:36 PM	Helium valve opened
2/28/2012	3:46:36 PM	Main Vac valve opened
2/28/2012	3:46:36 PM	Helium MFC set to  20.000000
2/28/2012	3:46:36 PM	H2 MFC set to  0.000000
2/28/2012	3:46:36 PM	BCl3 MFC set to  0.000000
2/28/2012	3:46:36 PM	PH3 MFC set to  0.000000
2/28/2012	3:46:36 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:46:36 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:46:37 PM	Tube furnace set to 150
2/28/2012	3:47:07 PM	Helium valve closed
2/28/2012	3:47:07 PM	H2 valve closed
2/28/2012	3:47:07 PM	BCl3 valve closed
2/28/2012	3:47:07 PM	PH3 valve closed
2/28/2012	3:47:07 PM	SiCl4 pre valve closed
2/28/2012	3:47:07 PM	SiCl4 post valve closed
2/28/2012	3:47:07 PM	Bypass valve closed
2/28/2012	3:47:07 PM	Bubbler valve closed
2/28/2012	3:47:07 PM	Main Vac valve opened
2/28/2012	3:47:07 PM	Helium MFC set to  0.000000
2/28/2012	3:47:07 PM	H2 MFC set to  0.000000
2/28/2012	3:47:07 PM	BCl3 MFC set to  0.000000
2/28/2012	3:47:07 PM	PH3 MFC set to  0.000000
2/28/2012	3:47:07 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:47:07 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:47:07 PM	Tube furnace set to 150
2/28/2012	3:47:37 PM	H2 valve closed
2/28/2012	3:47:37 PM	BCl3 valve closed
2/28/2012	3:47:37 PM	PH3 valve closed
2/28/2012	3:47:37 PM	SiCl4 pre valve closed
2/28/2012	3:47:37 PM	SiCl4 post valve closed
2/28/2012	3:47:37 PM	Bypass valve closed
2/28/2012	3:47:37 PM	Bubbler valve closed
2/28/2012	3:47:37 PM	Helium valve opened
2/28/2012	3:47:37 PM	Main Vac valve opened
2/28/2012	3:47:37 PM	Helium MFC set to  20.000000
2/28/2012	3:47:37 PM	H2 MFC set to  0.000000
2/28/2012	3:47:37 PM	BCl3 MFC set to  0.000000
2/28/2012	3:47:37 PM	PH3 MFC set to  0.000000
2/28/2012	3:47:37 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:47:37 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:47:37 PM	Tube furnace set to 150
2/28/2012	3:48:07 PM	Helium valve closed
2/28/2012	3:48:07 PM	H2 valve closed
2/28/2012	3:48:07 PM	BCl3 valve closed
2/28/2012	3:48:07 PM	PH3 valve closed
2/28/2012	3:48:07 PM	SiCl4 pre valve closed
2/28/2012	3:48:07 PM	SiCl4 post valve closed
2/28/2012	3:48:07 PM	Bypass valve closed
2/28/2012	3:48:07 PM	Bubbler valve closed
2/28/2012	3:48:07 PM	Main Vac valve opened
2/28/2012	3:48:07 PM	Helium MFC set to  0.000000
2/28/2012	3:48:07 PM	H2 MFC set to  0.000000
2/28/2012	3:48:07 PM	BCl3 MFC set to  0.000000
2/28/2012	3:48:07 PM	PH3 MFC set to  0.000000
2/28/2012	3:48:07 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:48:07 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:48:07 PM	Tube furnace set to 150
2/28/2012	3:48:08 PM	Run finished at 3:48 PM
2/28/2012	3:49:13 PM	Main Vac valve closed
2/28/2012	3:49:28 PM	Main Vac valve opened
2/28/2012	3:50:39 PM	Main Vac valve closed
2/28/2012	3:50:44 PM	Main Vac valve opened
2/28/2012	3:51:13 PM	Main Vac valve closed
2/28/2012	3:51:25 PM	Main Vac valve opened
2/28/2012	3:52:11 PM	Recipe started at 3:52 PM
2/28/2012	3:52:11 PM	Helium valve closed
2/28/2012	3:52:11 PM	H2 valve closed
2/28/2012	3:52:11 PM	BCl3 valve closed
2/28/2012	3:52:11 PM	PH3 valve closed
2/28/2012	3:52:11 PM	SiCl4 pre valve closed
2/28/2012	3:52:11 PM	SiCl4 post valve closed
2/28/2012	3:52:11 PM	Main Vac valve closed
2/28/2012	3:52:11 PM	Bypass valve closed
2/28/2012	3:52:11 PM	Bubbler valve closed
2/28/2012	3:52:11 PM	Helium MFC set to  0.000000
2/28/2012	3:52:11 PM	H2 MFC set to  0.000000
2/28/2012	3:52:11 PM	BCl3 MFC set to  0.000000
2/28/2012	3:52:11 PM	PH3 MFC set to  0.000000
2/28/2012	3:52:11 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:52:11 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:52:11 PM	Tube furnace set to 0
2/28/2012	3:52:14 PM	Helium valve closed
2/28/2012	3:52:14 PM	BCl3 valve closed
2/28/2012	3:52:14 PM	PH3 valve closed
2/28/2012	3:52:14 PM	SiCl4 pre valve closed
2/28/2012	3:52:14 PM	SiCl4 post valve closed
2/28/2012	3:52:14 PM	Main Vac valve closed
2/28/2012	3:52:14 PM	Bypass valve closed
2/28/2012	3:52:14 PM	Bubbler valve closed
2/28/2012	3:52:14 PM	H2 valve opened
2/28/2012	3:52:14 PM	Helium MFC set to  0.000000
2/28/2012	3:52:14 PM	H2 MFC set to  500.000000
2/28/2012	3:52:14 PM	BCl3 MFC set to  0.000000
2/28/2012	3:52:14 PM	PH3 MFC set to  0.000000
2/28/2012	3:52:14 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:52:14 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:52:15 PM	Tube furnace set to 0
2/28/2012	3:53:17 PM	Helium valve closed
2/28/2012	3:53:17 PM	BCl3 valve closed
2/28/2012	3:53:17 PM	PH3 valve closed
2/28/2012	3:53:17 PM	SiCl4 pre valve closed
2/28/2012	3:53:17 PM	SiCl4 post valve closed
2/28/2012	3:53:17 PM	Main Vac valve closed
2/28/2012	3:53:17 PM	Bypass valve closed
2/28/2012	3:53:17 PM	H2 valve opened
2/28/2012	3:53:17 PM	Bubbler valve opened
2/28/2012	3:53:17 PM	Helium MFC set to  0.000000
2/28/2012	3:53:17 PM	H2 MFC set to  500.000000
2/28/2012	3:53:17 PM	BCl3 MFC set to  0.000000
2/28/2012	3:53:17 PM	PH3 MFC set to  0.000000
2/28/2012	3:53:17 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:53:17 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:53:17 PM	Tube furnace set to 0
2/28/2012	3:53:19 PM	Helium valve closed
2/28/2012	3:53:19 PM	BCl3 valve closed
2/28/2012	3:53:19 PM	PH3 valve closed
2/28/2012	3:53:19 PM	SiCl4 pre valve closed
2/28/2012	3:53:19 PM	SiCl4 post valve closed
2/28/2012	3:53:19 PM	Main Vac valve closed
2/28/2012	3:53:19 PM	Bypass valve closed
2/28/2012	3:53:19 PM	H2 valve opened
2/28/2012	3:53:19 PM	Bubbler valve opened
2/28/2012	3:53:19 PM	Helium MFC set to  0.000000
2/28/2012	3:53:19 PM	H2 MFC set to  500.000000
2/28/2012	3:53:19 PM	BCl3 MFC set to  0.000000
2/28/2012	3:53:19 PM	PH3 MFC set to  0.000000
2/28/2012	3:53:19 PM	SiCl4 MFC set to  0.000000
2/28/2012	3:53:19 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	3:53:19 PM	Tube furnace set to 1000
2/28/2012	4:13:19 PM	Helium valve closed
2/28/2012	4:13:19 PM	BCl3 valve closed
2/28/2012	4:13:19 PM	Main Vac valve closed
2/28/2012	4:13:19 PM	Bypass valve closed
2/28/2012	4:13:19 PM	H2 valve opened
2/28/2012	4:13:19 PM	PH3 valve opened
2/28/2012	4:13:19 PM	SiCl4 pre valve opened
2/28/2012	4:13:19 PM	SiCl4 post valve opened
2/28/2012	4:13:19 PM	Bubbler valve opened
2/28/2012	4:13:19 PM	Helium MFC set to  0.000000
2/28/2012	4:13:19 PM	H2 MFC set to  500.000000
2/28/2012	4:13:19 PM	BCl3 MFC set to  0.000000
2/28/2012	4:13:19 PM	PH3 MFC set to  0.300000
2/28/2012	4:13:19 PM	SiCl4 MFC set to  25.000000
2/28/2012	4:13:19 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	4:13:19 PM	Tube furnace set to 1000
2/28/2012	4:21:19 PM	Helium valve closed
2/28/2012	4:21:19 PM	BCl3 valve closed
2/28/2012	4:21:19 PM	PH3 valve closed
2/28/2012	4:21:19 PM	SiCl4 pre valve closed
2/28/2012	4:21:19 PM	SiCl4 post valve closed
2/28/2012	4:21:19 PM	Main Vac valve closed
2/28/2012	4:21:19 PM	Bypass valve closed
2/28/2012	4:21:19 PM	H2 valve opened
2/28/2012	4:21:19 PM	Bubbler valve opened
2/28/2012	4:21:19 PM	Helium MFC set to  0.000000
2/28/2012	4:21:19 PM	H2 MFC set to  500.000000
2/28/2012	4:21:19 PM	BCl3 MFC set to  0.000000
2/28/2012	4:21:19 PM	PH3 MFC set to  0.000000
2/28/2012	4:21:19 PM	SiCl4 MFC set to  0.000000
2/28/2012	4:21:19 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	4:21:19 PM	Tube furnace set to 750
2/28/2012	4:26:19 PM	H2 valve closed
2/28/2012	4:26:19 PM	BCl3 valve closed
2/28/2012	4:26:19 PM	PH3 valve closed
2/28/2012	4:26:19 PM	SiCl4 pre valve closed
2/28/2012	4:26:19 PM	SiCl4 post valve closed
2/28/2012	4:26:19 PM	Main Vac valve closed
2/28/2012	4:26:19 PM	Bypass valve closed
2/28/2012	4:26:19 PM	Helium valve opened
2/28/2012	4:26:19 PM	Bubbler valve opened
2/28/2012	4:26:19 PM	Helium MFC set to  500.000000
2/28/2012	4:26:19 PM	H2 MFC set to  0.000000
2/28/2012	4:26:19 PM	BCl3 MFC set to  0.000000
2/28/2012	4:26:19 PM	PH3 MFC set to  0.000000
2/28/2012	4:26:19 PM	SiCl4 MFC set to  0.000000
2/28/2012	4:26:19 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	4:26:19 PM	Tube furnace set to 0
2/28/2012	4:40:17 PM	Helium valve closed
2/28/2012	4:40:17 PM	H2 valve closed
2/28/2012	4:40:17 PM	BCl3 valve closed
2/28/2012	4:40:17 PM	PH3 valve closed
2/28/2012	4:40:17 PM	SiCl4 pre valve closed
2/28/2012	4:40:17 PM	SiCl4 post valve closed
2/28/2012	4:40:17 PM	Main Vac valve closed
2/28/2012	4:40:17 PM	Bypass valve closed
2/28/2012	4:40:17 PM	Bubbler valve closed
2/28/2012	4:40:17 PM	Helium MFC set to  0.000000
2/28/2012	4:40:17 PM	H2 MFC set to  0.000000
2/28/2012	4:40:17 PM	BCl3 MFC set to  0.000000
2/28/2012	4:40:17 PM	PH3 MFC set to  0.000000
2/28/2012	4:40:17 PM	SiCl4 MFC set to  0.000000
2/28/2012	4:40:17 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	4:40:18 PM	Tube furnace set to 0
2/28/2012	4:40:19 PM	Run finished at 4:40 PM
2/28/2012	4:42:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/28/2012	4:42:52 PM	Recipe started at 4:42 PM
2/28/2012	4:42:52 PM	Helium valve closed
2/28/2012	4:42:52 PM	H2 valve closed
2/28/2012	4:42:52 PM	BCl3 valve closed
2/28/2012	4:42:52 PM	PH3 valve closed
2/28/2012	4:42:52 PM	SiCl4 pre valve closed
2/28/2012	4:42:52 PM	SiCl4 post valve closed
2/28/2012	4:42:52 PM	Main Vac valve closed
2/28/2012	4:42:52 PM	Bubbler valve closed
2/28/2012	4:42:52 PM	Bypass valve opened
2/28/2012	4:42:52 PM	Helium MFC set to  0.000000
2/28/2012	4:42:52 PM	H2 MFC set to  0.000000
2/28/2012	4:42:52 PM	BCl3 MFC set to  0.000000
2/28/2012	4:42:52 PM	PH3 MFC set to  0.000000
2/28/2012	4:42:52 PM	SiCl4 MFC set to  0.000000
2/28/2012	4:42:52 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	4:42:52 PM	Tube furnace set to 0
2/28/2012	4:43:51 PM	Helium valve closed
2/28/2012	4:43:51 PM	H2 valve closed
2/28/2012	4:43:51 PM	BCl3 valve closed
2/28/2012	4:43:51 PM	PH3 valve closed
2/28/2012	4:43:51 PM	SiCl4 pre valve closed
2/28/2012	4:43:51 PM	SiCl4 post valve closed
2/28/2012	4:43:51 PM	Main Vac valve closed
2/28/2012	4:43:51 PM	Bubbler valve closed
2/28/2012	4:43:51 PM	Bypass valve opened
2/28/2012	4:43:51 PM	Helium MFC set to  0.000000
2/28/2012	4:43:51 PM	H2 MFC set to  0.000000
2/28/2012	4:43:51 PM	BCl3 MFC set to  0.000000
2/28/2012	4:43:51 PM	PH3 MFC set to  0.000000
2/28/2012	4:43:51 PM	SiCl4 MFC set to  0.000000
2/28/2012	4:43:51 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	4:43:51 PM	Tube furnace set to 0
2/28/2012	4:44:52 PM	Helium valve closed
2/28/2012	4:44:52 PM	H2 valve closed
2/28/2012	4:44:52 PM	BCl3 valve closed
2/28/2012	4:44:52 PM	PH3 valve closed
2/28/2012	4:44:52 PM	SiCl4 pre valve closed
2/28/2012	4:44:52 PM	SiCl4 post valve closed
2/28/2012	4:44:52 PM	Bypass valve closed
2/28/2012	4:44:52 PM	Bubbler valve closed
2/28/2012	4:44:52 PM	Main Vac valve opened
2/28/2012	4:44:52 PM	Helium MFC set to  0.000000
2/28/2012	4:44:52 PM	H2 MFC set to  0.000000
2/28/2012	4:44:52 PM	BCl3 MFC set to  0.000000
2/28/2012	4:44:52 PM	PH3 MFC set to  0.000000
2/28/2012	4:44:52 PM	SiCl4 MFC set to  0.000000
2/28/2012	4:44:52 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	4:44:52 PM	Tube furnace set to 0
2/28/2012	4:44:52 PM	Run finished at 4:44 PM
2/28/2012	4:44:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/28/2012	5:05:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/28/2012	5:05:20 PM	Recipe started at 5:05 PM
2/28/2012	5:05:20 PM	Helium valve closed
2/28/2012	5:05:20 PM	H2 valve closed
2/28/2012	5:05:20 PM	BCl3 valve closed
2/28/2012	5:05:20 PM	PH3 valve closed
2/28/2012	5:05:20 PM	SiCl4 pre valve closed
2/28/2012	5:05:20 PM	SiCl4 post valve closed
2/28/2012	5:05:20 PM	Main Vac valve closed
2/28/2012	5:05:20 PM	Bubbler valve closed
2/28/2012	5:05:20 PM	Bypass valve opened
2/28/2012	5:05:20 PM	Helium MFC set to  0.000000
2/28/2012	5:05:20 PM	H2 MFC set to  0.000000
2/28/2012	5:05:20 PM	BCl3 MFC set to  0.000000
2/28/2012	5:05:20 PM	PH3 MFC set to  0.000000
2/28/2012	5:05:20 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:05:20 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:05:20 PM	Tube furnace set to 0
2/28/2012	5:05:20 PM	Helium valve closed
2/28/2012	5:05:20 PM	H2 valve closed
2/28/2012	5:05:20 PM	BCl3 valve closed
2/28/2012	5:05:20 PM	PH3 valve closed
2/28/2012	5:05:20 PM	SiCl4 pre valve closed
2/28/2012	5:05:20 PM	SiCl4 post valve closed
2/28/2012	5:05:20 PM	Main Vac valve closed
2/28/2012	5:05:20 PM	Bubbler valve closed
2/28/2012	5:05:20 PM	Bypass valve opened
2/28/2012	5:05:20 PM	Helium MFC set to  0.000000
2/28/2012	5:05:20 PM	H2 MFC set to  0.000000
2/28/2012	5:05:20 PM	BCl3 MFC set to  0.000000
2/28/2012	5:05:20 PM	PH3 MFC set to  0.000000
2/28/2012	5:05:20 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:05:20 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:05:20 PM	Tube furnace set to 0
2/28/2012	5:05:21 PM	Helium valve closed
2/28/2012	5:05:21 PM	H2 valve closed
2/28/2012	5:05:21 PM	BCl3 valve closed
2/28/2012	5:05:21 PM	PH3 valve closed
2/28/2012	5:05:21 PM	SiCl4 pre valve closed
2/28/2012	5:05:21 PM	SiCl4 post valve closed
2/28/2012	5:05:21 PM	Bypass valve closed
2/28/2012	5:05:21 PM	Bubbler valve closed
2/28/2012	5:05:21 PM	Main Vac valve opened
2/28/2012	5:05:21 PM	Helium MFC set to  0.000000
2/28/2012	5:05:21 PM	H2 MFC set to  0.000000
2/28/2012	5:05:21 PM	BCl3 MFC set to  0.000000
2/28/2012	5:05:21 PM	PH3 MFC set to  0.000000
2/28/2012	5:05:21 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:05:21 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:05:21 PM	Tube furnace set to 0
2/28/2012	5:05:31 PM	H2 valve closed
2/28/2012	5:05:31 PM	BCl3 valve closed
2/28/2012	5:05:31 PM	PH3 valve closed
2/28/2012	5:05:31 PM	SiCl4 pre valve closed
2/28/2012	5:05:31 PM	SiCl4 post valve closed
2/28/2012	5:05:31 PM	Bypass valve closed
2/28/2012	5:05:31 PM	Bubbler valve closed
2/28/2012	5:05:31 PM	Helium valve opened
2/28/2012	5:05:31 PM	Main Vac valve opened
2/28/2012	5:05:31 PM	Helium MFC set to  20.000000
2/28/2012	5:05:31 PM	H2 MFC set to  0.000000
2/28/2012	5:05:31 PM	BCl3 MFC set to  0.000000
2/28/2012	5:05:31 PM	PH3 MFC set to  0.000000
2/28/2012	5:05:31 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:05:31 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:05:31 PM	Tube furnace set to 0
2/28/2012	5:06:01 PM	Helium valve closed
2/28/2012	5:06:01 PM	H2 valve closed
2/28/2012	5:06:01 PM	BCl3 valve closed
2/28/2012	5:06:01 PM	PH3 valve closed
2/28/2012	5:06:01 PM	SiCl4 pre valve closed
2/28/2012	5:06:01 PM	SiCl4 post valve closed
2/28/2012	5:06:01 PM	Bypass valve closed
2/28/2012	5:06:01 PM	Bubbler valve closed
2/28/2012	5:06:01 PM	Main Vac valve opened
2/28/2012	5:06:01 PM	Helium MFC set to  0.000000
2/28/2012	5:06:01 PM	H2 MFC set to  0.000000
2/28/2012	5:06:01 PM	BCl3 MFC set to  0.000000
2/28/2012	5:06:01 PM	PH3 MFC set to  0.000000
2/28/2012	5:06:01 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:06:01 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:06:01 PM	Tube furnace set to 0
2/28/2012	5:06:31 PM	H2 valve closed
2/28/2012	5:06:31 PM	BCl3 valve closed
2/28/2012	5:06:31 PM	PH3 valve closed
2/28/2012	5:06:31 PM	SiCl4 pre valve closed
2/28/2012	5:06:31 PM	SiCl4 post valve closed
2/28/2012	5:06:31 PM	Bypass valve closed
2/28/2012	5:06:31 PM	Bubbler valve closed
2/28/2012	5:06:31 PM	Helium valve opened
2/28/2012	5:06:31 PM	Main Vac valve opened
2/28/2012	5:06:31 PM	Helium MFC set to  20.000000
2/28/2012	5:06:31 PM	H2 MFC set to  0.000000
2/28/2012	5:06:31 PM	BCl3 MFC set to  0.000000
2/28/2012	5:06:31 PM	PH3 MFC set to  0.000000
2/28/2012	5:06:31 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:06:31 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:06:31 PM	Tube furnace set to 0
2/28/2012	5:07:01 PM	Helium valve closed
2/28/2012	5:07:01 PM	H2 valve closed
2/28/2012	5:07:01 PM	BCl3 valve closed
2/28/2012	5:07:01 PM	PH3 valve closed
2/28/2012	5:07:01 PM	SiCl4 pre valve closed
2/28/2012	5:07:01 PM	SiCl4 post valve closed
2/28/2012	5:07:01 PM	Bypass valve closed
2/28/2012	5:07:01 PM	Bubbler valve closed
2/28/2012	5:07:01 PM	Main Vac valve opened
2/28/2012	5:07:01 PM	Helium MFC set to  0.000000
2/28/2012	5:07:01 PM	H2 MFC set to  0.000000
2/28/2012	5:07:01 PM	BCl3 MFC set to  0.000000
2/28/2012	5:07:01 PM	PH3 MFC set to  0.000000
2/28/2012	5:07:01 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:07:01 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:07:01 PM	Tube furnace set to 0
2/28/2012	5:07:31 PM	H2 valve closed
2/28/2012	5:07:31 PM	BCl3 valve closed
2/28/2012	5:07:31 PM	PH3 valve closed
2/28/2012	5:07:31 PM	SiCl4 pre valve closed
2/28/2012	5:07:31 PM	SiCl4 post valve closed
2/28/2012	5:07:31 PM	Bypass valve closed
2/28/2012	5:07:31 PM	Bubbler valve closed
2/28/2012	5:07:31 PM	Helium valve opened
2/28/2012	5:07:31 PM	Main Vac valve opened
2/28/2012	5:07:31 PM	Helium MFC set to  20.000000
2/28/2012	5:07:31 PM	H2 MFC set to  0.000000
2/28/2012	5:07:31 PM	BCl3 MFC set to  0.000000
2/28/2012	5:07:31 PM	PH3 MFC set to  0.000000
2/28/2012	5:07:31 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:07:31 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:07:32 PM	Tube furnace set to 0
2/28/2012	5:08:02 PM	Helium valve closed
2/28/2012	5:08:02 PM	H2 valve closed
2/28/2012	5:08:02 PM	BCl3 valve closed
2/28/2012	5:08:02 PM	PH3 valve closed
2/28/2012	5:08:02 PM	SiCl4 pre valve closed
2/28/2012	5:08:02 PM	SiCl4 post valve closed
2/28/2012	5:08:02 PM	Bypass valve closed
2/28/2012	5:08:02 PM	Bubbler valve closed
2/28/2012	5:08:02 PM	Main Vac valve opened
2/28/2012	5:08:02 PM	Helium MFC set to  0.000000
2/28/2012	5:08:02 PM	H2 MFC set to  0.000000
2/28/2012	5:08:02 PM	BCl3 MFC set to  0.000000
2/28/2012	5:08:02 PM	PH3 MFC set to  0.000000
2/28/2012	5:08:02 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:08:02 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:08:02 PM	Tube furnace set to 0
2/28/2012	5:08:32 PM	H2 valve closed
2/28/2012	5:08:32 PM	BCl3 valve closed
2/28/2012	5:08:32 PM	PH3 valve closed
2/28/2012	5:08:32 PM	SiCl4 pre valve closed
2/28/2012	5:08:32 PM	SiCl4 post valve closed
2/28/2012	5:08:32 PM	Bypass valve closed
2/28/2012	5:08:32 PM	Bubbler valve closed
2/28/2012	5:08:32 PM	Helium valve opened
2/28/2012	5:08:32 PM	Main Vac valve opened
2/28/2012	5:08:32 PM	Helium MFC set to  20.000000
2/28/2012	5:08:32 PM	H2 MFC set to  0.000000
2/28/2012	5:08:32 PM	BCl3 MFC set to  0.000000
2/28/2012	5:08:32 PM	PH3 MFC set to  0.000000
2/28/2012	5:08:32 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:08:32 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:08:32 PM	Tube furnace set to 0
2/28/2012	5:09:02 PM	Helium valve closed
2/28/2012	5:09:02 PM	H2 valve closed
2/28/2012	5:09:02 PM	BCl3 valve closed
2/28/2012	5:09:02 PM	PH3 valve closed
2/28/2012	5:09:02 PM	SiCl4 pre valve closed
2/28/2012	5:09:02 PM	SiCl4 post valve closed
2/28/2012	5:09:02 PM	Bypass valve closed
2/28/2012	5:09:02 PM	Bubbler valve closed
2/28/2012	5:09:02 PM	Main Vac valve opened
2/28/2012	5:09:02 PM	Helium MFC set to  0.000000
2/28/2012	5:09:02 PM	H2 MFC set to  0.000000
2/28/2012	5:09:02 PM	BCl3 MFC set to  0.000000
2/28/2012	5:09:02 PM	PH3 MFC set to  0.000000
2/28/2012	5:09:02 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:09:02 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:09:02 PM	Tube furnace set to 0
2/28/2012	5:09:32 PM	H2 valve closed
2/28/2012	5:09:32 PM	BCl3 valve closed
2/28/2012	5:09:32 PM	PH3 valve closed
2/28/2012	5:09:32 PM	SiCl4 pre valve closed
2/28/2012	5:09:32 PM	SiCl4 post valve closed
2/28/2012	5:09:32 PM	Bypass valve closed
2/28/2012	5:09:32 PM	Bubbler valve closed
2/28/2012	5:09:32 PM	Helium valve opened
2/28/2012	5:09:32 PM	Main Vac valve opened
2/28/2012	5:09:32 PM	Helium MFC set to  20.000000
2/28/2012	5:09:32 PM	H2 MFC set to  0.000000
2/28/2012	5:09:32 PM	BCl3 MFC set to  0.000000
2/28/2012	5:09:32 PM	PH3 MFC set to  0.000000
2/28/2012	5:09:32 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:09:32 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:09:32 PM	Tube furnace set to 0
2/28/2012	5:10:02 PM	Helium valve closed
2/28/2012	5:10:02 PM	H2 valve closed
2/28/2012	5:10:02 PM	BCl3 valve closed
2/28/2012	5:10:02 PM	PH3 valve closed
2/28/2012	5:10:02 PM	SiCl4 pre valve closed
2/28/2012	5:10:02 PM	SiCl4 post valve closed
2/28/2012	5:10:02 PM	Bypass valve closed
2/28/2012	5:10:02 PM	Bubbler valve closed
2/28/2012	5:10:02 PM	Main Vac valve opened
2/28/2012	5:10:02 PM	Helium MFC set to  0.000000
2/28/2012	5:10:02 PM	H2 MFC set to  0.000000
2/28/2012	5:10:02 PM	BCl3 MFC set to  0.000000
2/28/2012	5:10:02 PM	PH3 MFC set to  0.000000
2/28/2012	5:10:02 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:10:02 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:10:03 PM	Tube furnace set to 0
2/28/2012	5:10:33 PM	H2 valve closed
2/28/2012	5:10:33 PM	BCl3 valve closed
2/28/2012	5:10:33 PM	PH3 valve closed
2/28/2012	5:10:33 PM	SiCl4 pre valve closed
2/28/2012	5:10:33 PM	SiCl4 post valve closed
2/28/2012	5:10:33 PM	Bypass valve closed
2/28/2012	5:10:33 PM	Bubbler valve closed
2/28/2012	5:10:33 PM	Helium valve opened
2/28/2012	5:10:33 PM	Main Vac valve opened
2/28/2012	5:10:33 PM	Helium MFC set to  20.000000
2/28/2012	5:10:33 PM	H2 MFC set to  0.000000
2/28/2012	5:10:33 PM	BCl3 MFC set to  0.000000
2/28/2012	5:10:33 PM	PH3 MFC set to  0.000000
2/28/2012	5:10:33 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:10:33 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:10:33 PM	Tube furnace set to 0
2/28/2012	5:11:03 PM	Helium valve closed
2/28/2012	5:11:03 PM	H2 valve closed
2/28/2012	5:11:03 PM	BCl3 valve closed
2/28/2012	5:11:03 PM	PH3 valve closed
2/28/2012	5:11:03 PM	SiCl4 pre valve closed
2/28/2012	5:11:03 PM	SiCl4 post valve closed
2/28/2012	5:11:03 PM	Bypass valve closed
2/28/2012	5:11:03 PM	Bubbler valve closed
2/28/2012	5:11:03 PM	Main Vac valve opened
2/28/2012	5:11:03 PM	Helium MFC set to  0.000000
2/28/2012	5:11:03 PM	H2 MFC set to  0.000000
2/28/2012	5:11:03 PM	BCl3 MFC set to  0.000000
2/28/2012	5:11:03 PM	PH3 MFC set to  0.000000
2/28/2012	5:11:03 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:11:03 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:11:03 PM	Tube furnace set to 0
2/28/2012	5:11:33 PM	H2 valve closed
2/28/2012	5:11:33 PM	BCl3 valve closed
2/28/2012	5:11:33 PM	PH3 valve closed
2/28/2012	5:11:33 PM	SiCl4 pre valve closed
2/28/2012	5:11:33 PM	SiCl4 post valve closed
2/28/2012	5:11:33 PM	Bypass valve closed
2/28/2012	5:11:33 PM	Bubbler valve closed
2/28/2012	5:11:33 PM	Helium valve opened
2/28/2012	5:11:33 PM	Main Vac valve opened
2/28/2012	5:11:33 PM	Helium MFC set to  20.000000
2/28/2012	5:11:33 PM	H2 MFC set to  0.000000
2/28/2012	5:11:33 PM	BCl3 MFC set to  0.000000
2/28/2012	5:11:33 PM	PH3 MFC set to  0.000000
2/28/2012	5:11:33 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:11:33 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:11:33 PM	Tube furnace set to 0
2/28/2012	5:12:03 PM	Helium valve closed
2/28/2012	5:12:03 PM	H2 valve closed
2/28/2012	5:12:03 PM	BCl3 valve closed
2/28/2012	5:12:03 PM	PH3 valve closed
2/28/2012	5:12:03 PM	SiCl4 pre valve closed
2/28/2012	5:12:03 PM	SiCl4 post valve closed
2/28/2012	5:12:03 PM	Bypass valve closed
2/28/2012	5:12:03 PM	Bubbler valve closed
2/28/2012	5:12:03 PM	Main Vac valve opened
2/28/2012	5:12:03 PM	Helium MFC set to  0.000000
2/28/2012	5:12:03 PM	H2 MFC set to  0.000000
2/28/2012	5:12:03 PM	BCl3 MFC set to  0.000000
2/28/2012	5:12:03 PM	PH3 MFC set to  0.000000
2/28/2012	5:12:03 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:12:03 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:12:03 PM	Tube furnace set to 0
2/28/2012	5:12:33 PM	H2 valve closed
2/28/2012	5:12:33 PM	BCl3 valve closed
2/28/2012	5:12:33 PM	PH3 valve closed
2/28/2012	5:12:33 PM	SiCl4 pre valve closed
2/28/2012	5:12:33 PM	SiCl4 post valve closed
2/28/2012	5:12:33 PM	Bypass valve closed
2/28/2012	5:12:33 PM	Bubbler valve closed
2/28/2012	5:12:33 PM	Helium valve opened
2/28/2012	5:12:33 PM	Main Vac valve opened
2/28/2012	5:12:33 PM	Helium MFC set to  20.000000
2/28/2012	5:12:33 PM	H2 MFC set to  0.000000
2/28/2012	5:12:33 PM	BCl3 MFC set to  0.000000
2/28/2012	5:12:33 PM	PH3 MFC set to  0.000000
2/28/2012	5:12:33 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:12:33 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:12:34 PM	Tube furnace set to 0
2/28/2012	5:13:04 PM	Helium valve closed
2/28/2012	5:13:04 PM	H2 valve closed
2/28/2012	5:13:04 PM	BCl3 valve closed
2/28/2012	5:13:04 PM	PH3 valve closed
2/28/2012	5:13:04 PM	SiCl4 pre valve closed
2/28/2012	5:13:04 PM	SiCl4 post valve closed
2/28/2012	5:13:04 PM	Bypass valve closed
2/28/2012	5:13:04 PM	Bubbler valve closed
2/28/2012	5:13:04 PM	Main Vac valve opened
2/28/2012	5:13:04 PM	Helium MFC set to  0.000000
2/28/2012	5:13:04 PM	H2 MFC set to  0.000000
2/28/2012	5:13:04 PM	BCl3 MFC set to  0.000000
2/28/2012	5:13:04 PM	PH3 MFC set to  0.000000
2/28/2012	5:13:04 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:13:04 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:13:04 PM	Tube furnace set to 0
2/28/2012	5:13:34 PM	H2 valve closed
2/28/2012	5:13:34 PM	BCl3 valve closed
2/28/2012	5:13:34 PM	PH3 valve closed
2/28/2012	5:13:34 PM	SiCl4 pre valve closed
2/28/2012	5:13:34 PM	SiCl4 post valve closed
2/28/2012	5:13:34 PM	Bypass valve closed
2/28/2012	5:13:34 PM	Bubbler valve closed
2/28/2012	5:13:34 PM	Helium valve opened
2/28/2012	5:13:34 PM	Main Vac valve opened
2/28/2012	5:13:34 PM	Helium MFC set to  20.000000
2/28/2012	5:13:34 PM	H2 MFC set to  0.000000
2/28/2012	5:13:34 PM	BCl3 MFC set to  0.000000
2/28/2012	5:13:34 PM	PH3 MFC set to  0.000000
2/28/2012	5:13:34 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:13:34 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:13:34 PM	Tube furnace set to 0
2/28/2012	5:14:04 PM	Helium valve closed
2/28/2012	5:14:04 PM	H2 valve closed
2/28/2012	5:14:04 PM	BCl3 valve closed
2/28/2012	5:14:04 PM	PH3 valve closed
2/28/2012	5:14:04 PM	SiCl4 pre valve closed
2/28/2012	5:14:04 PM	SiCl4 post valve closed
2/28/2012	5:14:04 PM	Bypass valve closed
2/28/2012	5:14:04 PM	Bubbler valve closed
2/28/2012	5:14:04 PM	Main Vac valve opened
2/28/2012	5:14:04 PM	Helium MFC set to  0.000000
2/28/2012	5:14:04 PM	H2 MFC set to  0.000000
2/28/2012	5:14:04 PM	BCl3 MFC set to  0.000000
2/28/2012	5:14:04 PM	PH3 MFC set to  0.000000
2/28/2012	5:14:04 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:14:04 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:14:04 PM	Tube furnace set to 0
2/28/2012	5:14:34 PM	H2 valve closed
2/28/2012	5:14:34 PM	BCl3 valve closed
2/28/2012	5:14:34 PM	PH3 valve closed
2/28/2012	5:14:34 PM	SiCl4 pre valve closed
2/28/2012	5:14:34 PM	SiCl4 post valve closed
2/28/2012	5:14:34 PM	Bypass valve closed
2/28/2012	5:14:34 PM	Bubbler valve closed
2/28/2012	5:14:34 PM	Helium valve opened
2/28/2012	5:14:34 PM	Main Vac valve opened
2/28/2012	5:14:34 PM	Helium MFC set to  20.000000
2/28/2012	5:14:34 PM	H2 MFC set to  0.000000
2/28/2012	5:14:34 PM	BCl3 MFC set to  0.000000
2/28/2012	5:14:34 PM	PH3 MFC set to  0.000000
2/28/2012	5:14:34 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:14:34 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:14:34 PM	Tube furnace set to 0
2/28/2012	5:15:05 PM	Helium valve closed
2/28/2012	5:15:05 PM	H2 valve closed
2/28/2012	5:15:05 PM	BCl3 valve closed
2/28/2012	5:15:05 PM	PH3 valve closed
2/28/2012	5:15:05 PM	SiCl4 pre valve closed
2/28/2012	5:15:05 PM	SiCl4 post valve closed
2/28/2012	5:15:05 PM	Bypass valve closed
2/28/2012	5:15:05 PM	Bubbler valve closed
2/28/2012	5:15:05 PM	Main Vac valve opened
2/28/2012	5:15:05 PM	Helium MFC set to  0.000000
2/28/2012	5:15:05 PM	H2 MFC set to  0.000000
2/28/2012	5:15:05 PM	BCl3 MFC set to  0.000000
2/28/2012	5:15:05 PM	PH3 MFC set to  0.000000
2/28/2012	5:15:05 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:15:05 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:15:05 PM	Tube furnace set to 0
2/28/2012	5:15:06 PM	Run finished at 5:15 PM
2/28/2012	5:15:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/28/2012	5:16:38 PM	Main Vac valve closed
2/28/2012	5:16:47 PM	Main Vac valve opened
2/28/2012	5:27:16 PM	Main Vac valve closed
2/28/2012	5:27:26 PM	Main Vac valve opened
2/28/2012	5:29:40 PM	Main Vac valve closed
2/28/2012	5:29:51 PM	Main Vac valve opened
2/28/2012	5:31:25 PM	Main Vac valve closed
2/28/2012	5:31:41 PM	Main Vac valve opened
2/28/2012	5:38:40 PM	Main Vac valve closed
2/28/2012	5:38:53 PM	Main Vac valve opened
2/28/2012	5:40:08 PM	Recipe started at 5:40 PM
2/28/2012	5:40:08 PM	Helium valve closed
2/28/2012	5:40:08 PM	H2 valve closed
2/28/2012	5:40:08 PM	BCl3 valve closed
2/28/2012	5:40:08 PM	PH3 valve closed
2/28/2012	5:40:08 PM	SiCl4 pre valve closed
2/28/2012	5:40:08 PM	SiCl4 post valve closed
2/28/2012	5:40:08 PM	Main Vac valve closed
2/28/2012	5:40:08 PM	Bypass valve closed
2/28/2012	5:40:08 PM	Bubbler valve closed
2/28/2012	5:40:08 PM	Helium MFC set to  0.000000
2/28/2012	5:40:08 PM	H2 MFC set to  0.000000
2/28/2012	5:40:08 PM	BCl3 MFC set to  0.000000
2/28/2012	5:40:08 PM	PH3 MFC set to  0.000000
2/28/2012	5:40:08 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:40:08 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:40:09 PM	Tube furnace set to 0
2/28/2012	5:40:12 PM	Helium valve closed
2/28/2012	5:40:12 PM	BCl3 valve closed
2/28/2012	5:40:12 PM	PH3 valve closed
2/28/2012	5:40:12 PM	SiCl4 pre valve closed
2/28/2012	5:40:12 PM	SiCl4 post valve closed
2/28/2012	5:40:12 PM	Main Vac valve closed
2/28/2012	5:40:12 PM	Bypass valve closed
2/28/2012	5:40:12 PM	Bubbler valve closed
2/28/2012	5:40:12 PM	H2 valve opened
2/28/2012	5:40:12 PM	Helium MFC set to  0.000000
2/28/2012	5:40:12 PM	H2 MFC set to  500.000000
2/28/2012	5:40:12 PM	BCl3 MFC set to  0.000000
2/28/2012	5:40:12 PM	PH3 MFC set to  0.000000
2/28/2012	5:40:12 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:40:12 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:40:12 PM	Tube furnace set to 0
2/28/2012	5:41:17 PM	Helium valve closed
2/28/2012	5:41:17 PM	BCl3 valve closed
2/28/2012	5:41:17 PM	PH3 valve closed
2/28/2012	5:41:17 PM	SiCl4 pre valve closed
2/28/2012	5:41:17 PM	SiCl4 post valve closed
2/28/2012	5:41:17 PM	Main Vac valve closed
2/28/2012	5:41:17 PM	Bypass valve closed
2/28/2012	5:41:17 PM	H2 valve opened
2/28/2012	5:41:17 PM	Bubbler valve opened
2/28/2012	5:41:17 PM	Helium MFC set to  0.000000
2/28/2012	5:41:17 PM	H2 MFC set to  500.000000
2/28/2012	5:41:17 PM	BCl3 MFC set to  0.000000
2/28/2012	5:41:17 PM	PH3 MFC set to  0.000000
2/28/2012	5:41:17 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:41:17 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:41:17 PM	Tube furnace set to 0
2/28/2012	5:41:18 PM	Helium valve closed
2/28/2012	5:41:19 PM	BCl3 valve closed
2/28/2012	5:41:19 PM	PH3 valve closed
2/28/2012	5:41:19 PM	SiCl4 pre valve closed
2/28/2012	5:41:19 PM	SiCl4 post valve closed
2/28/2012	5:41:19 PM	Main Vac valve closed
2/28/2012	5:41:19 PM	Bypass valve closed
2/28/2012	5:41:19 PM	H2 valve opened
2/28/2012	5:41:19 PM	Bubbler valve opened
2/28/2012	5:41:19 PM	Helium MFC set to  0.000000
2/28/2012	5:41:19 PM	H2 MFC set to  500.000000
2/28/2012	5:41:19 PM	BCl3 MFC set to  0.000000
2/28/2012	5:41:19 PM	PH3 MFC set to  0.000000
2/28/2012	5:41:19 PM	SiCl4 MFC set to  0.000000
2/28/2012	5:41:19 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	5:41:19 PM	Tube furnace set to 1000
2/28/2012	6:01:19 PM	Helium valve closed
2/28/2012	6:01:19 PM	BCl3 valve closed
2/28/2012	6:01:19 PM	Main Vac valve closed
2/28/2012	6:01:19 PM	Bypass valve closed
2/28/2012	6:01:19 PM	H2 valve opened
2/28/2012	6:01:19 PM	PH3 valve opened
2/28/2012	6:01:19 PM	SiCl4 pre valve opened
2/28/2012	6:01:19 PM	SiCl4 post valve opened
2/28/2012	6:01:19 PM	Bubbler valve opened
2/28/2012	6:01:19 PM	Helium MFC set to  0.000000
2/28/2012	6:01:19 PM	H2 MFC set to  500.000000
2/28/2012	6:01:19 PM	BCl3 MFC set to  0.000000
2/28/2012	6:01:19 PM	PH3 MFC set to  0.300000
2/28/2012	6:01:19 PM	SiCl4 MFC set to  25.000000
2/28/2012	6:01:19 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	6:01:19 PM	Tube furnace set to 1000
2/28/2012	6:10:19 PM	Helium valve closed
2/28/2012	6:10:19 PM	BCl3 valve closed
2/28/2012	6:10:19 PM	PH3 valve closed
2/28/2012	6:10:19 PM	SiCl4 pre valve closed
2/28/2012	6:10:19 PM	SiCl4 post valve closed
2/28/2012	6:10:19 PM	Main Vac valve closed
2/28/2012	6:10:19 PM	Bypass valve closed
2/28/2012	6:10:19 PM	H2 valve opened
2/28/2012	6:10:19 PM	Bubbler valve opened
2/28/2012	6:10:19 PM	Helium MFC set to  0.000000
2/28/2012	6:10:19 PM	H2 MFC set to  500.000000
2/28/2012	6:10:19 PM	BCl3 MFC set to  0.000000
2/28/2012	6:10:19 PM	PH3 MFC set to  0.000000
2/28/2012	6:10:19 PM	SiCl4 MFC set to  0.000000
2/28/2012	6:10:19 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	6:10:19 PM	Tube furnace set to 750
2/28/2012	6:15:19 PM	H2 valve closed
2/28/2012	6:15:19 PM	BCl3 valve closed
2/28/2012	6:15:19 PM	PH3 valve closed
2/28/2012	6:15:19 PM	SiCl4 pre valve closed
2/28/2012	6:15:19 PM	SiCl4 post valve closed
2/28/2012	6:15:19 PM	Main Vac valve closed
2/28/2012	6:15:19 PM	Bypass valve closed
2/28/2012	6:15:19 PM	Helium valve opened
2/28/2012	6:15:19 PM	Bubbler valve opened
2/28/2012	6:15:19 PM	Helium MFC set to  500.000000
2/28/2012	6:15:19 PM	H2 MFC set to  0.000000
2/28/2012	6:15:19 PM	BCl3 MFC set to  0.000000
2/28/2012	6:15:19 PM	PH3 MFC set to  0.000000
2/28/2012	6:15:19 PM	SiCl4 MFC set to  0.000000
2/28/2012	6:15:19 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	6:15:19 PM	Tube furnace set to 0
2/28/2012	6:35:19 PM	Helium valve closed
2/28/2012	6:35:19 PM	H2 valve closed
2/28/2012	6:35:19 PM	BCl3 valve closed
2/28/2012	6:35:19 PM	PH3 valve closed
2/28/2012	6:35:19 PM	SiCl4 pre valve closed
2/28/2012	6:35:19 PM	SiCl4 post valve closed
2/28/2012	6:35:19 PM	Main Vac valve closed
2/28/2012	6:35:19 PM	Bypass valve closed
2/28/2012	6:35:19 PM	Bubbler valve closed
2/28/2012	6:35:19 PM	Helium MFC set to  0.000000
2/28/2012	6:35:19 PM	H2 MFC set to  0.000000
2/28/2012	6:35:19 PM	BCl3 MFC set to  0.000000
2/28/2012	6:35:19 PM	PH3 MFC set to  0.000000
2/28/2012	6:35:19 PM	SiCl4 MFC set to  0.000000
2/28/2012	6:35:19 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	6:35:20 PM	Tube furnace set to 0
2/28/2012	6:35:21 PM	Run finished at 6:35 PM
2/28/2012	7:08:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/28/2012	7:08:09 PM	Recipe started at 7:08 PM
2/28/2012	7:08:09 PM	Helium valve closed
2/28/2012	7:08:09 PM	H2 valve closed
2/28/2012	7:08:09 PM	BCl3 valve closed
2/28/2012	7:08:09 PM	PH3 valve closed
2/28/2012	7:08:09 PM	SiCl4 pre valve closed
2/28/2012	7:08:09 PM	SiCl4 post valve closed
2/28/2012	7:08:09 PM	Main Vac valve closed
2/28/2012	7:08:09 PM	Bypass valve closed
2/28/2012	7:08:09 PM	Bubbler valve closed
2/28/2012	7:08:09 PM	Helium MFC set to  0.000000
2/28/2012	7:08:09 PM	H2 MFC set to  0.000000
2/28/2012	7:08:09 PM	BCl3 MFC set to  0.000000
2/28/2012	7:08:09 PM	PH3 MFC set to  0.000000
2/28/2012	7:08:09 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:08:09 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:08:09 PM	Tube furnace set to 0
2/28/2012	7:08:12 PM	H2 valve closed
2/28/2012	7:08:12 PM	BCl3 valve closed
2/28/2012	7:08:12 PM	PH3 valve closed
2/28/2012	7:08:12 PM	SiCl4 pre valve closed
2/28/2012	7:08:12 PM	SiCl4 post valve closed
2/28/2012	7:08:12 PM	Main Vac valve closed
2/28/2012	7:08:12 PM	Bypass valve closed
2/28/2012	7:08:12 PM	Bubbler valve closed
2/28/2012	7:08:12 PM	Helium valve opened
2/28/2012	7:08:12 PM	Helium MFC set to  500.000000
2/28/2012	7:08:12 PM	H2 MFC set to  0.000000
2/28/2012	7:08:12 PM	BCl3 MFC set to  0.000000
2/28/2012	7:08:12 PM	PH3 MFC set to  0.000000
2/28/2012	7:08:12 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:08:12 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:08:13 PM	Tube furnace set to 0
2/28/2012	7:08:15 PM	Helium valve closed
2/28/2012	7:08:15 PM	H2 valve closed
2/28/2012	7:08:15 PM	BCl3 valve closed
2/28/2012	7:08:15 PM	PH3 valve closed
2/28/2012	7:08:15 PM	SiCl4 pre valve closed
2/28/2012	7:08:15 PM	SiCl4 post valve closed
2/28/2012	7:08:15 PM	Main Vac valve closed
2/28/2012	7:08:15 PM	Bypass valve closed
2/28/2012	7:08:15 PM	Bubbler valve closed
2/28/2012	7:08:15 PM	Helium MFC set to  0.000000
2/28/2012	7:08:15 PM	H2 MFC set to  0.000000
2/28/2012	7:08:15 PM	BCl3 MFC set to  0.000000
2/28/2012	7:08:15 PM	PH3 MFC set to  0.000000
2/28/2012	7:08:15 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:08:15 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:08:15 PM	Tube furnace set to 0
2/28/2012	7:08:16 PM	Run finished at 7:08 PM
2/28/2012	7:08:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/28/2012	7:11:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/28/2012	7:11:25 PM	Recipe started at 7:11 PM
2/28/2012	7:11:25 PM	Helium valve closed
2/28/2012	7:11:25 PM	H2 valve closed
2/28/2012	7:11:25 PM	BCl3 valve closed
2/28/2012	7:11:25 PM	PH3 valve closed
2/28/2012	7:11:25 PM	SiCl4 pre valve closed
2/28/2012	7:11:25 PM	SiCl4 post valve closed
2/28/2012	7:11:25 PM	Main Vac valve closed
2/28/2012	7:11:25 PM	Bubbler valve closed
2/28/2012	7:11:25 PM	Bypass valve opened
2/28/2012	7:11:25 PM	Helium MFC set to  0.000000
2/28/2012	7:11:25 PM	H2 MFC set to  0.000000
2/28/2012	7:11:25 PM	BCl3 MFC set to  0.000000
2/28/2012	7:11:25 PM	PH3 MFC set to  0.000000
2/28/2012	7:11:25 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:11:25 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:11:25 PM	Tube furnace set to 0
2/28/2012	7:12:24 PM	Helium valve closed
2/28/2012	7:12:24 PM	H2 valve closed
2/28/2012	7:12:24 PM	BCl3 valve closed
2/28/2012	7:12:24 PM	PH3 valve closed
2/28/2012	7:12:24 PM	SiCl4 pre valve closed
2/28/2012	7:12:24 PM	SiCl4 post valve closed
2/28/2012	7:12:24 PM	Main Vac valve closed
2/28/2012	7:12:24 PM	Bubbler valve closed
2/28/2012	7:12:24 PM	Bypass valve opened
2/28/2012	7:12:24 PM	Helium MFC set to  0.000000
2/28/2012	7:12:24 PM	H2 MFC set to  0.000000
2/28/2012	7:12:24 PM	BCl3 MFC set to  0.000000
2/28/2012	7:12:24 PM	PH3 MFC set to  0.000000
2/28/2012	7:12:24 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:12:24 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:12:24 PM	Tube furnace set to 0
2/28/2012	7:13:24 PM	Helium valve closed
2/28/2012	7:13:24 PM	H2 valve closed
2/28/2012	7:13:24 PM	BCl3 valve closed
2/28/2012	7:13:24 PM	PH3 valve closed
2/28/2012	7:13:24 PM	SiCl4 pre valve closed
2/28/2012	7:13:24 PM	SiCl4 post valve closed
2/28/2012	7:13:24 PM	Bypass valve closed
2/28/2012	7:13:24 PM	Bubbler valve closed
2/28/2012	7:13:24 PM	Main Vac valve opened
2/28/2012	7:13:24 PM	Helium MFC set to  0.000000
2/28/2012	7:13:24 PM	H2 MFC set to  0.000000
2/28/2012	7:13:24 PM	BCl3 MFC set to  0.000000
2/28/2012	7:13:24 PM	PH3 MFC set to  0.000000
2/28/2012	7:13:24 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:13:24 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:13:24 PM	Tube furnace set to 0
2/28/2012	7:13:25 PM	Run finished at 7:13 PM
2/28/2012	7:13:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/28/2012	7:26:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/28/2012	7:26:48 PM	Recipe started at 7:26 PM
2/28/2012	7:26:48 PM	Helium valve closed
2/28/2012	7:26:48 PM	H2 valve closed
2/28/2012	7:26:48 PM	BCl3 valve closed
2/28/2012	7:26:48 PM	PH3 valve closed
2/28/2012	7:26:48 PM	SiCl4 pre valve closed
2/28/2012	7:26:48 PM	SiCl4 post valve closed
2/28/2012	7:26:48 PM	Main Vac valve closed
2/28/2012	7:26:48 PM	Bubbler valve closed
2/28/2012	7:26:48 PM	Bypass valve opened
2/28/2012	7:26:48 PM	Helium MFC set to  0.000000
2/28/2012	7:26:48 PM	H2 MFC set to  0.000000
2/28/2012	7:26:48 PM	BCl3 MFC set to  0.000000
2/28/2012	7:26:48 PM	PH3 MFC set to  0.000000
2/28/2012	7:26:48 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:26:48 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:26:48 PM	Tube furnace set to 0
2/28/2012	7:26:48 PM	Helium valve closed
2/28/2012	7:26:48 PM	H2 valve closed
2/28/2012	7:26:48 PM	BCl3 valve closed
2/28/2012	7:26:48 PM	PH3 valve closed
2/28/2012	7:26:48 PM	SiCl4 pre valve closed
2/28/2012	7:26:48 PM	SiCl4 post valve closed
2/28/2012	7:26:48 PM	Main Vac valve closed
2/28/2012	7:26:48 PM	Bubbler valve closed
2/28/2012	7:26:48 PM	Bypass valve opened
2/28/2012	7:26:48 PM	Helium MFC set to  0.000000
2/28/2012	7:26:48 PM	H2 MFC set to  0.000000
2/28/2012	7:26:48 PM	BCl3 MFC set to  0.000000
2/28/2012	7:26:48 PM	PH3 MFC set to  0.000000
2/28/2012	7:26:48 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:26:48 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:26:49 PM	Tube furnace set to 0
2/28/2012	7:26:49 PM	Helium valve closed
2/28/2012	7:26:49 PM	H2 valve closed
2/28/2012	7:26:49 PM	BCl3 valve closed
2/28/2012	7:26:49 PM	PH3 valve closed
2/28/2012	7:26:49 PM	SiCl4 pre valve closed
2/28/2012	7:26:49 PM	SiCl4 post valve closed
2/28/2012	7:26:49 PM	Bypass valve closed
2/28/2012	7:26:49 PM	Bubbler valve closed
2/28/2012	7:26:49 PM	Main Vac valve opened
2/28/2012	7:26:49 PM	Helium MFC set to  0.000000
2/28/2012	7:26:49 PM	H2 MFC set to  0.000000
2/28/2012	7:26:49 PM	BCl3 MFC set to  0.000000
2/28/2012	7:26:49 PM	PH3 MFC set to  0.000000
2/28/2012	7:26:49 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:26:49 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:26:49 PM	Tube furnace set to 0
2/28/2012	7:27:19 PM	H2 valve closed
2/28/2012	7:27:19 PM	BCl3 valve closed
2/28/2012	7:27:19 PM	PH3 valve closed
2/28/2012	7:27:19 PM	SiCl4 pre valve closed
2/28/2012	7:27:19 PM	SiCl4 post valve closed
2/28/2012	7:27:19 PM	Bypass valve closed
2/28/2012	7:27:19 PM	Bubbler valve closed
2/28/2012	7:27:19 PM	Helium valve opened
2/28/2012	7:27:19 PM	Main Vac valve opened
2/28/2012	7:27:19 PM	Helium MFC set to  20.000000
2/28/2012	7:27:19 PM	H2 MFC set to  0.000000
2/28/2012	7:27:19 PM	BCl3 MFC set to  0.000000
2/28/2012	7:27:19 PM	PH3 MFC set to  0.000000
2/28/2012	7:27:19 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:27:19 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:27:19 PM	Tube furnace set to 0
2/28/2012	7:27:49 PM	Helium valve closed
2/28/2012	7:27:49 PM	H2 valve closed
2/28/2012	7:27:49 PM	BCl3 valve closed
2/28/2012	7:27:49 PM	PH3 valve closed
2/28/2012	7:27:49 PM	SiCl4 pre valve closed
2/28/2012	7:27:49 PM	SiCl4 post valve closed
2/28/2012	7:27:49 PM	Bypass valve closed
2/28/2012	7:27:49 PM	Bubbler valve closed
2/28/2012	7:27:49 PM	Main Vac valve opened
2/28/2012	7:27:49 PM	Helium MFC set to  0.000000
2/28/2012	7:27:49 PM	H2 MFC set to  0.000000
2/28/2012	7:27:49 PM	BCl3 MFC set to  0.000000
2/28/2012	7:27:49 PM	PH3 MFC set to  0.000000
2/28/2012	7:27:49 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:27:49 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:27:50 PM	Tube furnace set to 0
2/28/2012	7:28:20 PM	H2 valve closed
2/28/2012	7:28:20 PM	BCl3 valve closed
2/28/2012	7:28:20 PM	PH3 valve closed
2/28/2012	7:28:20 PM	SiCl4 pre valve closed
2/28/2012	7:28:20 PM	SiCl4 post valve closed
2/28/2012	7:28:20 PM	Bypass valve closed
2/28/2012	7:28:20 PM	Bubbler valve closed
2/28/2012	7:28:20 PM	Helium valve opened
2/28/2012	7:28:20 PM	Main Vac valve opened
2/28/2012	7:28:20 PM	Helium MFC set to  20.000000
2/28/2012	7:28:20 PM	H2 MFC set to  0.000000
2/28/2012	7:28:20 PM	BCl3 MFC set to  0.000000
2/28/2012	7:28:20 PM	PH3 MFC set to  0.000000
2/28/2012	7:28:20 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:28:20 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:28:20 PM	Tube furnace set to 0
2/28/2012	7:28:50 PM	Helium valve closed
2/28/2012	7:28:50 PM	H2 valve closed
2/28/2012	7:28:50 PM	BCl3 valve closed
2/28/2012	7:28:50 PM	PH3 valve closed
2/28/2012	7:28:50 PM	SiCl4 pre valve closed
2/28/2012	7:28:50 PM	SiCl4 post valve closed
2/28/2012	7:28:50 PM	Bypass valve closed
2/28/2012	7:28:50 PM	Bubbler valve closed
2/28/2012	7:28:50 PM	Main Vac valve opened
2/28/2012	7:28:50 PM	Helium MFC set to  0.000000
2/28/2012	7:28:50 PM	H2 MFC set to  0.000000
2/28/2012	7:28:50 PM	BCl3 MFC set to  0.000000
2/28/2012	7:28:50 PM	PH3 MFC set to  0.000000
2/28/2012	7:28:50 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:28:50 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:28:50 PM	Tube furnace set to 0
2/28/2012	7:29:20 PM	H2 valve closed
2/28/2012	7:29:20 PM	BCl3 valve closed
2/28/2012	7:29:20 PM	PH3 valve closed
2/28/2012	7:29:20 PM	SiCl4 pre valve closed
2/28/2012	7:29:20 PM	SiCl4 post valve closed
2/28/2012	7:29:20 PM	Bypass valve closed
2/28/2012	7:29:20 PM	Bubbler valve closed
2/28/2012	7:29:20 PM	Helium valve opened
2/28/2012	7:29:20 PM	Main Vac valve opened
2/28/2012	7:29:20 PM	Helium MFC set to  20.000000
2/28/2012	7:29:20 PM	H2 MFC set to  0.000000
2/28/2012	7:29:20 PM	BCl3 MFC set to  0.000000
2/28/2012	7:29:20 PM	PH3 MFC set to  0.000000
2/28/2012	7:29:20 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:29:20 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:29:20 PM	Tube furnace set to 0
2/28/2012	7:29:50 PM	Helium valve closed
2/28/2012	7:29:50 PM	H2 valve closed
2/28/2012	7:29:50 PM	BCl3 valve closed
2/28/2012	7:29:50 PM	PH3 valve closed
2/28/2012	7:29:50 PM	SiCl4 pre valve closed
2/28/2012	7:29:50 PM	SiCl4 post valve closed
2/28/2012	7:29:50 PM	Bypass valve closed
2/28/2012	7:29:50 PM	Bubbler valve closed
2/28/2012	7:29:50 PM	Main Vac valve opened
2/28/2012	7:29:50 PM	Helium MFC set to  0.000000
2/28/2012	7:29:50 PM	H2 MFC set to  0.000000
2/28/2012	7:29:50 PM	BCl3 MFC set to  0.000000
2/28/2012	7:29:50 PM	PH3 MFC set to  0.000000
2/28/2012	7:29:50 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:29:50 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:29:50 PM	Tube furnace set to 0
2/28/2012	7:30:20 PM	H2 valve closed
2/28/2012	7:30:20 PM	BCl3 valve closed
2/28/2012	7:30:20 PM	PH3 valve closed
2/28/2012	7:30:20 PM	SiCl4 pre valve closed
2/28/2012	7:30:20 PM	SiCl4 post valve closed
2/28/2012	7:30:20 PM	Bypass valve closed
2/28/2012	7:30:20 PM	Bubbler valve closed
2/28/2012	7:30:21 PM	Helium valve opened
2/28/2012	7:30:21 PM	Main Vac valve opened
2/28/2012	7:30:21 PM	Helium MFC set to  20.000000
2/28/2012	7:30:21 PM	H2 MFC set to  0.000000
2/28/2012	7:30:21 PM	BCl3 MFC set to  0.000000
2/28/2012	7:30:21 PM	PH3 MFC set to  0.000000
2/28/2012	7:30:21 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:30:21 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:30:21 PM	Tube furnace set to 0
2/28/2012	7:30:51 PM	Helium valve closed
2/28/2012	7:30:51 PM	H2 valve closed
2/28/2012	7:30:51 PM	BCl3 valve closed
2/28/2012	7:30:51 PM	PH3 valve closed
2/28/2012	7:30:51 PM	SiCl4 pre valve closed
2/28/2012	7:30:51 PM	SiCl4 post valve closed
2/28/2012	7:30:51 PM	Bypass valve closed
2/28/2012	7:30:51 PM	Bubbler valve closed
2/28/2012	7:30:51 PM	Main Vac valve opened
2/28/2012	7:30:51 PM	Helium MFC set to  0.000000
2/28/2012	7:30:51 PM	H2 MFC set to  0.000000
2/28/2012	7:30:51 PM	BCl3 MFC set to  0.000000
2/28/2012	7:30:51 PM	PH3 MFC set to  0.000000
2/28/2012	7:30:51 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:30:51 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:30:51 PM	Tube furnace set to 0
2/28/2012	7:31:21 PM	H2 valve closed
2/28/2012	7:31:21 PM	BCl3 valve closed
2/28/2012	7:31:21 PM	PH3 valve closed
2/28/2012	7:31:21 PM	SiCl4 pre valve closed
2/28/2012	7:31:21 PM	SiCl4 post valve closed
2/28/2012	7:31:21 PM	Bypass valve closed
2/28/2012	7:31:21 PM	Bubbler valve closed
2/28/2012	7:31:21 PM	Helium valve opened
2/28/2012	7:31:21 PM	Main Vac valve opened
2/28/2012	7:31:21 PM	Helium MFC set to  20.000000
2/28/2012	7:31:21 PM	H2 MFC set to  0.000000
2/28/2012	7:31:21 PM	BCl3 MFC set to  0.000000
2/28/2012	7:31:21 PM	PH3 MFC set to  0.000000
2/28/2012	7:31:21 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:31:21 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:31:21 PM	Tube furnace set to 0
2/28/2012	7:31:51 PM	Helium valve closed
2/28/2012	7:31:51 PM	H2 valve closed
2/28/2012	7:31:51 PM	BCl3 valve closed
2/28/2012	7:31:51 PM	PH3 valve closed
2/28/2012	7:31:51 PM	SiCl4 pre valve closed
2/28/2012	7:31:51 PM	SiCl4 post valve closed
2/28/2012	7:31:51 PM	Bypass valve closed
2/28/2012	7:31:51 PM	Bubbler valve closed
2/28/2012	7:31:51 PM	Main Vac valve opened
2/28/2012	7:31:51 PM	Helium MFC set to  0.000000
2/28/2012	7:31:51 PM	H2 MFC set to  0.000000
2/28/2012	7:31:51 PM	BCl3 MFC set to  0.000000
2/28/2012	7:31:51 PM	PH3 MFC set to  0.000000
2/28/2012	7:31:51 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:31:51 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:31:51 PM	Tube furnace set to 0
2/28/2012	7:32:21 PM	H2 valve closed
2/28/2012	7:32:21 PM	BCl3 valve closed
2/28/2012	7:32:21 PM	PH3 valve closed
2/28/2012	7:32:21 PM	SiCl4 pre valve closed
2/28/2012	7:32:21 PM	SiCl4 post valve closed
2/28/2012	7:32:21 PM	Bypass valve closed
2/28/2012	7:32:21 PM	Bubbler valve closed
2/28/2012	7:32:21 PM	Helium valve opened
2/28/2012	7:32:21 PM	Main Vac valve opened
2/28/2012	7:32:21 PM	Helium MFC set to  20.000000
2/28/2012	7:32:21 PM	H2 MFC set to  0.000000
2/28/2012	7:32:21 PM	BCl3 MFC set to  0.000000
2/28/2012	7:32:21 PM	PH3 MFC set to  0.000000
2/28/2012	7:32:21 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:32:21 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:32:21 PM	Tube furnace set to 0
2/28/2012	7:32:52 PM	Helium valve closed
2/28/2012	7:32:52 PM	H2 valve closed
2/28/2012	7:32:52 PM	BCl3 valve closed
2/28/2012	7:32:52 PM	PH3 valve closed
2/28/2012	7:32:52 PM	SiCl4 pre valve closed
2/28/2012	7:32:52 PM	SiCl4 post valve closed
2/28/2012	7:32:52 PM	Bypass valve closed
2/28/2012	7:32:52 PM	Bubbler valve closed
2/28/2012	7:32:52 PM	Main Vac valve opened
2/28/2012	7:32:52 PM	Helium MFC set to  0.000000
2/28/2012	7:32:52 PM	H2 MFC set to  0.000000
2/28/2012	7:32:52 PM	BCl3 MFC set to  0.000000
2/28/2012	7:32:52 PM	PH3 MFC set to  0.000000
2/28/2012	7:32:52 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:32:52 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:32:52 PM	Tube furnace set to 0
2/28/2012	7:33:22 PM	H2 valve closed
2/28/2012	7:33:22 PM	BCl3 valve closed
2/28/2012	7:33:22 PM	PH3 valve closed
2/28/2012	7:33:22 PM	SiCl4 pre valve closed
2/28/2012	7:33:22 PM	SiCl4 post valve closed
2/28/2012	7:33:22 PM	Bypass valve closed
2/28/2012	7:33:22 PM	Bubbler valve closed
2/28/2012	7:33:22 PM	Helium valve opened
2/28/2012	7:33:22 PM	Main Vac valve opened
2/28/2012	7:33:22 PM	Helium MFC set to  20.000000
2/28/2012	7:33:22 PM	H2 MFC set to  0.000000
2/28/2012	7:33:22 PM	BCl3 MFC set to  0.000000
2/28/2012	7:33:22 PM	PH3 MFC set to  0.000000
2/28/2012	7:33:22 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:33:22 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:33:22 PM	Tube furnace set to 0
2/28/2012	7:33:52 PM	Helium valve closed
2/28/2012	7:33:52 PM	H2 valve closed
2/28/2012	7:33:52 PM	BCl3 valve closed
2/28/2012	7:33:52 PM	PH3 valve closed
2/28/2012	7:33:52 PM	SiCl4 pre valve closed
2/28/2012	7:33:52 PM	SiCl4 post valve closed
2/28/2012	7:33:52 PM	Bypass valve closed
2/28/2012	7:33:52 PM	Bubbler valve closed
2/28/2012	7:33:52 PM	Main Vac valve opened
2/28/2012	7:33:52 PM	Helium MFC set to  0.000000
2/28/2012	7:33:52 PM	H2 MFC set to  0.000000
2/28/2012	7:33:52 PM	BCl3 MFC set to  0.000000
2/28/2012	7:33:52 PM	PH3 MFC set to  0.000000
2/28/2012	7:33:52 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:33:52 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:33:52 PM	Tube furnace set to 0
2/28/2012	7:34:22 PM	H2 valve closed
2/28/2012	7:34:22 PM	BCl3 valve closed
2/28/2012	7:34:22 PM	PH3 valve closed
2/28/2012	7:34:22 PM	SiCl4 pre valve closed
2/28/2012	7:34:22 PM	SiCl4 post valve closed
2/28/2012	7:34:22 PM	Bypass valve closed
2/28/2012	7:34:22 PM	Bubbler valve closed
2/28/2012	7:34:22 PM	Helium valve opened
2/28/2012	7:34:22 PM	Main Vac valve opened
2/28/2012	7:34:22 PM	Helium MFC set to  20.000000
2/28/2012	7:34:22 PM	H2 MFC set to  0.000000
2/28/2012	7:34:22 PM	BCl3 MFC set to  0.000000
2/28/2012	7:34:22 PM	PH3 MFC set to  0.000000
2/28/2012	7:34:22 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:34:22 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:34:22 PM	Tube furnace set to 0
2/28/2012	7:34:52 PM	Helium valve closed
2/28/2012	7:34:52 PM	H2 valve closed
2/28/2012	7:34:52 PM	BCl3 valve closed
2/28/2012	7:34:52 PM	PH3 valve closed
2/28/2012	7:34:52 PM	SiCl4 pre valve closed
2/28/2012	7:34:52 PM	SiCl4 post valve closed
2/28/2012	7:34:52 PM	Bypass valve closed
2/28/2012	7:34:52 PM	Bubbler valve closed
2/28/2012	7:34:52 PM	Main Vac valve opened
2/28/2012	7:34:52 PM	Helium MFC set to  0.000000
2/28/2012	7:34:52 PM	H2 MFC set to  0.000000
2/28/2012	7:34:52 PM	BCl3 MFC set to  0.000000
2/28/2012	7:34:52 PM	PH3 MFC set to  0.000000
2/28/2012	7:34:52 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:34:52 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:34:53 PM	Tube furnace set to 0
2/28/2012	7:35:23 PM	H2 valve closed
2/28/2012	7:35:23 PM	BCl3 valve closed
2/28/2012	7:35:23 PM	PH3 valve closed
2/28/2012	7:35:23 PM	SiCl4 pre valve closed
2/28/2012	7:35:23 PM	SiCl4 post valve closed
2/28/2012	7:35:23 PM	Bypass valve closed
2/28/2012	7:35:23 PM	Bubbler valve closed
2/28/2012	7:35:23 PM	Helium valve opened
2/28/2012	7:35:23 PM	Main Vac valve opened
2/28/2012	7:35:23 PM	Helium MFC set to  20.000000
2/28/2012	7:35:23 PM	H2 MFC set to  0.000000
2/28/2012	7:35:23 PM	BCl3 MFC set to  0.000000
2/28/2012	7:35:23 PM	PH3 MFC set to  0.000000
2/28/2012	7:35:23 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:35:23 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:35:23 PM	Tube furnace set to 0
2/28/2012	7:35:53 PM	Helium valve closed
2/28/2012	7:35:53 PM	H2 valve closed
2/28/2012	7:35:53 PM	BCl3 valve closed
2/28/2012	7:35:53 PM	PH3 valve closed
2/28/2012	7:35:53 PM	SiCl4 pre valve closed
2/28/2012	7:35:53 PM	SiCl4 post valve closed
2/28/2012	7:35:53 PM	Bypass valve closed
2/28/2012	7:35:53 PM	Bubbler valve closed
2/28/2012	7:35:53 PM	Main Vac valve opened
2/28/2012	7:35:53 PM	Helium MFC set to  0.000000
2/28/2012	7:35:53 PM	H2 MFC set to  0.000000
2/28/2012	7:35:53 PM	BCl3 MFC set to  0.000000
2/28/2012	7:35:53 PM	PH3 MFC set to  0.000000
2/28/2012	7:35:53 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:35:53 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:35:53 PM	Tube furnace set to 0
2/28/2012	7:36:23 PM	H2 valve closed
2/28/2012	7:36:23 PM	BCl3 valve closed
2/28/2012	7:36:23 PM	PH3 valve closed
2/28/2012	7:36:23 PM	SiCl4 pre valve closed
2/28/2012	7:36:23 PM	SiCl4 post valve closed
2/28/2012	7:36:23 PM	Bypass valve closed
2/28/2012	7:36:23 PM	Bubbler valve closed
2/28/2012	7:36:23 PM	Helium valve opened
2/28/2012	7:36:23 PM	Main Vac valve opened
2/28/2012	7:36:23 PM	Helium MFC set to  20.000000
2/28/2012	7:36:23 PM	H2 MFC set to  0.000000
2/28/2012	7:36:23 PM	BCl3 MFC set to  0.000000
2/28/2012	7:36:23 PM	PH3 MFC set to  0.000000
2/28/2012	7:36:23 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:36:23 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:36:23 PM	Tube furnace set to 0
2/28/2012	7:36:53 PM	Helium valve closed
2/28/2012	7:36:53 PM	H2 valve closed
2/28/2012	7:36:53 PM	BCl3 valve closed
2/28/2012	7:36:53 PM	PH3 valve closed
2/28/2012	7:36:53 PM	SiCl4 pre valve closed
2/28/2012	7:36:53 PM	SiCl4 post valve closed
2/28/2012	7:36:53 PM	Bypass valve closed
2/28/2012	7:36:53 PM	Bubbler valve closed
2/28/2012	7:36:53 PM	Main Vac valve opened
2/28/2012	7:36:53 PM	Helium MFC set to  0.000000
2/28/2012	7:36:53 PM	H2 MFC set to  0.000000
2/28/2012	7:36:53 PM	BCl3 MFC set to  0.000000
2/28/2012	7:36:53 PM	PH3 MFC set to  0.000000
2/28/2012	7:36:53 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:36:53 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:36:53 PM	Tube furnace set to 0
2/28/2012	7:36:54 PM	Run finished at 7:36 PM
2/28/2012	7:36:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/28/2012	7:39:30 PM	Main Vac valve closed
2/28/2012	7:39:42 PM	Main Vac valve opened
2/28/2012	7:40:22 PM	Recipe started at 7:40 PM
2/28/2012	7:40:22 PM	Helium valve closed
2/28/2012	7:40:22 PM	H2 valve closed
2/28/2012	7:40:22 PM	BCl3 valve closed
2/28/2012	7:40:22 PM	PH3 valve closed
2/28/2012	7:40:22 PM	SiCl4 pre valve closed
2/28/2012	7:40:22 PM	SiCl4 post valve closed
2/28/2012	7:40:22 PM	Main Vac valve closed
2/28/2012	7:40:22 PM	Bypass valve closed
2/28/2012	7:40:22 PM	Bubbler valve closed
2/28/2012	7:40:22 PM	Helium MFC set to  0.000000
2/28/2012	7:40:22 PM	H2 MFC set to  0.000000
2/28/2012	7:40:22 PM	BCl3 MFC set to  0.000000
2/28/2012	7:40:22 PM	PH3 MFC set to  0.000000
2/28/2012	7:40:22 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:40:22 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:40:22 PM	Tube furnace set to 0
2/28/2012	7:40:25 PM	Helium valve closed
2/28/2012	7:40:25 PM	BCl3 valve closed
2/28/2012	7:40:25 PM	PH3 valve closed
2/28/2012	7:40:25 PM	SiCl4 pre valve closed
2/28/2012	7:40:25 PM	SiCl4 post valve closed
2/28/2012	7:40:25 PM	Main Vac valve closed
2/28/2012	7:40:25 PM	Bypass valve closed
2/28/2012	7:40:25 PM	Bubbler valve closed
2/28/2012	7:40:25 PM	H2 valve opened
2/28/2012	7:40:25 PM	Helium MFC set to  0.000000
2/28/2012	7:40:25 PM	H2 MFC set to  500.000000
2/28/2012	7:40:25 PM	BCl3 MFC set to  0.000000
2/28/2012	7:40:25 PM	PH3 MFC set to  0.000000
2/28/2012	7:40:25 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:40:25 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:40:25 PM	Tube furnace set to 0
2/28/2012	7:41:30 PM	Helium valve closed
2/28/2012	7:41:30 PM	BCl3 valve closed
2/28/2012	7:41:30 PM	PH3 valve closed
2/28/2012	7:41:30 PM	SiCl4 pre valve closed
2/28/2012	7:41:30 PM	SiCl4 post valve closed
2/28/2012	7:41:30 PM	Main Vac valve closed
2/28/2012	7:41:30 PM	Bypass valve closed
2/28/2012	7:41:30 PM	H2 valve opened
2/28/2012	7:41:30 PM	Bubbler valve opened
2/28/2012	7:41:30 PM	Helium MFC set to  0.000000
2/28/2012	7:41:30 PM	H2 MFC set to  500.000000
2/28/2012	7:41:30 PM	BCl3 MFC set to  0.000000
2/28/2012	7:41:30 PM	PH3 MFC set to  0.000000
2/28/2012	7:41:30 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:41:30 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:41:30 PM	Tube furnace set to 0
2/28/2012	7:41:31 PM	Helium valve closed
2/28/2012	7:41:31 PM	BCl3 valve closed
2/28/2012	7:41:31 PM	PH3 valve closed
2/28/2012	7:41:31 PM	SiCl4 pre valve closed
2/28/2012	7:41:31 PM	SiCl4 post valve closed
2/28/2012	7:41:31 PM	Main Vac valve closed
2/28/2012	7:41:31 PM	Bypass valve closed
2/28/2012	7:41:31 PM	H2 valve opened
2/28/2012	7:41:31 PM	Bubbler valve opened
2/28/2012	7:41:31 PM	Helium MFC set to  0.000000
2/28/2012	7:41:31 PM	H2 MFC set to  500.000000
2/28/2012	7:41:31 PM	BCl3 MFC set to  0.000000
2/28/2012	7:41:31 PM	PH3 MFC set to  0.000000
2/28/2012	7:41:31 PM	SiCl4 MFC set to  0.000000
2/28/2012	7:41:31 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	7:41:32 PM	Tube furnace set to 1000
2/28/2012	8:01:32 PM	Helium valve closed
2/28/2012	8:01:32 PM	BCl3 valve closed
2/28/2012	8:01:32 PM	Main Vac valve closed
2/28/2012	8:01:32 PM	Bypass valve closed
2/28/2012	8:01:32 PM	H2 valve opened
2/28/2012	8:01:32 PM	PH3 valve opened
2/28/2012	8:01:32 PM	SiCl4 pre valve opened
2/28/2012	8:01:32 PM	SiCl4 post valve opened
2/28/2012	8:01:32 PM	Bubbler valve opened
2/28/2012	8:01:32 PM	Helium MFC set to  0.000000
2/28/2012	8:01:32 PM	H2 MFC set to  500.000000
2/28/2012	8:01:32 PM	BCl3 MFC set to  0.000000
2/28/2012	8:01:32 PM	PH3 MFC set to  0.300000
2/28/2012	8:01:32 PM	SiCl4 MFC set to  25.000000
2/28/2012	8:01:32 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:01:32 PM	Tube furnace set to 1000
2/28/2012	8:10:32 PM	Helium valve closed
2/28/2012	8:10:32 PM	BCl3 valve closed
2/28/2012	8:10:32 PM	PH3 valve closed
2/28/2012	8:10:32 PM	SiCl4 pre valve closed
2/28/2012	8:10:32 PM	SiCl4 post valve closed
2/28/2012	8:10:32 PM	Main Vac valve closed
2/28/2012	8:10:32 PM	Bypass valve closed
2/28/2012	8:10:32 PM	H2 valve opened
2/28/2012	8:10:32 PM	Bubbler valve opened
2/28/2012	8:10:32 PM	Helium MFC set to  0.000000
2/28/2012	8:10:32 PM	H2 MFC set to  500.000000
2/28/2012	8:10:32 PM	BCl3 MFC set to  0.000000
2/28/2012	8:10:32 PM	PH3 MFC set to  0.000000
2/28/2012	8:10:32 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:10:32 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:10:32 PM	Tube furnace set to 750
2/28/2012	8:15:32 PM	H2 valve closed
2/28/2012	8:15:32 PM	BCl3 valve closed
2/28/2012	8:15:32 PM	PH3 valve closed
2/28/2012	8:15:32 PM	SiCl4 pre valve closed
2/28/2012	8:15:32 PM	SiCl4 post valve closed
2/28/2012	8:15:32 PM	Main Vac valve closed
2/28/2012	8:15:32 PM	Bypass valve closed
2/28/2012	8:15:32 PM	Helium valve opened
2/28/2012	8:15:32 PM	Bubbler valve opened
2/28/2012	8:15:32 PM	Helium MFC set to  500.000000
2/28/2012	8:15:32 PM	H2 MFC set to  0.000000
2/28/2012	8:15:32 PM	BCl3 MFC set to  0.000000
2/28/2012	8:15:32 PM	PH3 MFC set to  0.000000
2/28/2012	8:15:32 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:15:32 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:15:32 PM	Tube furnace set to 0
2/28/2012	8:27:06 PM	Helium valve closed
2/28/2012	8:27:06 PM	H2 valve closed
2/28/2012	8:27:06 PM	BCl3 valve closed
2/28/2012	8:27:06 PM	PH3 valve closed
2/28/2012	8:27:06 PM	SiCl4 pre valve closed
2/28/2012	8:27:06 PM	SiCl4 post valve closed
2/28/2012	8:27:06 PM	Main Vac valve closed
2/28/2012	8:27:06 PM	Bypass valve closed
2/28/2012	8:27:06 PM	Bubbler valve closed
2/28/2012	8:27:06 PM	Helium MFC set to  0.000000
2/28/2012	8:27:06 PM	H2 MFC set to  0.000000
2/28/2012	8:27:06 PM	BCl3 MFC set to  0.000000
2/28/2012	8:27:06 PM	PH3 MFC set to  0.000000
2/28/2012	8:27:06 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:27:06 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:27:06 PM	Tube furnace set to 0
2/28/2012	8:27:07 PM	Run finished at 8:27 PM
2/28/2012	8:29:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/28/2012	8:29:56 PM	Recipe started at 8:29 PM
2/28/2012	8:29:56 PM	Helium valve closed
2/28/2012	8:29:56 PM	H2 valve closed
2/28/2012	8:29:56 PM	BCl3 valve closed
2/28/2012	8:29:56 PM	PH3 valve closed
2/28/2012	8:29:56 PM	SiCl4 pre valve closed
2/28/2012	8:29:56 PM	SiCl4 post valve closed
2/28/2012	8:29:56 PM	Main Vac valve closed
2/28/2012	8:29:56 PM	Bubbler valve closed
2/28/2012	8:29:56 PM	Bypass valve opened
2/28/2012	8:29:56 PM	Helium MFC set to  0.000000
2/28/2012	8:29:56 PM	H2 MFC set to  0.000000
2/28/2012	8:29:56 PM	BCl3 MFC set to  0.000000
2/28/2012	8:29:56 PM	PH3 MFC set to  0.000000
2/28/2012	8:29:56 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:29:56 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:29:57 PM	Tube furnace set to 0
2/28/2012	8:30:55 PM	Helium valve closed
2/28/2012	8:30:55 PM	H2 valve closed
2/28/2012	8:30:55 PM	BCl3 valve closed
2/28/2012	8:30:55 PM	PH3 valve closed
2/28/2012	8:30:55 PM	SiCl4 pre valve closed
2/28/2012	8:30:55 PM	SiCl4 post valve closed
2/28/2012	8:30:55 PM	Main Vac valve closed
2/28/2012	8:30:55 PM	Bubbler valve closed
2/28/2012	8:30:55 PM	Bypass valve opened
2/28/2012	8:30:55 PM	Helium MFC set to  0.000000
2/28/2012	8:30:55 PM	H2 MFC set to  0.000000
2/28/2012	8:30:55 PM	BCl3 MFC set to  0.000000
2/28/2012	8:30:55 PM	PH3 MFC set to  0.000000
2/28/2012	8:30:55 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:30:55 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:30:55 PM	Tube furnace set to 0
2/28/2012	8:31:55 PM	Helium valve closed
2/28/2012	8:31:55 PM	H2 valve closed
2/28/2012	8:31:55 PM	BCl3 valve closed
2/28/2012	8:31:55 PM	PH3 valve closed
2/28/2012	8:31:55 PM	SiCl4 pre valve closed
2/28/2012	8:31:55 PM	SiCl4 post valve closed
2/28/2012	8:31:55 PM	Bypass valve closed
2/28/2012	8:31:55 PM	Bubbler valve closed
2/28/2012	8:31:55 PM	Main Vac valve opened
2/28/2012	8:31:55 PM	Helium MFC set to  0.000000
2/28/2012	8:31:55 PM	H2 MFC set to  0.000000
2/28/2012	8:31:55 PM	BCl3 MFC set to  0.000000
2/28/2012	8:31:55 PM	PH3 MFC set to  0.000000
2/28/2012	8:31:55 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:31:55 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:31:55 PM	Tube furnace set to 0
2/28/2012	8:31:56 PM	Run finished at 8:31 PM
2/28/2012	8:31:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/28/2012	8:33:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/28/2012	8:33:59 PM	Recipe started at 8:33 PM
2/28/2012	8:33:59 PM	Helium valve closed
2/28/2012	8:33:59 PM	H2 valve closed
2/28/2012	8:33:59 PM	BCl3 valve closed
2/28/2012	8:33:59 PM	PH3 valve closed
2/28/2012	8:33:59 PM	SiCl4 pre valve closed
2/28/2012	8:33:59 PM	SiCl4 post valve closed
2/28/2012	8:33:59 PM	Main Vac valve closed
2/28/2012	8:33:59 PM	Bubbler valve closed
2/28/2012	8:33:59 PM	Bypass valve opened
2/28/2012	8:33:59 PM	Helium MFC set to  0.000000
2/28/2012	8:33:59 PM	H2 MFC set to  0.000000
2/28/2012	8:33:59 PM	BCl3 MFC set to  0.000000
2/28/2012	8:33:59 PM	PH3 MFC set to  0.000000
2/28/2012	8:33:59 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:33:59 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:33:59 PM	Tube furnace set to 0
2/28/2012	8:33:59 PM	Helium valve closed
2/28/2012	8:33:59 PM	H2 valve closed
2/28/2012	8:33:59 PM	BCl3 valve closed
2/28/2012	8:33:59 PM	PH3 valve closed
2/28/2012	8:34:00 PM	SiCl4 pre valve closed
2/28/2012	8:34:00 PM	SiCl4 post valve closed
2/28/2012	8:34:00 PM	Main Vac valve closed
2/28/2012	8:34:00 PM	Bubbler valve closed
2/28/2012	8:34:00 PM	Bypass valve opened
2/28/2012	8:34:00 PM	Helium MFC set to  0.000000
2/28/2012	8:34:00 PM	H2 MFC set to  0.000000
2/28/2012	8:34:00 PM	BCl3 MFC set to  0.000000
2/28/2012	8:34:00 PM	PH3 MFC set to  0.000000
2/28/2012	8:34:00 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:34:00 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:34:00 PM	Tube furnace set to 0
2/28/2012	8:34:00 PM	Helium valve closed
2/28/2012	8:34:00 PM	H2 valve closed
2/28/2012	8:34:00 PM	BCl3 valve closed
2/28/2012	8:34:00 PM	PH3 valve closed
2/28/2012	8:34:00 PM	SiCl4 pre valve closed
2/28/2012	8:34:00 PM	SiCl4 post valve closed
2/28/2012	8:34:00 PM	Bypass valve closed
2/28/2012	8:34:00 PM	Bubbler valve closed
2/28/2012	8:34:00 PM	Main Vac valve opened
2/28/2012	8:34:00 PM	Helium MFC set to  0.000000
2/28/2012	8:34:00 PM	H2 MFC set to  0.000000
2/28/2012	8:34:00 PM	BCl3 MFC set to  0.000000
2/28/2012	8:34:00 PM	PH3 MFC set to  0.000000
2/28/2012	8:34:00 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:34:00 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:34:00 PM	Tube furnace set to 0
2/28/2012	8:34:30 PM	H2 valve closed
2/28/2012	8:34:30 PM	BCl3 valve closed
2/28/2012	8:34:30 PM	PH3 valve closed
2/28/2012	8:34:30 PM	SiCl4 pre valve closed
2/28/2012	8:34:30 PM	SiCl4 post valve closed
2/28/2012	8:34:30 PM	Bypass valve closed
2/28/2012	8:34:30 PM	Bubbler valve closed
2/28/2012	8:34:30 PM	Helium valve opened
2/28/2012	8:34:30 PM	Main Vac valve opened
2/28/2012	8:34:30 PM	Helium MFC set to  20.000000
2/28/2012	8:34:30 PM	H2 MFC set to  0.000000
2/28/2012	8:34:30 PM	BCl3 MFC set to  0.000000
2/28/2012	8:34:30 PM	PH3 MFC set to  0.000000
2/28/2012	8:34:30 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:34:30 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:34:30 PM	Tube furnace set to 0
2/28/2012	8:35:00 PM	Helium valve closed
2/28/2012	8:35:00 PM	H2 valve closed
2/28/2012	8:35:00 PM	BCl3 valve closed
2/28/2012	8:35:00 PM	PH3 valve closed
2/28/2012	8:35:00 PM	SiCl4 pre valve closed
2/28/2012	8:35:00 PM	SiCl4 post valve closed
2/28/2012	8:35:00 PM	Bypass valve closed
2/28/2012	8:35:00 PM	Bubbler valve closed
2/28/2012	8:35:00 PM	Main Vac valve opened
2/28/2012	8:35:00 PM	Helium MFC set to  0.000000
2/28/2012	8:35:00 PM	H2 MFC set to  0.000000
2/28/2012	8:35:00 PM	BCl3 MFC set to  0.000000
2/28/2012	8:35:00 PM	PH3 MFC set to  0.000000
2/28/2012	8:35:00 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:35:00 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:35:01 PM	Tube furnace set to 0
2/28/2012	8:35:31 PM	H2 valve closed
2/28/2012	8:35:31 PM	BCl3 valve closed
2/28/2012	8:35:31 PM	PH3 valve closed
2/28/2012	8:35:31 PM	SiCl4 pre valve closed
2/28/2012	8:35:31 PM	SiCl4 post valve closed
2/28/2012	8:35:31 PM	Bypass valve closed
2/28/2012	8:35:31 PM	Bubbler valve closed
2/28/2012	8:35:31 PM	Helium valve opened
2/28/2012	8:35:31 PM	Main Vac valve opened
2/28/2012	8:35:31 PM	Helium MFC set to  20.000000
2/28/2012	8:35:31 PM	H2 MFC set to  0.000000
2/28/2012	8:35:31 PM	BCl3 MFC set to  0.000000
2/28/2012	8:35:31 PM	PH3 MFC set to  0.000000
2/28/2012	8:35:31 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:35:31 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:35:31 PM	Tube furnace set to 0
2/28/2012	8:36:01 PM	Helium valve closed
2/28/2012	8:36:01 PM	H2 valve closed
2/28/2012	8:36:01 PM	BCl3 valve closed
2/28/2012	8:36:01 PM	PH3 valve closed
2/28/2012	8:36:01 PM	SiCl4 pre valve closed
2/28/2012	8:36:01 PM	SiCl4 post valve closed
2/28/2012	8:36:01 PM	Bypass valve closed
2/28/2012	8:36:01 PM	Bubbler valve closed
2/28/2012	8:36:01 PM	Main Vac valve opened
2/28/2012	8:36:01 PM	Helium MFC set to  0.000000
2/28/2012	8:36:01 PM	H2 MFC set to  0.000000
2/28/2012	8:36:01 PM	BCl3 MFC set to  0.000000
2/28/2012	8:36:01 PM	PH3 MFC set to  0.000000
2/28/2012	8:36:01 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:36:01 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:36:01 PM	Tube furnace set to 0
2/28/2012	8:36:31 PM	H2 valve closed
2/28/2012	8:36:31 PM	BCl3 valve closed
2/28/2012	8:36:31 PM	PH3 valve closed
2/28/2012	8:36:31 PM	SiCl4 pre valve closed
2/28/2012	8:36:31 PM	SiCl4 post valve closed
2/28/2012	8:36:31 PM	Bypass valve closed
2/28/2012	8:36:31 PM	Bubbler valve closed
2/28/2012	8:36:31 PM	Helium valve opened
2/28/2012	8:36:31 PM	Main Vac valve opened
2/28/2012	8:36:31 PM	Helium MFC set to  20.000000
2/28/2012	8:36:31 PM	H2 MFC set to  0.000000
2/28/2012	8:36:31 PM	BCl3 MFC set to  0.000000
2/28/2012	8:36:31 PM	PH3 MFC set to  0.000000
2/28/2012	8:36:31 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:36:31 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:36:31 PM	Tube furnace set to 0
2/28/2012	8:37:01 PM	Helium valve closed
2/28/2012	8:37:01 PM	H2 valve closed
2/28/2012	8:37:01 PM	BCl3 valve closed
2/28/2012	8:37:01 PM	PH3 valve closed
2/28/2012	8:37:01 PM	SiCl4 pre valve closed
2/28/2012	8:37:01 PM	SiCl4 post valve closed
2/28/2012	8:37:01 PM	Bypass valve closed
2/28/2012	8:37:01 PM	Bubbler valve closed
2/28/2012	8:37:01 PM	Main Vac valve opened
2/28/2012	8:37:01 PM	Helium MFC set to  0.000000
2/28/2012	8:37:01 PM	H2 MFC set to  0.000000
2/28/2012	8:37:01 PM	BCl3 MFC set to  0.000000
2/28/2012	8:37:01 PM	PH3 MFC set to  0.000000
2/28/2012	8:37:01 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:37:01 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:37:01 PM	Tube furnace set to 0
2/28/2012	8:37:31 PM	H2 valve closed
2/28/2012	8:37:31 PM	BCl3 valve closed
2/28/2012	8:37:31 PM	PH3 valve closed
2/28/2012	8:37:31 PM	SiCl4 pre valve closed
2/28/2012	8:37:31 PM	SiCl4 post valve closed
2/28/2012	8:37:31 PM	Bypass valve closed
2/28/2012	8:37:31 PM	Bubbler valve closed
2/28/2012	8:37:31 PM	Helium valve opened
2/28/2012	8:37:31 PM	Main Vac valve opened
2/28/2012	8:37:31 PM	Helium MFC set to  20.000000
2/28/2012	8:37:31 PM	H2 MFC set to  0.000000
2/28/2012	8:37:31 PM	BCl3 MFC set to  0.000000
2/28/2012	8:37:31 PM	PH3 MFC set to  0.000000
2/28/2012	8:37:31 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:37:31 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:37:32 PM	Tube furnace set to 0
2/28/2012	8:38:02 PM	Helium valve closed
2/28/2012	8:38:02 PM	H2 valve closed
2/28/2012	8:38:02 PM	BCl3 valve closed
2/28/2012	8:38:02 PM	PH3 valve closed
2/28/2012	8:38:02 PM	SiCl4 pre valve closed
2/28/2012	8:38:02 PM	SiCl4 post valve closed
2/28/2012	8:38:02 PM	Bypass valve closed
2/28/2012	8:38:02 PM	Bubbler valve closed
2/28/2012	8:38:02 PM	Main Vac valve opened
2/28/2012	8:38:02 PM	Helium MFC set to  0.000000
2/28/2012	8:38:02 PM	H2 MFC set to  0.000000
2/28/2012	8:38:02 PM	BCl3 MFC set to  0.000000
2/28/2012	8:38:02 PM	PH3 MFC set to  0.000000
2/28/2012	8:38:02 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:38:02 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:38:02 PM	Tube furnace set to 0
2/28/2012	8:38:32 PM	H2 valve closed
2/28/2012	8:38:32 PM	BCl3 valve closed
2/28/2012	8:38:32 PM	PH3 valve closed
2/28/2012	8:38:32 PM	SiCl4 pre valve closed
2/28/2012	8:38:32 PM	SiCl4 post valve closed
2/28/2012	8:38:32 PM	Bypass valve closed
2/28/2012	8:38:32 PM	Bubbler valve closed
2/28/2012	8:38:32 PM	Helium valve opened
2/28/2012	8:38:32 PM	Main Vac valve opened
2/28/2012	8:38:32 PM	Helium MFC set to  20.000000
2/28/2012	8:38:32 PM	H2 MFC set to  0.000000
2/28/2012	8:38:32 PM	BCl3 MFC set to  0.000000
2/28/2012	8:38:32 PM	PH3 MFC set to  0.000000
2/28/2012	8:38:32 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:38:32 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:38:32 PM	Tube furnace set to 0
2/28/2012	8:39:02 PM	Helium valve closed
2/28/2012	8:39:02 PM	H2 valve closed
2/28/2012	8:39:02 PM	BCl3 valve closed
2/28/2012	8:39:02 PM	PH3 valve closed
2/28/2012	8:39:02 PM	SiCl4 pre valve closed
2/28/2012	8:39:02 PM	SiCl4 post valve closed
2/28/2012	8:39:02 PM	Bypass valve closed
2/28/2012	8:39:02 PM	Bubbler valve closed
2/28/2012	8:39:02 PM	Main Vac valve opened
2/28/2012	8:39:02 PM	Helium MFC set to  0.000000
2/28/2012	8:39:02 PM	H2 MFC set to  0.000000
2/28/2012	8:39:02 PM	BCl3 MFC set to  0.000000
2/28/2012	8:39:02 PM	PH3 MFC set to  0.000000
2/28/2012	8:39:02 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:39:02 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:39:02 PM	Tube furnace set to 0
2/28/2012	8:39:32 PM	H2 valve closed
2/28/2012	8:39:32 PM	BCl3 valve closed
2/28/2012	8:39:32 PM	PH3 valve closed
2/28/2012	8:39:32 PM	SiCl4 pre valve closed
2/28/2012	8:39:32 PM	SiCl4 post valve closed
2/28/2012	8:39:32 PM	Bypass valve closed
2/28/2012	8:39:32 PM	Bubbler valve closed
2/28/2012	8:39:32 PM	Helium valve opened
2/28/2012	8:39:32 PM	Main Vac valve opened
2/28/2012	8:39:32 PM	Helium MFC set to  20.000000
2/28/2012	8:39:32 PM	H2 MFC set to  0.000000
2/28/2012	8:39:32 PM	BCl3 MFC set to  0.000000
2/28/2012	8:39:32 PM	PH3 MFC set to  0.000000
2/28/2012	8:39:32 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:39:32 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:39:32 PM	Tube furnace set to 0
2/28/2012	8:40:02 PM	Helium valve closed
2/28/2012	8:40:02 PM	H2 valve closed
2/28/2012	8:40:02 PM	BCl3 valve closed
2/28/2012	8:40:02 PM	PH3 valve closed
2/28/2012	8:40:02 PM	SiCl4 pre valve closed
2/28/2012	8:40:02 PM	SiCl4 post valve closed
2/28/2012	8:40:02 PM	Bypass valve closed
2/28/2012	8:40:02 PM	Bubbler valve closed
2/28/2012	8:40:02 PM	Main Vac valve opened
2/28/2012	8:40:02 PM	Helium MFC set to  0.000000
2/28/2012	8:40:02 PM	H2 MFC set to  0.000000
2/28/2012	8:40:02 PM	BCl3 MFC set to  0.000000
2/28/2012	8:40:02 PM	PH3 MFC set to  0.000000
2/28/2012	8:40:02 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:40:02 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:40:03 PM	Tube furnace set to 0
2/28/2012	8:40:33 PM	H2 valve closed
2/28/2012	8:40:33 PM	BCl3 valve closed
2/28/2012	8:40:33 PM	PH3 valve closed
2/28/2012	8:40:33 PM	SiCl4 pre valve closed
2/28/2012	8:40:33 PM	SiCl4 post valve closed
2/28/2012	8:40:33 PM	Bypass valve closed
2/28/2012	8:40:33 PM	Bubbler valve closed
2/28/2012	8:40:33 PM	Helium valve opened
2/28/2012	8:40:33 PM	Main Vac valve opened
2/28/2012	8:40:33 PM	Helium MFC set to  20.000000
2/28/2012	8:40:33 PM	H2 MFC set to  0.000000
2/28/2012	8:40:33 PM	BCl3 MFC set to  0.000000
2/28/2012	8:40:33 PM	PH3 MFC set to  0.000000
2/28/2012	8:40:33 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:40:33 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:40:33 PM	Tube furnace set to 0
2/28/2012	8:41:03 PM	Helium valve closed
2/28/2012	8:41:03 PM	H2 valve closed
2/28/2012	8:41:03 PM	BCl3 valve closed
2/28/2012	8:41:03 PM	PH3 valve closed
2/28/2012	8:41:03 PM	SiCl4 pre valve closed
2/28/2012	8:41:03 PM	SiCl4 post valve closed
2/28/2012	8:41:03 PM	Bypass valve closed
2/28/2012	8:41:03 PM	Bubbler valve closed
2/28/2012	8:41:03 PM	Main Vac valve opened
2/28/2012	8:41:03 PM	Helium MFC set to  0.000000
2/28/2012	8:41:03 PM	H2 MFC set to  0.000000
2/28/2012	8:41:03 PM	BCl3 MFC set to  0.000000
2/28/2012	8:41:03 PM	PH3 MFC set to  0.000000
2/28/2012	8:41:03 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:41:03 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:41:03 PM	Tube furnace set to 0
2/28/2012	8:41:33 PM	H2 valve closed
2/28/2012	8:41:33 PM	BCl3 valve closed
2/28/2012	8:41:33 PM	PH3 valve closed
2/28/2012	8:41:33 PM	SiCl4 pre valve closed
2/28/2012	8:41:33 PM	SiCl4 post valve closed
2/28/2012	8:41:33 PM	Bypass valve closed
2/28/2012	8:41:33 PM	Bubbler valve closed
2/28/2012	8:41:33 PM	Helium valve opened
2/28/2012	8:41:33 PM	Main Vac valve opened
2/28/2012	8:41:33 PM	Helium MFC set to  20.000000
2/28/2012	8:41:33 PM	H2 MFC set to  0.000000
2/28/2012	8:41:33 PM	BCl3 MFC set to  0.000000
2/28/2012	8:41:33 PM	PH3 MFC set to  0.000000
2/28/2012	8:41:33 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:41:33 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:41:33 PM	Tube furnace set to 0
2/28/2012	8:42:03 PM	Helium valve closed
2/28/2012	8:42:03 PM	H2 valve closed
2/28/2012	8:42:03 PM	BCl3 valve closed
2/28/2012	8:42:03 PM	PH3 valve closed
2/28/2012	8:42:03 PM	SiCl4 pre valve closed
2/28/2012	8:42:03 PM	SiCl4 post valve closed
2/28/2012	8:42:03 PM	Bypass valve closed
2/28/2012	8:42:03 PM	Bubbler valve closed
2/28/2012	8:42:03 PM	Main Vac valve opened
2/28/2012	8:42:03 PM	Helium MFC set to  0.000000
2/28/2012	8:42:03 PM	H2 MFC set to  0.000000
2/28/2012	8:42:03 PM	BCl3 MFC set to  0.000000
2/28/2012	8:42:03 PM	PH3 MFC set to  0.000000
2/28/2012	8:42:03 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:42:03 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:42:03 PM	Tube furnace set to 0
2/28/2012	8:42:33 PM	H2 valve closed
2/28/2012	8:42:33 PM	BCl3 valve closed
2/28/2012	8:42:33 PM	PH3 valve closed
2/28/2012	8:42:33 PM	SiCl4 pre valve closed
2/28/2012	8:42:33 PM	SiCl4 post valve closed
2/28/2012	8:42:33 PM	Bypass valve closed
2/28/2012	8:42:33 PM	Bubbler valve closed
2/28/2012	8:42:33 PM	Helium valve opened
2/28/2012	8:42:33 PM	Main Vac valve opened
2/28/2012	8:42:33 PM	Helium MFC set to  20.000000
2/28/2012	8:42:34 PM	H2 MFC set to  0.000000
2/28/2012	8:42:34 PM	BCl3 MFC set to  0.000000
2/28/2012	8:42:34 PM	PH3 MFC set to  0.000000
2/28/2012	8:42:34 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:42:34 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:42:34 PM	Tube furnace set to 0
2/28/2012	8:43:04 PM	Helium valve closed
2/28/2012	8:43:04 PM	H2 valve closed
2/28/2012	8:43:04 PM	BCl3 valve closed
2/28/2012	8:43:04 PM	PH3 valve closed
2/28/2012	8:43:04 PM	SiCl4 pre valve closed
2/28/2012	8:43:04 PM	SiCl4 post valve closed
2/28/2012	8:43:04 PM	Bypass valve closed
2/28/2012	8:43:04 PM	Bubbler valve closed
2/28/2012	8:43:04 PM	Main Vac valve opened
2/28/2012	8:43:04 PM	Helium MFC set to  0.000000
2/28/2012	8:43:04 PM	H2 MFC set to  0.000000
2/28/2012	8:43:04 PM	BCl3 MFC set to  0.000000
2/28/2012	8:43:04 PM	PH3 MFC set to  0.000000
2/28/2012	8:43:04 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:43:04 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:43:04 PM	Tube furnace set to 0
2/28/2012	8:43:34 PM	H2 valve closed
2/28/2012	8:43:34 PM	BCl3 valve closed
2/28/2012	8:43:34 PM	PH3 valve closed
2/28/2012	8:43:34 PM	SiCl4 pre valve closed
2/28/2012	8:43:34 PM	SiCl4 post valve closed
2/28/2012	8:43:34 PM	Bypass valve closed
2/28/2012	8:43:34 PM	Bubbler valve closed
2/28/2012	8:43:34 PM	Helium valve opened
2/28/2012	8:43:34 PM	Main Vac valve opened
2/28/2012	8:43:34 PM	Helium MFC set to  20.000000
2/28/2012	8:43:34 PM	H2 MFC set to  0.000000
2/28/2012	8:43:34 PM	BCl3 MFC set to  0.000000
2/28/2012	8:43:34 PM	PH3 MFC set to  0.000000
2/28/2012	8:43:34 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:43:34 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:43:34 PM	Tube furnace set to 0
2/28/2012	8:44:04 PM	Helium valve closed
2/28/2012	8:44:04 PM	H2 valve closed
2/28/2012	8:44:04 PM	BCl3 valve closed
2/28/2012	8:44:04 PM	PH3 valve closed
2/28/2012	8:44:04 PM	SiCl4 pre valve closed
2/28/2012	8:44:04 PM	SiCl4 post valve closed
2/28/2012	8:44:04 PM	Bypass valve closed
2/28/2012	8:44:04 PM	Bubbler valve closed
2/28/2012	8:44:04 PM	Main Vac valve opened
2/28/2012	8:44:04 PM	Helium MFC set to  0.000000
2/28/2012	8:44:04 PM	H2 MFC set to  0.000000
2/28/2012	8:44:04 PM	BCl3 MFC set to  0.000000
2/28/2012	8:44:04 PM	PH3 MFC set to  0.000000
2/28/2012	8:44:04 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:44:04 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:44:04 PM	Tube furnace set to 0
2/28/2012	8:44:05 PM	Run finished at 8:44 PM
2/28/2012	8:44:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/28/2012	8:45:25 PM	Main Vac valve closed
2/28/2012	8:45:36 PM	Main Vac valve opened
2/28/2012	8:47:00 PM	Main Vac valve closed
2/28/2012	8:47:10 PM	Main Vac valve opened
2/28/2012	8:47:45 PM	Recipe started at 8:47 PM
2/28/2012	8:47:45 PM	Helium valve closed
2/28/2012	8:47:45 PM	H2 valve closed
2/28/2012	8:47:45 PM	BCl3 valve closed
2/28/2012	8:47:45 PM	PH3 valve closed
2/28/2012	8:47:45 PM	SiCl4 pre valve closed
2/28/2012	8:47:45 PM	SiCl4 post valve closed
2/28/2012	8:47:45 PM	Main Vac valve closed
2/28/2012	8:47:45 PM	Bypass valve closed
2/28/2012	8:47:45 PM	Bubbler valve closed
2/28/2012	8:47:45 PM	Helium MFC set to  0.000000
2/28/2012	8:47:45 PM	H2 MFC set to  0.000000
2/28/2012	8:47:45 PM	BCl3 MFC set to  0.000000
2/28/2012	8:47:45 PM	PH3 MFC set to  0.000000
2/28/2012	8:47:45 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:47:45 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:47:45 PM	Tube furnace set to 0
2/28/2012	8:47:48 PM	Helium valve closed
2/28/2012	8:47:48 PM	BCl3 valve closed
2/28/2012	8:47:48 PM	PH3 valve closed
2/28/2012	8:47:48 PM	SiCl4 pre valve closed
2/28/2012	8:47:48 PM	SiCl4 post valve closed
2/28/2012	8:47:48 PM	Main Vac valve closed
2/28/2012	8:47:48 PM	Bypass valve closed
2/28/2012	8:47:48 PM	Bubbler valve closed
2/28/2012	8:47:48 PM	H2 valve opened
2/28/2012	8:47:48 PM	Helium MFC set to  0.000000
2/28/2012	8:47:48 PM	H2 MFC set to  500.000000
2/28/2012	8:47:48 PM	BCl3 MFC set to  0.000000
2/28/2012	8:47:48 PM	PH3 MFC set to  0.000000
2/28/2012	8:47:48 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:47:48 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:47:48 PM	Tube furnace set to 0
2/28/2012	8:48:55 PM	Helium valve closed
2/28/2012	8:48:55 PM	BCl3 valve closed
2/28/2012	8:48:55 PM	PH3 valve closed
2/28/2012	8:48:55 PM	SiCl4 pre valve closed
2/28/2012	8:48:55 PM	SiCl4 post valve closed
2/28/2012	8:48:55 PM	Main Vac valve closed
2/28/2012	8:48:55 PM	Bypass valve closed
2/28/2012	8:48:55 PM	H2 valve opened
2/28/2012	8:48:55 PM	Bubbler valve opened
2/28/2012	8:48:55 PM	Helium MFC set to  0.000000
2/28/2012	8:48:55 PM	H2 MFC set to  500.000000
2/28/2012	8:48:55 PM	BCl3 MFC set to  0.000000
2/28/2012	8:48:55 PM	PH3 MFC set to  0.000000
2/28/2012	8:48:55 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:48:55 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:48:55 PM	Tube furnace set to 0
2/28/2012	8:48:56 PM	Helium valve closed
2/28/2012	8:48:56 PM	BCl3 valve closed
2/28/2012	8:48:56 PM	PH3 valve closed
2/28/2012	8:48:56 PM	SiCl4 pre valve closed
2/28/2012	8:48:56 PM	SiCl4 post valve closed
2/28/2012	8:48:56 PM	Main Vac valve closed
2/28/2012	8:48:56 PM	Bypass valve closed
2/28/2012	8:48:57 PM	H2 valve opened
2/28/2012	8:48:57 PM	Bubbler valve opened
2/28/2012	8:48:57 PM	Helium MFC set to  0.000000
2/28/2012	8:48:57 PM	H2 MFC set to  500.000000
2/28/2012	8:48:57 PM	BCl3 MFC set to  0.000000
2/28/2012	8:48:57 PM	PH3 MFC set to  0.000000
2/28/2012	8:48:57 PM	SiCl4 MFC set to  0.000000
2/28/2012	8:48:57 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	8:48:57 PM	Tube furnace set to 1000
2/28/2012	9:08:57 PM	Helium valve closed
2/28/2012	9:08:57 PM	BCl3 valve closed
2/28/2012	9:08:57 PM	Main Vac valve closed
2/28/2012	9:08:57 PM	Bypass valve closed
2/28/2012	9:08:57 PM	H2 valve opened
2/28/2012	9:08:57 PM	PH3 valve opened
2/28/2012	9:08:57 PM	SiCl4 pre valve opened
2/28/2012	9:08:57 PM	SiCl4 post valve opened
2/28/2012	9:08:57 PM	Bubbler valve opened
2/28/2012	9:08:57 PM	Helium MFC set to  0.000000
2/28/2012	9:08:57 PM	H2 MFC set to  500.000000
2/28/2012	9:08:57 PM	BCl3 MFC set to  0.000000
2/28/2012	9:08:57 PM	PH3 MFC set to  0.300000
2/28/2012	9:08:57 PM	SiCl4 MFC set to  25.000000
2/28/2012	9:08:57 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	9:08:57 PM	Tube furnace set to 1000
2/28/2012	9:17:57 PM	Helium valve closed
2/28/2012	9:17:57 PM	BCl3 valve closed
2/28/2012	9:17:57 PM	PH3 valve closed
2/28/2012	9:17:57 PM	SiCl4 pre valve closed
2/28/2012	9:17:57 PM	SiCl4 post valve closed
2/28/2012	9:17:57 PM	Main Vac valve closed
2/28/2012	9:17:57 PM	Bypass valve closed
2/28/2012	9:17:57 PM	H2 valve opened
2/28/2012	9:17:57 PM	Bubbler valve opened
2/28/2012	9:17:57 PM	Helium MFC set to  0.000000
2/28/2012	9:17:57 PM	H2 MFC set to  500.000000
2/28/2012	9:17:57 PM	BCl3 MFC set to  0.000000
2/28/2012	9:17:57 PM	PH3 MFC set to  0.000000
2/28/2012	9:17:57 PM	SiCl4 MFC set to  0.000000
2/28/2012	9:17:57 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	9:17:57 PM	Tube furnace set to 750
2/28/2012	9:21:01 PM	H2 valve closed
2/28/2012	9:21:01 PM	BCl3 valve closed
2/28/2012	9:21:01 PM	PH3 valve closed
2/28/2012	9:21:01 PM	SiCl4 pre valve closed
2/28/2012	9:21:01 PM	SiCl4 post valve closed
2/28/2012	9:21:01 PM	Main Vac valve closed
2/28/2012	9:21:01 PM	Bypass valve closed
2/28/2012	9:21:01 PM	Helium valve opened
2/28/2012	9:21:01 PM	Bubbler valve opened
2/28/2012	9:21:01 PM	Helium MFC set to  500.000000
2/28/2012	9:21:01 PM	H2 MFC set to  0.000000
2/28/2012	9:21:01 PM	BCl3 MFC set to  0.000000
2/28/2012	9:21:01 PM	PH3 MFC set to  0.000000
2/28/2012	9:21:01 PM	SiCl4 MFC set to  0.000000
2/28/2012	9:21:01 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	9:21:02 PM	Tube furnace set to 0
2/28/2012	9:21:04 PM	Helium valve closed
2/28/2012	9:21:04 PM	H2 valve closed
2/28/2012	9:21:04 PM	BCl3 valve closed
2/28/2012	9:21:04 PM	PH3 valve closed
2/28/2012	9:21:04 PM	SiCl4 pre valve closed
2/28/2012	9:21:04 PM	SiCl4 post valve closed
2/28/2012	9:21:04 PM	Main Vac valve closed
2/28/2012	9:21:04 PM	Bypass valve closed
2/28/2012	9:21:04 PM	Bubbler valve closed
2/28/2012	9:21:04 PM	Helium MFC set to  0.000000
2/28/2012	9:21:04 PM	H2 MFC set to  0.000000
2/28/2012	9:21:04 PM	BCl3 MFC set to  0.000000
2/28/2012	9:21:04 PM	PH3 MFC set to  0.000000
2/28/2012	9:21:04 PM	SiCl4 MFC set to  0.000000
2/28/2012	9:21:04 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	9:21:04 PM	Tube furnace set to 0
2/28/2012	9:21:05 PM	Run finished at 9:21 PM
2/28/2012	9:21:39 PM	Recipe started at 9:21 PM
2/28/2012	9:21:39 PM	Helium valve closed
2/28/2012	9:21:39 PM	H2 valve closed
2/28/2012	9:21:39 PM	BCl3 valve closed
2/28/2012	9:21:39 PM	PH3 valve closed
2/28/2012	9:21:39 PM	SiCl4 pre valve closed
2/28/2012	9:21:39 PM	SiCl4 post valve closed
2/28/2012	9:21:39 PM	Main Vac valve closed
2/28/2012	9:21:39 PM	Bypass valve closed
2/28/2012	9:21:39 PM	Bubbler valve closed
2/28/2012	9:21:39 PM	Helium MFC set to  0.000000
2/28/2012	9:21:39 PM	H2 MFC set to  0.000000
2/28/2012	9:21:39 PM	BCl3 MFC set to  0.000000
2/28/2012	9:21:39 PM	PH3 MFC set to  0.000000
2/28/2012	9:21:39 PM	SiCl4 MFC set to  0.000000
2/28/2012	9:21:39 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	9:21:39 PM	Tube furnace set to 0
2/28/2012	9:21:42 PM	Helium valve closed
2/28/2012	9:21:42 PM	BCl3 valve closed
2/28/2012	9:21:42 PM	PH3 valve closed
2/28/2012	9:21:42 PM	SiCl4 pre valve closed
2/28/2012	9:21:42 PM	SiCl4 post valve closed
2/28/2012	9:21:42 PM	Main Vac valve closed
2/28/2012	9:21:42 PM	Bypass valve closed
2/28/2012	9:21:42 PM	Bubbler valve closed
2/28/2012	9:21:42 PM	H2 valve opened
2/28/2012	9:21:42 PM	Helium MFC set to  0.000000
2/28/2012	9:21:42 PM	H2 MFC set to  500.000000
2/28/2012	9:21:42 PM	BCl3 MFC set to  0.000000
2/28/2012	9:21:42 PM	PH3 MFC set to  0.000000
2/28/2012	9:21:42 PM	SiCl4 MFC set to  0.000000
2/28/2012	9:21:42 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	9:21:42 PM	Tube furnace set to 0
2/28/2012	9:21:43 PM	Helium valve closed
2/28/2012	9:21:43 PM	BCl3 valve closed
2/28/2012	9:21:43 PM	PH3 valve closed
2/28/2012	9:21:43 PM	SiCl4 pre valve closed
2/28/2012	9:21:43 PM	SiCl4 post valve closed
2/28/2012	9:21:43 PM	Main Vac valve closed
2/28/2012	9:21:43 PM	Bypass valve closed
2/28/2012	9:21:43 PM	H2 valve opened
2/28/2012	9:21:43 PM	Bubbler valve opened
2/28/2012	9:21:43 PM	Helium MFC set to  0.000000
2/28/2012	9:21:43 PM	H2 MFC set to  500.000000
2/28/2012	9:21:43 PM	BCl3 MFC set to  0.000000
2/28/2012	9:21:43 PM	PH3 MFC set to  0.000000
2/28/2012	9:21:43 PM	SiCl4 MFC set to  0.000000
2/28/2012	9:21:43 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	9:21:43 PM	Tube furnace set to 0
2/28/2012	9:21:44 PM	Helium valve closed
2/28/2012	9:21:44 PM	BCl3 valve closed
2/28/2012	9:21:44 PM	PH3 valve closed
2/28/2012	9:21:44 PM	SiCl4 pre valve closed
2/28/2012	9:21:44 PM	SiCl4 post valve closed
2/28/2012	9:21:44 PM	Main Vac valve closed
2/28/2012	9:21:44 PM	Bypass valve closed
2/28/2012	9:21:44 PM	H2 valve opened
2/28/2012	9:21:44 PM	Bubbler valve opened
2/28/2012	9:21:44 PM	Helium MFC set to  0.000000
2/28/2012	9:21:44 PM	H2 MFC set to  500.000000
2/28/2012	9:21:44 PM	BCl3 MFC set to  0.000000
2/28/2012	9:21:44 PM	PH3 MFC set to  0.000000
2/28/2012	9:21:44 PM	SiCl4 MFC set to  0.000000
2/28/2012	9:21:44 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	9:21:44 PM	Tube furnace set to 1000
2/28/2012	9:41:44 PM	Helium valve closed
2/28/2012	9:41:44 PM	BCl3 valve closed
2/28/2012	9:41:44 PM	Main Vac valve closed
2/28/2012	9:41:44 PM	Bypass valve closed
2/28/2012	9:41:44 PM	H2 valve opened
2/28/2012	9:41:44 PM	PH3 valve opened
2/28/2012	9:41:44 PM	SiCl4 pre valve opened
2/28/2012	9:41:44 PM	SiCl4 post valve opened
2/28/2012	9:41:44 PM	Bubbler valve opened
2/28/2012	9:41:44 PM	Helium MFC set to  0.000000
2/28/2012	9:41:44 PM	H2 MFC set to  500.000000
2/28/2012	9:41:44 PM	BCl3 MFC set to  0.000000
2/28/2012	9:41:44 PM	PH3 MFC set to  0.300000
2/28/2012	9:41:44 PM	SiCl4 MFC set to  25.000000
2/28/2012	9:41:44 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	9:41:44 PM	Tube furnace set to 1000
2/28/2012	9:50:44 PM	Helium valve closed
2/28/2012	9:50:44 PM	BCl3 valve closed
2/28/2012	9:50:44 PM	PH3 valve closed
2/28/2012	9:50:44 PM	SiCl4 pre valve closed
2/28/2012	9:50:44 PM	SiCl4 post valve closed
2/28/2012	9:50:44 PM	Main Vac valve closed
2/28/2012	9:50:44 PM	Bypass valve closed
2/28/2012	9:50:44 PM	H2 valve opened
2/28/2012	9:50:44 PM	Bubbler valve opened
2/28/2012	9:50:44 PM	Helium MFC set to  0.000000
2/28/2012	9:50:44 PM	H2 MFC set to  500.000000
2/28/2012	9:50:44 PM	BCl3 MFC set to  0.000000
2/28/2012	9:50:44 PM	PH3 MFC set to  0.000000
2/28/2012	9:50:44 PM	SiCl4 MFC set to  0.000000
2/28/2012	9:50:44 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	9:50:45 PM	Tube furnace set to 750
2/28/2012	9:55:45 PM	H2 valve closed
2/28/2012	9:55:45 PM	BCl3 valve closed
2/28/2012	9:55:45 PM	PH3 valve closed
2/28/2012	9:55:45 PM	SiCl4 pre valve closed
2/28/2012	9:55:45 PM	SiCl4 post valve closed
2/28/2012	9:55:45 PM	Main Vac valve closed
2/28/2012	9:55:45 PM	Bypass valve closed
2/28/2012	9:55:45 PM	Helium valve opened
2/28/2012	9:55:45 PM	Bubbler valve opened
2/28/2012	9:55:45 PM	Helium MFC set to  500.000000
2/28/2012	9:55:45 PM	H2 MFC set to  0.000000
2/28/2012	9:55:45 PM	BCl3 MFC set to  0.000000
2/28/2012	9:55:45 PM	PH3 MFC set to  0.000000
2/28/2012	9:55:45 PM	SiCl4 MFC set to  0.000000
2/28/2012	9:55:45 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	9:55:45 PM	Tube furnace set to 0
2/28/2012	10:07:25 PM	Helium valve closed
2/28/2012	10:07:25 PM	H2 valve closed
2/28/2012	10:07:25 PM	BCl3 valve closed
2/28/2012	10:07:25 PM	PH3 valve closed
2/28/2012	10:07:25 PM	SiCl4 pre valve closed
2/28/2012	10:07:25 PM	SiCl4 post valve closed
2/28/2012	10:07:25 PM	Main Vac valve closed
2/28/2012	10:07:25 PM	Bypass valve closed
2/28/2012	10:07:25 PM	Bubbler valve closed
2/28/2012	10:07:25 PM	Helium MFC set to  0.000000
2/28/2012	10:07:25 PM	H2 MFC set to  0.000000
2/28/2012	10:07:25 PM	BCl3 MFC set to  0.000000
2/28/2012	10:07:25 PM	PH3 MFC set to  0.000000
2/28/2012	10:07:25 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:07:25 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:07:25 PM	Tube furnace set to 0
2/28/2012	10:07:26 PM	Run finished at 10:07 PM
2/28/2012	10:14:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/28/2012	10:14:40 PM	Recipe started at 10:14 PM
2/28/2012	10:14:40 PM	Helium valve closed
2/28/2012	10:14:40 PM	H2 valve closed
2/28/2012	10:14:40 PM	BCl3 valve closed
2/28/2012	10:14:40 PM	PH3 valve closed
2/28/2012	10:14:40 PM	SiCl4 pre valve closed
2/28/2012	10:14:40 PM	SiCl4 post valve closed
2/28/2012	10:14:40 PM	Main Vac valve closed
2/28/2012	10:14:40 PM	Bubbler valve closed
2/28/2012	10:14:40 PM	Bypass valve opened
2/28/2012	10:14:40 PM	Helium MFC set to  0.000000
2/28/2012	10:14:40 PM	H2 MFC set to  0.000000
2/28/2012	10:14:40 PM	BCl3 MFC set to  0.000000
2/28/2012	10:14:40 PM	PH3 MFC set to  0.000000
2/28/2012	10:14:40 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:14:40 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:14:41 PM	Tube furnace set to 0
2/28/2012	10:15:44 PM	Helium valve closed
2/28/2012	10:15:44 PM	H2 valve closed
2/28/2012	10:15:44 PM	BCl3 valve closed
2/28/2012	10:15:44 PM	PH3 valve closed
2/28/2012	10:15:44 PM	SiCl4 pre valve closed
2/28/2012	10:15:44 PM	SiCl4 post valve closed
2/28/2012	10:15:44 PM	Main Vac valve closed
2/28/2012	10:15:44 PM	Bubbler valve closed
2/28/2012	10:15:44 PM	Bypass valve opened
2/28/2012	10:15:44 PM	Helium MFC set to  0.000000
2/28/2012	10:15:44 PM	H2 MFC set to  0.000000
2/28/2012	10:15:44 PM	BCl3 MFC set to  0.000000
2/28/2012	10:15:44 PM	PH3 MFC set to  0.000000
2/28/2012	10:15:44 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:15:44 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:15:44 PM	Tube furnace set to 0
2/28/2012	10:15:55 PM	Helium valve closed
2/28/2012	10:15:55 PM	H2 valve closed
2/28/2012	10:15:55 PM	BCl3 valve closed
2/28/2012	10:15:55 PM	PH3 valve closed
2/28/2012	10:15:55 PM	SiCl4 pre valve closed
2/28/2012	10:15:55 PM	SiCl4 post valve closed
2/28/2012	10:15:55 PM	Bypass valve closed
2/28/2012	10:15:55 PM	Bubbler valve closed
2/28/2012	10:15:55 PM	Main Vac valve opened
2/28/2012	10:15:55 PM	Helium MFC set to  0.000000
2/28/2012	10:15:55 PM	H2 MFC set to  0.000000
2/28/2012	10:15:55 PM	BCl3 MFC set to  0.000000
2/28/2012	10:15:55 PM	PH3 MFC set to  0.000000
2/28/2012	10:15:55 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:15:55 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:15:55 PM	Tube furnace set to 0
2/28/2012	10:15:56 PM	Run finished at 10:15 PM
2/28/2012	10:15:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/28/2012	10:23:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/28/2012	10:23:29 PM	Recipe started at 10:23 PM
2/28/2012	10:23:29 PM	Helium valve closed
2/28/2012	10:23:29 PM	H2 valve closed
2/28/2012	10:23:29 PM	BCl3 valve closed
2/28/2012	10:23:29 PM	PH3 valve closed
2/28/2012	10:23:29 PM	SiCl4 pre valve closed
2/28/2012	10:23:29 PM	SiCl4 post valve closed
2/28/2012	10:23:29 PM	Main Vac valve closed
2/28/2012	10:23:29 PM	Bubbler valve closed
2/28/2012	10:23:29 PM	Bypass valve opened
2/28/2012	10:23:29 PM	Helium MFC set to  0.000000
2/28/2012	10:23:29 PM	H2 MFC set to  0.000000
2/28/2012	10:23:29 PM	BCl3 MFC set to  0.000000
2/28/2012	10:23:29 PM	PH3 MFC set to  0.000000
2/28/2012	10:23:29 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:23:29 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:23:29 PM	Tube furnace set to 0
2/28/2012	10:23:29 PM	Helium valve closed
2/28/2012	10:23:29 PM	H2 valve closed
2/28/2012	10:23:29 PM	BCl3 valve closed
2/28/2012	10:23:29 PM	PH3 valve closed
2/28/2012	10:23:29 PM	SiCl4 pre valve closed
2/28/2012	10:23:29 PM	SiCl4 post valve closed
2/28/2012	10:23:29 PM	Main Vac valve closed
2/28/2012	10:23:29 PM	Bubbler valve closed
2/28/2012	10:23:29 PM	Bypass valve opened
2/28/2012	10:23:29 PM	Helium MFC set to  0.000000
2/28/2012	10:23:29 PM	H2 MFC set to  0.000000
2/28/2012	10:23:29 PM	BCl3 MFC set to  0.000000
2/28/2012	10:23:29 PM	PH3 MFC set to  0.000000
2/28/2012	10:23:29 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:23:29 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:23:30 PM	Tube furnace set to 0
2/28/2012	10:23:30 PM	Helium valve closed
2/28/2012	10:23:30 PM	H2 valve closed
2/28/2012	10:23:30 PM	BCl3 valve closed
2/28/2012	10:23:30 PM	PH3 valve closed
2/28/2012	10:23:30 PM	SiCl4 pre valve closed
2/28/2012	10:23:30 PM	SiCl4 post valve closed
2/28/2012	10:23:30 PM	Bypass valve closed
2/28/2012	10:23:30 PM	Bubbler valve closed
2/28/2012	10:23:30 PM	Main Vac valve opened
2/28/2012	10:23:30 PM	Helium MFC set to  0.000000
2/28/2012	10:23:30 PM	H2 MFC set to  0.000000
2/28/2012	10:23:30 PM	BCl3 MFC set to  0.000000
2/28/2012	10:23:30 PM	PH3 MFC set to  0.000000
2/28/2012	10:23:30 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:23:30 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:23:30 PM	Tube furnace set to 0
2/28/2012	10:24:00 PM	H2 valve closed
2/28/2012	10:24:00 PM	BCl3 valve closed
2/28/2012	10:24:00 PM	PH3 valve closed
2/28/2012	10:24:00 PM	SiCl4 pre valve closed
2/28/2012	10:24:00 PM	SiCl4 post valve closed
2/28/2012	10:24:00 PM	Bypass valve closed
2/28/2012	10:24:00 PM	Bubbler valve closed
2/28/2012	10:24:00 PM	Helium valve opened
2/28/2012	10:24:00 PM	Main Vac valve opened
2/28/2012	10:24:00 PM	Helium MFC set to  20.000000
2/28/2012	10:24:00 PM	H2 MFC set to  0.000000
2/28/2012	10:24:00 PM	BCl3 MFC set to  0.000000
2/28/2012	10:24:00 PM	PH3 MFC set to  0.000000
2/28/2012	10:24:00 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:24:00 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:24:00 PM	Tube furnace set to 0
2/28/2012	10:24:30 PM	Helium valve closed
2/28/2012	10:24:30 PM	H2 valve closed
2/28/2012	10:24:30 PM	BCl3 valve closed
2/28/2012	10:24:30 PM	PH3 valve closed
2/28/2012	10:24:30 PM	SiCl4 pre valve closed
2/28/2012	10:24:30 PM	SiCl4 post valve closed
2/28/2012	10:24:30 PM	Bypass valve closed
2/28/2012	10:24:30 PM	Bubbler valve closed
2/28/2012	10:24:30 PM	Main Vac valve opened
2/28/2012	10:24:30 PM	Helium MFC set to  0.000000
2/28/2012	10:24:30 PM	H2 MFC set to  0.000000
2/28/2012	10:24:30 PM	BCl3 MFC set to  0.000000
2/28/2012	10:24:30 PM	PH3 MFC set to  0.000000
2/28/2012	10:24:30 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:24:30 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:24:30 PM	Tube furnace set to 0
2/28/2012	10:25:00 PM	H2 valve closed
2/28/2012	10:25:00 PM	BCl3 valve closed
2/28/2012	10:25:00 PM	PH3 valve closed
2/28/2012	10:25:00 PM	SiCl4 pre valve closed
2/28/2012	10:25:00 PM	SiCl4 post valve closed
2/28/2012	10:25:00 PM	Bypass valve closed
2/28/2012	10:25:00 PM	Bubbler valve closed
2/28/2012	10:25:00 PM	Helium valve opened
2/28/2012	10:25:00 PM	Main Vac valve opened
2/28/2012	10:25:00 PM	Helium MFC set to  20.000000
2/28/2012	10:25:00 PM	H2 MFC set to  0.000000
2/28/2012	10:25:00 PM	BCl3 MFC set to  0.000000
2/28/2012	10:25:00 PM	PH3 MFC set to  0.000000
2/28/2012	10:25:00 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:25:00 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:25:01 PM	Tube furnace set to 0
2/28/2012	10:25:31 PM	Helium valve closed
2/28/2012	10:25:31 PM	H2 valve closed
2/28/2012	10:25:31 PM	BCl3 valve closed
2/28/2012	10:25:31 PM	PH3 valve closed
2/28/2012	10:25:31 PM	SiCl4 pre valve closed
2/28/2012	10:25:31 PM	SiCl4 post valve closed
2/28/2012	10:25:31 PM	Bypass valve closed
2/28/2012	10:25:31 PM	Bubbler valve closed
2/28/2012	10:25:31 PM	Main Vac valve opened
2/28/2012	10:25:31 PM	Helium MFC set to  0.000000
2/28/2012	10:25:31 PM	H2 MFC set to  0.000000
2/28/2012	10:25:31 PM	BCl3 MFC set to  0.000000
2/28/2012	10:25:31 PM	PH3 MFC set to  0.000000
2/28/2012	10:25:31 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:25:31 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:25:31 PM	Tube furnace set to 0
2/28/2012	10:26:01 PM	H2 valve closed
2/28/2012	10:26:01 PM	BCl3 valve closed
2/28/2012	10:26:01 PM	PH3 valve closed
2/28/2012	10:26:01 PM	SiCl4 pre valve closed
2/28/2012	10:26:01 PM	SiCl4 post valve closed
2/28/2012	10:26:01 PM	Bypass valve closed
2/28/2012	10:26:01 PM	Bubbler valve closed
2/28/2012	10:26:01 PM	Helium valve opened
2/28/2012	10:26:01 PM	Main Vac valve opened
2/28/2012	10:26:01 PM	Helium MFC set to  20.000000
2/28/2012	10:26:01 PM	H2 MFC set to  0.000000
2/28/2012	10:26:01 PM	BCl3 MFC set to  0.000000
2/28/2012	10:26:01 PM	PH3 MFC set to  0.000000
2/28/2012	10:26:01 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:26:01 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:26:01 PM	Tube furnace set to 0
2/28/2012	10:26:31 PM	Helium valve closed
2/28/2012	10:26:31 PM	H2 valve closed
2/28/2012	10:26:31 PM	BCl3 valve closed
2/28/2012	10:26:31 PM	PH3 valve closed
2/28/2012	10:26:31 PM	SiCl4 pre valve closed
2/28/2012	10:26:31 PM	SiCl4 post valve closed
2/28/2012	10:26:31 PM	Bypass valve closed
2/28/2012	10:26:31 PM	Bubbler valve closed
2/28/2012	10:26:31 PM	Main Vac valve opened
2/28/2012	10:26:31 PM	Helium MFC set to  0.000000
2/28/2012	10:26:31 PM	H2 MFC set to  0.000000
2/28/2012	10:26:31 PM	BCl3 MFC set to  0.000000
2/28/2012	10:26:31 PM	PH3 MFC set to  0.000000
2/28/2012	10:26:31 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:26:31 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:26:31 PM	Tube furnace set to 0
2/28/2012	10:27:01 PM	H2 valve closed
2/28/2012	10:27:01 PM	BCl3 valve closed
2/28/2012	10:27:01 PM	PH3 valve closed
2/28/2012	10:27:01 PM	SiCl4 pre valve closed
2/28/2012	10:27:01 PM	SiCl4 post valve closed
2/28/2012	10:27:01 PM	Bypass valve closed
2/28/2012	10:27:01 PM	Bubbler valve closed
2/28/2012	10:27:01 PM	Helium valve opened
2/28/2012	10:27:01 PM	Main Vac valve opened
2/28/2012	10:27:01 PM	Helium MFC set to  20.000000
2/28/2012	10:27:01 PM	H2 MFC set to  0.000000
2/28/2012	10:27:01 PM	BCl3 MFC set to  0.000000
2/28/2012	10:27:01 PM	PH3 MFC set to  0.000000
2/28/2012	10:27:01 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:27:01 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:27:01 PM	Tube furnace set to 0
2/28/2012	10:27:31 PM	Helium valve closed
2/28/2012	10:27:31 PM	H2 valve closed
2/28/2012	10:27:31 PM	BCl3 valve closed
2/28/2012	10:27:31 PM	PH3 valve closed
2/28/2012	10:27:31 PM	SiCl4 pre valve closed
2/28/2012	10:27:31 PM	SiCl4 post valve closed
2/28/2012	10:27:31 PM	Bypass valve closed
2/28/2012	10:27:31 PM	Bubbler valve closed
2/28/2012	10:27:31 PM	Main Vac valve opened
2/28/2012	10:27:31 PM	Helium MFC set to  0.000000
2/28/2012	10:27:31 PM	H2 MFC set to  0.000000
2/28/2012	10:27:31 PM	BCl3 MFC set to  0.000000
2/28/2012	10:27:31 PM	PH3 MFC set to  0.000000
2/28/2012	10:27:31 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:27:32 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:27:32 PM	Tube furnace set to 0
2/28/2012	10:28:02 PM	H2 valve closed
2/28/2012	10:28:02 PM	BCl3 valve closed
2/28/2012	10:28:02 PM	PH3 valve closed
2/28/2012	10:28:02 PM	SiCl4 pre valve closed
2/28/2012	10:28:02 PM	SiCl4 post valve closed
2/28/2012	10:28:02 PM	Bypass valve closed
2/28/2012	10:28:02 PM	Bubbler valve closed
2/28/2012	10:28:02 PM	Helium valve opened
2/28/2012	10:28:02 PM	Main Vac valve opened
2/28/2012	10:28:02 PM	Helium MFC set to  20.000000
2/28/2012	10:28:02 PM	H2 MFC set to  0.000000
2/28/2012	10:28:02 PM	BCl3 MFC set to  0.000000
2/28/2012	10:28:02 PM	PH3 MFC set to  0.000000
2/28/2012	10:28:02 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:28:02 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:28:02 PM	Tube furnace set to 0
2/28/2012	10:28:32 PM	Helium valve closed
2/28/2012	10:28:32 PM	H2 valve closed
2/28/2012	10:28:32 PM	BCl3 valve closed
2/28/2012	10:28:32 PM	PH3 valve closed
2/28/2012	10:28:32 PM	SiCl4 pre valve closed
2/28/2012	10:28:32 PM	SiCl4 post valve closed
2/28/2012	10:28:32 PM	Bypass valve closed
2/28/2012	10:28:32 PM	Bubbler valve closed
2/28/2012	10:28:32 PM	Main Vac valve opened
2/28/2012	10:28:32 PM	Helium MFC set to  0.000000
2/28/2012	10:28:32 PM	H2 MFC set to  0.000000
2/28/2012	10:28:32 PM	BCl3 MFC set to  0.000000
2/28/2012	10:28:32 PM	PH3 MFC set to  0.000000
2/28/2012	10:28:32 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:28:32 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:28:32 PM	Tube furnace set to 0
2/28/2012	10:29:02 PM	H2 valve closed
2/28/2012	10:29:02 PM	BCl3 valve closed
2/28/2012	10:29:02 PM	PH3 valve closed
2/28/2012	10:29:02 PM	SiCl4 pre valve closed
2/28/2012	10:29:02 PM	SiCl4 post valve closed
2/28/2012	10:29:02 PM	Bypass valve closed
2/28/2012	10:29:02 PM	Bubbler valve closed
2/28/2012	10:29:02 PM	Helium valve opened
2/28/2012	10:29:02 PM	Main Vac valve opened
2/28/2012	10:29:02 PM	Helium MFC set to  20.000000
2/28/2012	10:29:02 PM	H2 MFC set to  0.000000
2/28/2012	10:29:02 PM	BCl3 MFC set to  0.000000
2/28/2012	10:29:02 PM	PH3 MFC set to  0.000000
2/28/2012	10:29:02 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:29:02 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:29:02 PM	Tube furnace set to 0
2/28/2012	10:29:32 PM	Helium valve closed
2/28/2012	10:29:32 PM	H2 valve closed
2/28/2012	10:29:32 PM	BCl3 valve closed
2/28/2012	10:29:32 PM	PH3 valve closed
2/28/2012	10:29:32 PM	SiCl4 pre valve closed
2/28/2012	10:29:32 PM	SiCl4 post valve closed
2/28/2012	10:29:32 PM	Bypass valve closed
2/28/2012	10:29:32 PM	Bubbler valve closed
2/28/2012	10:29:32 PM	Main Vac valve opened
2/28/2012	10:29:32 PM	Helium MFC set to  0.000000
2/28/2012	10:29:32 PM	H2 MFC set to  0.000000
2/28/2012	10:29:32 PM	BCl3 MFC set to  0.000000
2/28/2012	10:29:32 PM	PH3 MFC set to  0.000000
2/28/2012	10:29:32 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:29:32 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:29:33 PM	Tube furnace set to 0
2/28/2012	10:30:03 PM	H2 valve closed
2/28/2012	10:30:03 PM	BCl3 valve closed
2/28/2012	10:30:03 PM	PH3 valve closed
2/28/2012	10:30:03 PM	SiCl4 pre valve closed
2/28/2012	10:30:03 PM	SiCl4 post valve closed
2/28/2012	10:30:03 PM	Bypass valve closed
2/28/2012	10:30:03 PM	Bubbler valve closed
2/28/2012	10:30:03 PM	Helium valve opened
2/28/2012	10:30:03 PM	Main Vac valve opened
2/28/2012	10:30:03 PM	Helium MFC set to  20.000000
2/28/2012	10:30:03 PM	H2 MFC set to  0.000000
2/28/2012	10:30:03 PM	BCl3 MFC set to  0.000000
2/28/2012	10:30:03 PM	PH3 MFC set to  0.000000
2/28/2012	10:30:03 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:30:03 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:30:03 PM	Tube furnace set to 0
2/28/2012	10:30:33 PM	Helium valve closed
2/28/2012	10:30:33 PM	H2 valve closed
2/28/2012	10:30:33 PM	BCl3 valve closed
2/28/2012	10:30:33 PM	PH3 valve closed
2/28/2012	10:30:33 PM	SiCl4 pre valve closed
2/28/2012	10:30:33 PM	SiCl4 post valve closed
2/28/2012	10:30:33 PM	Bypass valve closed
2/28/2012	10:30:33 PM	Bubbler valve closed
2/28/2012	10:30:33 PM	Main Vac valve opened
2/28/2012	10:30:33 PM	Helium MFC set to  0.000000
2/28/2012	10:30:33 PM	H2 MFC set to  0.000000
2/28/2012	10:30:33 PM	BCl3 MFC set to  0.000000
2/28/2012	10:30:33 PM	PH3 MFC set to  0.000000
2/28/2012	10:30:33 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:30:33 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:30:33 PM	Tube furnace set to 0
2/28/2012	10:31:03 PM	H2 valve closed
2/28/2012	10:31:03 PM	BCl3 valve closed
2/28/2012	10:31:03 PM	PH3 valve closed
2/28/2012	10:31:03 PM	SiCl4 pre valve closed
2/28/2012	10:31:03 PM	SiCl4 post valve closed
2/28/2012	10:31:03 PM	Bypass valve closed
2/28/2012	10:31:03 PM	Bubbler valve closed
2/28/2012	10:31:03 PM	Helium valve opened
2/28/2012	10:31:03 PM	Main Vac valve opened
2/28/2012	10:31:03 PM	Helium MFC set to  20.000000
2/28/2012	10:31:03 PM	H2 MFC set to  0.000000
2/28/2012	10:31:03 PM	BCl3 MFC set to  0.000000
2/28/2012	10:31:03 PM	PH3 MFC set to  0.000000
2/28/2012	10:31:03 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:31:03 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:31:03 PM	Tube furnace set to 0
2/28/2012	10:31:33 PM	Helium valve closed
2/28/2012	10:31:33 PM	H2 valve closed
2/28/2012	10:31:33 PM	BCl3 valve closed
2/28/2012	10:31:33 PM	PH3 valve closed
2/28/2012	10:31:33 PM	SiCl4 pre valve closed
2/28/2012	10:31:33 PM	SiCl4 post valve closed
2/28/2012	10:31:33 PM	Bypass valve closed
2/28/2012	10:31:33 PM	Bubbler valve closed
2/28/2012	10:31:33 PM	Main Vac valve opened
2/28/2012	10:31:33 PM	Helium MFC set to  0.000000
2/28/2012	10:31:33 PM	H2 MFC set to  0.000000
2/28/2012	10:31:33 PM	BCl3 MFC set to  0.000000
2/28/2012	10:31:33 PM	PH3 MFC set to  0.000000
2/28/2012	10:31:33 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:31:33 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:31:33 PM	Tube furnace set to 0
2/28/2012	10:32:03 PM	H2 valve closed
2/28/2012	10:32:03 PM	BCl3 valve closed
2/28/2012	10:32:03 PM	PH3 valve closed
2/28/2012	10:32:03 PM	SiCl4 pre valve closed
2/28/2012	10:32:03 PM	SiCl4 post valve closed
2/28/2012	10:32:03 PM	Bypass valve closed
2/28/2012	10:32:03 PM	Bubbler valve closed
2/28/2012	10:32:03 PM	Helium valve opened
2/28/2012	10:32:03 PM	Main Vac valve opened
2/28/2012	10:32:03 PM	Helium MFC set to  20.000000
2/28/2012	10:32:03 PM	H2 MFC set to  0.000000
2/28/2012	10:32:03 PM	BCl3 MFC set to  0.000000
2/28/2012	10:32:03 PM	PH3 MFC set to  0.000000
2/28/2012	10:32:03 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:32:03 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:32:04 PM	Tube furnace set to 0
2/28/2012	10:32:34 PM	Helium valve closed
2/28/2012	10:32:34 PM	H2 valve closed
2/28/2012	10:32:34 PM	BCl3 valve closed
2/28/2012	10:32:34 PM	PH3 valve closed
2/28/2012	10:32:34 PM	SiCl4 pre valve closed
2/28/2012	10:32:34 PM	SiCl4 post valve closed
2/28/2012	10:32:34 PM	Bypass valve closed
2/28/2012	10:32:34 PM	Bubbler valve closed
2/28/2012	10:32:34 PM	Main Vac valve opened
2/28/2012	10:32:34 PM	Helium MFC set to  0.000000
2/28/2012	10:32:34 PM	H2 MFC set to  0.000000
2/28/2012	10:32:34 PM	BCl3 MFC set to  0.000000
2/28/2012	10:32:34 PM	PH3 MFC set to  0.000000
2/28/2012	10:32:34 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:32:34 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:32:34 PM	Tube furnace set to 0
2/28/2012	10:33:04 PM	H2 valve closed
2/28/2012	10:33:04 PM	BCl3 valve closed
2/28/2012	10:33:04 PM	PH3 valve closed
2/28/2012	10:33:04 PM	SiCl4 pre valve closed
2/28/2012	10:33:04 PM	SiCl4 post valve closed
2/28/2012	10:33:04 PM	Bypass valve closed
2/28/2012	10:33:04 PM	Bubbler valve closed
2/28/2012	10:33:04 PM	Helium valve opened
2/28/2012	10:33:04 PM	Main Vac valve opened
2/28/2012	10:33:04 PM	Helium MFC set to  20.000000
2/28/2012	10:33:04 PM	H2 MFC set to  0.000000
2/28/2012	10:33:04 PM	BCl3 MFC set to  0.000000
2/28/2012	10:33:04 PM	PH3 MFC set to  0.000000
2/28/2012	10:33:04 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:33:04 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:33:04 PM	Tube furnace set to 0
2/28/2012	10:33:34 PM	Helium valve closed
2/28/2012	10:33:34 PM	H2 valve closed
2/28/2012	10:33:34 PM	BCl3 valve closed
2/28/2012	10:33:34 PM	PH3 valve closed
2/28/2012	10:33:34 PM	SiCl4 pre valve closed
2/28/2012	10:33:34 PM	SiCl4 post valve closed
2/28/2012	10:33:34 PM	Bypass valve closed
2/28/2012	10:33:34 PM	Bubbler valve closed
2/28/2012	10:33:34 PM	Main Vac valve opened
2/28/2012	10:33:34 PM	Helium MFC set to  0.000000
2/28/2012	10:33:34 PM	H2 MFC set to  0.000000
2/28/2012	10:33:34 PM	BCl3 MFC set to  0.000000
2/28/2012	10:33:34 PM	PH3 MFC set to  0.000000
2/28/2012	10:33:34 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:33:34 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:33:34 PM	Tube furnace set to 0
2/28/2012	10:33:35 PM	Run finished at 10:33 PM
2/28/2012	10:33:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/28/2012	10:34:09 PM	Main Vac valve closed
2/28/2012	10:34:18 PM	Main Vac valve opened
2/28/2012	10:35:54 PM	Main Vac valve closed
2/28/2012	10:36:03 PM	Main Vac valve opened
2/28/2012	10:36:30 PM	Recipe started at 10:36 PM
2/28/2012	10:36:30 PM	Helium valve closed
2/28/2012	10:36:30 PM	H2 valve closed
2/28/2012	10:36:30 PM	BCl3 valve closed
2/28/2012	10:36:30 PM	PH3 valve closed
2/28/2012	10:36:30 PM	SiCl4 pre valve closed
2/28/2012	10:36:30 PM	SiCl4 post valve closed
2/28/2012	10:36:30 PM	Main Vac valve closed
2/28/2012	10:36:30 PM	Bypass valve closed
2/28/2012	10:36:30 PM	Bubbler valve closed
2/28/2012	10:36:30 PM	Helium MFC set to  0.000000
2/28/2012	10:36:30 PM	H2 MFC set to  0.000000
2/28/2012	10:36:30 PM	BCl3 MFC set to  0.000000
2/28/2012	10:36:30 PM	PH3 MFC set to  0.000000
2/28/2012	10:36:30 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:36:30 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:36:30 PM	Tube furnace set to 0
2/28/2012	10:36:33 PM	Helium valve closed
2/28/2012	10:36:33 PM	BCl3 valve closed
2/28/2012	10:36:33 PM	PH3 valve closed
2/28/2012	10:36:33 PM	SiCl4 pre valve closed
2/28/2012	10:36:33 PM	SiCl4 post valve closed
2/28/2012	10:36:33 PM	Main Vac valve closed
2/28/2012	10:36:33 PM	Bypass valve closed
2/28/2012	10:36:33 PM	Bubbler valve closed
2/28/2012	10:36:33 PM	H2 valve opened
2/28/2012	10:36:33 PM	Helium MFC set to  0.000000
2/28/2012	10:36:33 PM	H2 MFC set to  500.000000
2/28/2012	10:36:33 PM	BCl3 MFC set to  0.000000
2/28/2012	10:36:33 PM	PH3 MFC set to  0.000000
2/28/2012	10:36:33 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:36:33 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:36:33 PM	Tube furnace set to 0
2/28/2012	10:37:37 PM	Helium valve closed
2/28/2012	10:37:37 PM	BCl3 valve closed
2/28/2012	10:37:37 PM	PH3 valve closed
2/28/2012	10:37:37 PM	SiCl4 pre valve closed
2/28/2012	10:37:37 PM	SiCl4 post valve closed
2/28/2012	10:37:37 PM	Main Vac valve closed
2/28/2012	10:37:37 PM	Bypass valve closed
2/28/2012	10:37:37 PM	H2 valve opened
2/28/2012	10:37:37 PM	Bubbler valve opened
2/28/2012	10:37:37 PM	Helium MFC set to  0.000000
2/28/2012	10:37:37 PM	H2 MFC set to  500.000000
2/28/2012	10:37:37 PM	BCl3 MFC set to  0.000000
2/28/2012	10:37:37 PM	PH3 MFC set to  0.000000
2/28/2012	10:37:37 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:37:37 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:37:37 PM	Tube furnace set to 0
2/28/2012	10:37:38 PM	Helium valve closed
2/28/2012	10:37:38 PM	BCl3 valve closed
2/28/2012	10:37:38 PM	PH3 valve closed
2/28/2012	10:37:38 PM	SiCl4 pre valve closed
2/28/2012	10:37:38 PM	SiCl4 post valve closed
2/28/2012	10:37:38 PM	Main Vac valve closed
2/28/2012	10:37:38 PM	Bypass valve closed
2/28/2012	10:37:38 PM	H2 valve opened
2/28/2012	10:37:38 PM	Bubbler valve opened
2/28/2012	10:37:38 PM	Helium MFC set to  0.000000
2/28/2012	10:37:38 PM	H2 MFC set to  500.000000
2/28/2012	10:37:38 PM	BCl3 MFC set to  0.000000
2/28/2012	10:37:38 PM	PH3 MFC set to  0.000000
2/28/2012	10:37:38 PM	SiCl4 MFC set to  0.000000
2/28/2012	10:37:38 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:37:38 PM	Tube furnace set to 1000
2/28/2012	10:57:39 PM	Helium valve closed
2/28/2012	10:57:39 PM	BCl3 valve closed
2/28/2012	10:57:39 PM	Main Vac valve closed
2/28/2012	10:57:39 PM	Bypass valve closed
2/28/2012	10:57:39 PM	H2 valve opened
2/28/2012	10:57:39 PM	PH3 valve opened
2/28/2012	10:57:39 PM	SiCl4 pre valve opened
2/28/2012	10:57:39 PM	SiCl4 post valve opened
2/28/2012	10:57:39 PM	Bubbler valve opened
2/28/2012	10:57:39 PM	Helium MFC set to  0.000000
2/28/2012	10:57:39 PM	H2 MFC set to  500.000000
2/28/2012	10:57:39 PM	BCl3 MFC set to  0.000000
2/28/2012	10:57:39 PM	PH3 MFC set to  0.300000
2/28/2012	10:57:39 PM	SiCl4 MFC set to  25.000000
2/28/2012	10:57:39 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	10:57:39 PM	Tube furnace set to 1000
2/28/2012	11:05:39 PM	Helium valve closed
2/28/2012	11:05:39 PM	BCl3 valve closed
2/28/2012	11:05:39 PM	PH3 valve closed
2/28/2012	11:05:39 PM	SiCl4 pre valve closed
2/28/2012	11:05:39 PM	SiCl4 post valve closed
2/28/2012	11:05:39 PM	Main Vac valve closed
2/28/2012	11:05:39 PM	Bypass valve closed
2/28/2012	11:05:39 PM	H2 valve opened
2/28/2012	11:05:39 PM	Bubbler valve opened
2/28/2012	11:05:39 PM	Helium MFC set to  0.000000
2/28/2012	11:05:39 PM	H2 MFC set to  500.000000
2/28/2012	11:05:39 PM	BCl3 MFC set to  0.000000
2/28/2012	11:05:39 PM	PH3 MFC set to  0.000000
2/28/2012	11:05:39 PM	SiCl4 MFC set to  0.000000
2/28/2012	11:05:39 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	11:05:39 PM	Tube furnace set to 750
2/28/2012	11:10:39 PM	H2 valve closed
2/28/2012	11:10:39 PM	BCl3 valve closed
2/28/2012	11:10:39 PM	PH3 valve closed
2/28/2012	11:10:39 PM	SiCl4 pre valve closed
2/28/2012	11:10:39 PM	SiCl4 post valve closed
2/28/2012	11:10:39 PM	Main Vac valve closed
2/28/2012	11:10:39 PM	Bypass valve closed
2/28/2012	11:10:39 PM	Helium valve opened
2/28/2012	11:10:39 PM	Bubbler valve opened
2/28/2012	11:10:39 PM	Helium MFC set to  500.000000
2/28/2012	11:10:39 PM	H2 MFC set to  0.000000
2/28/2012	11:10:39 PM	BCl3 MFC set to  0.000000
2/28/2012	11:10:39 PM	PH3 MFC set to  0.000000
2/28/2012	11:10:39 PM	SiCl4 MFC set to  0.000000
2/28/2012	11:10:39 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	11:10:39 PM	Tube furnace set to 0
2/28/2012	11:25:01 PM	Helium valve closed
2/28/2012	11:25:01 PM	H2 valve closed
2/28/2012	11:25:01 PM	BCl3 valve closed
2/28/2012	11:25:01 PM	PH3 valve closed
2/28/2012	11:25:01 PM	SiCl4 pre valve closed
2/28/2012	11:25:01 PM	SiCl4 post valve closed
2/28/2012	11:25:01 PM	Main Vac valve closed
2/28/2012	11:25:01 PM	Bypass valve closed
2/28/2012	11:25:01 PM	Bubbler valve closed
2/28/2012	11:25:01 PM	Helium MFC set to  0.000000
2/28/2012	11:25:01 PM	H2 MFC set to  0.000000
2/28/2012	11:25:01 PM	BCl3 MFC set to  0.000000
2/28/2012	11:25:01 PM	PH3 MFC set to  0.000000
2/28/2012	11:25:01 PM	SiCl4 MFC set to  0.000000
2/28/2012	11:25:01 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	11:25:02 PM	Tube furnace set to 0
2/28/2012	11:25:03 PM	Run finished at 11:25 PM
2/28/2012	11:27:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/28/2012	11:28:00 PM	Recipe started at 11:28 PM
2/28/2012	11:28:00 PM	Helium valve closed
2/28/2012	11:28:00 PM	H2 valve closed
2/28/2012	11:28:00 PM	BCl3 valve closed
2/28/2012	11:28:00 PM	PH3 valve closed
2/28/2012	11:28:00 PM	SiCl4 pre valve closed
2/28/2012	11:28:00 PM	SiCl4 post valve closed
2/28/2012	11:28:00 PM	Main Vac valve closed
2/28/2012	11:28:00 PM	Bubbler valve closed
2/28/2012	11:28:00 PM	Bypass valve opened
2/28/2012	11:28:00 PM	Helium MFC set to  0.000000
2/28/2012	11:28:00 PM	H2 MFC set to  0.000000
2/28/2012	11:28:00 PM	BCl3 MFC set to  0.000000
2/28/2012	11:28:00 PM	PH3 MFC set to  0.000000
2/28/2012	11:28:00 PM	SiCl4 MFC set to  0.000000
2/28/2012	11:28:00 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	11:28:00 PM	Tube furnace set to 0
2/28/2012	11:29:01 PM	Helium valve closed
2/28/2012	11:29:01 PM	H2 valve closed
2/28/2012	11:29:01 PM	BCl3 valve closed
2/28/2012	11:29:01 PM	PH3 valve closed
2/28/2012	11:29:01 PM	SiCl4 pre valve closed
2/28/2012	11:29:01 PM	SiCl4 post valve closed
2/28/2012	11:29:01 PM	Main Vac valve closed
2/28/2012	11:29:01 PM	Bubbler valve closed
2/28/2012	11:29:01 PM	Bypass valve opened
2/28/2012	11:29:01 PM	Helium MFC set to  0.000000
2/28/2012	11:29:01 PM	H2 MFC set to  0.000000
2/28/2012	11:29:01 PM	BCl3 MFC set to  0.000000
2/28/2012	11:29:01 PM	PH3 MFC set to  0.000000
2/28/2012	11:29:01 PM	SiCl4 MFC set to  0.000000
2/28/2012	11:29:01 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	11:29:01 PM	Tube furnace set to 0
2/28/2012	11:30:01 PM	Helium valve closed
2/28/2012	11:30:01 PM	H2 valve closed
2/28/2012	11:30:01 PM	BCl3 valve closed
2/28/2012	11:30:01 PM	PH3 valve closed
2/28/2012	11:30:01 PM	SiCl4 pre valve closed
2/28/2012	11:30:01 PM	SiCl4 post valve closed
2/28/2012	11:30:01 PM	Bypass valve closed
2/28/2012	11:30:01 PM	Bubbler valve closed
2/28/2012	11:30:01 PM	Main Vac valve opened
2/28/2012	11:30:01 PM	Helium MFC set to  0.000000
2/28/2012	11:30:01 PM	H2 MFC set to  0.000000
2/28/2012	11:30:01 PM	BCl3 MFC set to  0.000000
2/28/2012	11:30:01 PM	PH3 MFC set to  0.000000
2/28/2012	11:30:01 PM	SiCl4 MFC set to  0.000000
2/28/2012	11:30:01 PM	Bypass solenoid MFC set to  0.000000
2/28/2012	11:30:01 PM	Tube furnace set to 0
2/28/2012	11:30:02 PM	Run finished at 11:30 PM
2/28/2012	11:30:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
